semi合集-English.pdf - 第1158页

SEMI E5-1104 © SEMI 1982, 2004 100 Figure 4 The Six Possible Handshakes 10.8.1.3 Figure 5 summarizes the interaction of the timers, ha ndshake messages, and the error me ssages in the form of a flow chart. It also ide nt…

SEMI E5-1104 © SEMI 1982, 2004 99

Stream,Function Name (Mnemonic) Direction

S3,F36 Reticle Transfer Job Request Acknowledgement

Description

This message acknowledges the ReticleTransferJobRequest.

Structure

L,2

1. <RPMACK>

2. L,n

1. L,2

1. <ERRCODE

2. <ERRTEXT

n. L,2

1. <ERRCODE

2. <ERRTEXT

Exception

None

10.8 Stream 4 Material Control — The material control stream contains the original material control protocol and

the newer protocol which supports SEMI E32.

10.8.1 Original Material Control Protocol — The functions in the material control stream are used to effect the

automatic transfer of material between equipment. A simple handshake is achieved which provides for a variety of

error conditions which gracefully terminate the handshake. Separate messages advise the host of errors and

completed material transfers.

10.8.1.1 Since the handshake and host messages are separate, the handshake may be achieved transparently through

the host or by direct connection between equipment. The host completes the handshake by relaying messages

between the equipment. Only a single port is required on the equipment, and the equipment has a simple message

handling requirement. When a direct connection is desired, at least three ports are required, the receiving equipment

must look like the host with respect to the sending equipment, and message handling in the equipment is

significantly more complicated than in the host-only connection. Nevertheless, the direct connection may still be

chosen in an attempt to provide operation without a host. Since the host is reasonably transparent in the material

handshake, a simple explanation of the handshake may be achieved by just considering the exchange of messages

between the sender, the equipment wanting to get rid of material, and the receiver (the equipment able to accept the

material).

10.8.1.2 Figure 4 shows six possible handshake situations between the sender and the receiver. There are two

normal handshakes. Figure 4(a) shows the normal three-message exchange when material is passed between

equipment. The host is informed of a complete transfer of material. Figure 4(b) shows an alternative message

exchange where the sender changes its mind and decides not to send the material. Figures 4(c) and (d) show two

situations where the material gets stuck during the transfer. In each situation an error message is issued to the host

from the equipment where the material is stuck. The other equipment terminates normally. When material is stuck,

manual intervention is required to move the material towards the equipment which indicates the stuck condition.

The manual intervention has two possible outcomes. One, the material can be moved to a position where the

handshake can resume or, two, the material is broken or lost from the transfer. Lost material causes a lost material

error message to be sent to the host prior to resuming the operation. The specific details of recovering front stuck

material are equipment-dependent. The stuck material condition is determined by the amount of time the material

transfer mechanism is turned on. The sender claims stuck material if the material is not clear of its sensor before a

time t1. The receiver claims stuck material if the material is not received before time t2. Figures 4(e) and (f) show

the possible error conditions in the unlikely event that for some reason a handshake message is lost. Figure 4(e)

shows that time t3 is the longest that the sender will wait for material received message. Times t2 and t3 set an

upper limit on the amount of time either material transport mechanism will operate.

Figure 4

The Six Possible Handshakes

10.8.1.3 Figure 5 summarizes the interaction of the timers, handshake messages, and the error messages in the form

of a flow chart. It also identifies specific states for the sender and the receiver. These states are referred to in the

messages.

The ranges of timer values are as follows:

tl — time to leave sender

tl + 10 <= t2 <= 60 sec. — time to receive

t2 + 10 <= t3 <= 70 sec. — time to complete send

Default values, tl = 10 sec., t2 = 60 sec., t3 = 70 sec.

NOTE 6: t1, t2, t3 defined for Stream 4 are not to be confused with timeouts T1, T2, T3, and T4 defined in SEMI E4 (SECS-I).

Figure 5

Material Control-Handshake Flowchart