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SEMI E109-0305 © SEMI 2001, 2005 2 SEMI E84 — Specification for Enhanced C arrier Handoff Parallel I/O interface SEMI E99 — The Carrier ID Reader/Writ er Functional Standar d : Specifc ation of Co ncepts, Behavior, and S…

SEMI E109-0305 © SEMI 2001, 2005 1

SEMI E109-0305

SPECIFICATION FOR RETICLE AND POD MANAGEMENT (RPMS)

This specification was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North American Regional Standards Committee on December 10, 2004. Initially available at www.semi.org

February 2005; to be published March 2005. Originally published July 2001; previously published

November 2004.

1 Purpose

1.1 This document provides standardized behavior for lithography, reticle inspection, and bare reticle stocker

equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle

stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod

transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles within

the equipment, identification and verification of both reticle pods and reticles, inspection and qualification of

reticles, and other relevant information such as tracking reticle usage.

2 Scope

2.1 This is a standard that covers host and equipment communication for equipment that handles reticles. This only

includes equipment that handles reticles both in and outside of a reticle pod.

2.2 The scope of this document is to define standards that facilitate the host’s knowledge and role in automated and

manual reticle pod transfers, reticle transfers to and from the reticle pod, internal reticle movement, identification

and verification of ReticleID, inspection and qualification of reticles, and tracking reticle usage. Specifically, this

document provides state models and scenarios that define the host interaction with the equipment for the following:

 Reticle pod transfer between AMHS vehicles and production equipment, bare reticle stockers, and reticle

inspection equipment reticle load ports.

 Reticle transfers to/from lithography production equipment internal reticle library space.

 Equipment and reticle load port access mode switching.

 Reticle Pod to load port association.

 Reticle Pod ID verification and Reticle Pod slot map verification.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 This standard applies to semiconductor equipment that handles reticles and reticle carriers. This standard is

intended to be used for lithography production, bare reticle storage, and reticle inspection equipment. It may or may

not be applied to other types of equipment.

4 Referenced Standards

4.1 SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concept, Behavior, and Services

SEMI E41 — Exception Management (EM) Standard

SEMI E53 — Event Reporting

SEMI E109-0305 © SEMI 2001, 2005 2

SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O interface

SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specifcation of Concepts, Behavior, and Services

SEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AGT — Automated Guided Transport

5.1.2 AGV— Automated Guided Vehicle

5.1.3 AMHS — Automated Material Handling System

5.1.4 ARHS — Automated Reticle Handling System

5.1.5 GEM — Generic Equipment Model

5.1.6 IRL — Internal Reticle Library

5.1.7 OHT — Overhead Hoist Transport

5.1.8 PGV — Person Guided Vehicle

5.1.9 PIO — Parallel Input/Output Interface

5.1.10 RGT — Rail Guided Transport

5.1.11 RGV — Rail Guided Vehicle

5.1.12 RSP – Reticle SMIF Pod

5.2 Definitions

5.2.1 Automated Material Handling System — an automated system to store and transport materials within the

factory.

5.2.2 Automated Reticle Handling System — a specific type of Automated Material Handling System to store and

transport reticles and reticle pods within the factory.

5.2.3 automation — the degree to which activities of machines or production systems are self-acting. In this

standard automation provides methods that will reduce the amount of operator intervention required.

5.2.4 buffer — a set of one or more locations for holding reticles at/inside the production equipment.

5.2.5 collection event — a collection event is an event (or grouping of related events) on the equipment that is

considered to be significant to the host.

5.2.6 content map — ordered list of reticle identifiers corresponding to slot 1,2,3…n. (Note that this is redundant

with the definition in Table 6).

5.2.7

host — the factory computer system or an intermediate system that represents the factory and the user to the

equipment.

5.2.8 Internal Pod Buffer — storage area for reticle pod that is internal to the equipment.

5.2.9 internal reticle library — a set of locations within the equipment to store reticles. These locations exclude

load ports.

5.2.10 kitting — the act of placing a group of 1 or more reticles in a reticle pod for removal from a bare reticle

stocker. This is accomplished via a ReticleTransferJob that specifies one or more reticles for removal from the

stocker, or by one or more MoveReticle services that specify a destination that is a Pod Location.

5.2.11 load — the operation of placing a pod on a load port.

5.2.12 load port — the interface location on the equipment where pods are loaded and unloaded.

SEMI E109-0305 © SEMI 2001, 2005 3

5.2.13 Multi-Reticle Pod — TBD

5.2.14 object instantiation — the act of storing of information related to a physical or logical entity so that it can be

recalled on demand based on its public identifier.

5.2.15 on-line equipment — equipment that is connected to, and able to communicate fully with, the host.

5.2.16 pod — in this document pod refers to an RSP or a Multi Reticle SMIF Pod.

5.2.17 PodID — a readable and unique identifier for the pod.

5.2.18 PodID read — the process of the equipment reading the PodID from the carrier.

5.2.19 PodID tag (tag, ID tag) — a physical device for storing PodID and other information. There are two basic

types of tags, read-only tags and read/write tags. [SEMI E99]

5.2.20 process equipment — equipment used to produce product, such as semiconductor devices. This excludes

metrology and material handling equipment.

5.2.21 production equipment — equipment used to produce product, such as semiconductor devices, including

substrate sorting, process, and metrology equipment and excluding material handling equipment.

5.2.22 properties — a set of name value pairs assigned to an object or used in a service message to include

additional information about the object (i.e., pod, port, etc.).

5.2.23 re-initialization — a process where production equipment is either powered off then on or when some kind

of hardware or software reset is initiated to cause the equipment to reset and possibly reload its software. On

production equipment that contains some kind of mass storage device this can also be called a “reboot”.

5.2.24 read position — any position where the tag on a pod can be read.

5.2.25 reticle — a mask that contains the patterns to be reproduced on a substrate; the image may be equal to or

larger than the final projected image.

5.2.26 Reticle SMIF Pod (RSP) — minienvironment compatible carrier capable of holding one 6 inch or one 230

mm reticle in a horizontal orientation during transport and storage and is compatible with a Standard Mechanical

Interface (SMIF) per SEMI E19.4.

5.2.27 single communication connection — exactly one physical connection using exactly one logical session and a

standard set of messages.

5.2.28 slot map –– the information that relates which slots in a reticle pod hold reticles, both correctly and

incorrectly.

5.2.29 slot map read –– the process of the equipment reading the slot map for substrate position and placement

within the pod.

5.2.30 standard message set — messages conforming to standard message specifications.

5.2.31 transfer unit

— maximum number of pods allowed in a specific transfer service:

 AA is the maximum number of pods allowed for acquisition at the transfer source.

 BB is the maximum number of pods allowed for deposit at the transfer destination.

 CC is the maximum number of carrier pods allowed for transfer in one transport vehicle.

The transfer unit is the minimum of AA, BB, and CC.

NOTE 1: At the time this document was originally written, December 2000, transfer unit for reticle transfer to process

equipment is expected to be equal to one. Transfer unit to other equipment may be greater than one.

5.2.32 unload — the operation of removing a pod from a load port.

5.2.33 write position — any position on a load port or in an internal buffer from which the tag on a pod can be

written to. This position may vary on any particular equipment depending on the write technology selected by the

end user. The read position and the write position may or may not be the same position.