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SEMI E30-1103 © SEMI 1992, 2003 30 4.2.5.5 Scenario Request Equipm ent Status Report: COMMENT HOST EQUIPMENT COMMENT Host requests report of selected status variable values S1,F3--> <--S1,F4 Equipment responds with…
SEMI E30-1103 © SEMI 1992, 2003
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4.2.4.5 Scenarios — Zone Transition Event occurs in equipment:
COMMENTS HOST EQUIPMENT COMMENTS
Send enabled event report to host as shown in Section 4.2.1.
Host defines Limit Attributes:
COMMENTS HOST EQUIPMENT COMMENTS
[IF] S2,F45 is Multi-block
[THEN] Send Multi-block inquire S2,F39-->
<--S2,F40 Multi-block grant.
[END IF]
Host defines new variable limit
attributes. S2,F45-->
<--S2,F46 Equipment acknowledges host
request.
Host queries equipment for current Limits:
COMMENTS HOST EQUIPMENT COMMENTS
Host queries equipment S2,F47-->
for current variable limit
attribute definitions.
<--S2,F48 Equipment returns report
containing requested variable
limit attribute values.
4.2.5 Status Data Collection
4.2.5.1 Purpose — This capability allows the host to query the equipment for selected status information and is
useful in synchronizing with equipment status.
4.2.5.2 Definitions
Status variable value (SV) — A data item containing the value of a status variable. See SEMI E5 for a full definition
of this data item.
Status variable ID (SVID) — A unique identifier of a status variable. See SEMI E5 for a full definition of this data
item.
4.2.5.3 Detailed Description — The host may query equipment status by specifying the desired SVID’s. Upon such
a request, the equipment sends the host the value of the selected status variables. The host also may request the
description (name and units) of any or all available status variables.
4.2.5.4 Requirements
— The equipment manufacturer must provide unique SVID’s for the various status variables (SV) available for data
collection in the equipment.
— All status data is available for status data collection. See Section 5.2, Variable Item List, for a list of status
variables.
— All SV’s must contain valid data whenever provided to the host.
SEMI E30-1103 © SEMI 1992, 2003
30
4.2.5.5 Scenario
Request Equipment Status Report:
COMMENT HOST EQUIPMENT COMMENT
Host requests report of selected
status variable values S1,F3-->
<--S1,F4 Equipment responds with the
requested status variable
data.
Request Equipment Status Variable Name list:
COMMENT HOST EQUIPMENT COMMENT
Host requests equipment to identify
selected status variables. S1,F11-->
<--S1,F12 Equipment responds with the
requested status variable
descriptions.
4.2.6 On-line Identification
4.2.6.1 Purpose — Implementation of SEMI E5 (a GEM Fundamental Requirement) requires the equipment to
accept the S1,F1 from the Host at any time while it is ONLINE and COMMUNICATING, and respond with S1,F2.
The On-line Identification capability describes the host-initiated scenario. The equipment-initiated scenario is used
for a different purpose and is defined in sections 3.3 and 4.12 describing the GEM “Control Model”.
4.2.6.2 Definitions
Equipment Model Type (MDLN) — ASCII string containing the equipment model. See SEMI E5 for a full definition
of this data item.
Equipment Software Revision Code (SOFTREV) — ASCII string containing the equipment software revision. See
SEMI E5 for a full definition of this data item.
4.2.6.3 Detailed Description — On-line Identification allows the host to verify the presence and identity of the
equipment.
4.2.6.4 Requirements — (Host-Initiated) An S1,F2 response from the equipment must provide MDLN and
SOFTREV information which reflects the hardware and software configuration of the equipment.
SOFTREV must uniquely identify different releases of equipment software. Any change in equipment software
must result in a corresponding change to SOFTREV.
The equipment-initiated S1,F1 is not required except as described in sections 3.3 and 4.12 describing the GEM
“Control Model”.
4.2.6.5 Scenario:
Host Initiated
COMMENT HOST EQUIPMENT COMMENT
Are you there? S1,F1-->
<--S1,F2 Equipment replies with MDLN and
SOFTREV.
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4.3 Alarm Management — The alarm management
capability provides for host notification and
management of alarm conditions occurring on the
equipment.
4.3.1 Purpose — Historically, a precise definition of
an equipment alarm has been absent. Consequently,
differing interpretations have resulted in inconsistent
implementations. This is addressed by providing a more
rigorous definition (see definition in Section 4.3.2
below) of an alarm.
In addition, it is often important for equipment to report
more extensive information to the host than has been
available in the S5,F1/F2 (Alarm Report Send/
Acknowledge) transaction. The data required in such
cases is very dependent on equipment type, host
information requirements, and alarm situation. This
issue is addressed by providing event reporting
methods that are tied to alarm state changes.
Lastly, the alarm management capability provides
mechanisms for:
— Reporting the time of an alarm state change,
— Uploading a list of alarm texts,
— Enabling and disabling the notification of specific
alarms, and
— Host query of alarms set and enabled status on the
equipment.
4.3.2 Definitions
Alarm — An alarm is related to any abnormal situation
on the equipment that may endanger people, equipment,
or material being processed. Such abnormal situations
are defined by the equipment manufacturer based on
physical safety limitations. Equipment activities
potentially impacted by the presence of an alarm shall
be inhibited.
Note that exceeding control limits associated with
process tolerance does not constitute an alarm nor do
normal equipment events such as the start or
completion of processing.
AlarmsEnabled — Status value consisting of a list of
the alarm ID’s currently enabled for reporting to the
host. See SEMI E5 for a full definition of this variable
data item.
AlarmsSet — Status value consisting of a list of the
alarm ID’s currently in the ALARM SET (or unsafe)
state. See SEMI E5 for a full definition of this variable
data item.
ALCD — Alarm code data item used in the S5,F1
(Alarm Report Send) and S5,F6 (List Alarm Data)
messages. This code is divided into two parts, the alarm
set/cleared bit and the 7 bit alarm category code. Only
the set/cleared bit is used—bit 8 = 1 means alarm set, =
0 means alarm cleared. The alarm category code is not
used. See SEMI E5 for a full definition of this data
item.
ALID — Alarm identifier. See SEMI E5 for a full
definition of this data item.
ALTX — Data item contained in the S5,F1 and S5,F6
messages containing a brief textual description of an
alarm. See SEMI E5 for a full definition of this data
item.
Figure 4.3
State Diagram for Alarm ALID
n
4.3.3 Detailed Description — Two alarm notification
mechanisms are defined to achieve the flexibility
necessary for the reporting required by host systems.
First, stream 5 alarm reporting enables a brief, yet
fixed, method for notification of alarm occurrences
using the S5,F1/F2 transaction. Second, to address the
host’s potential need for more extensive and flexible
data reporting, two collection events (“alarm set” and
“alarm cleared”) are defined for each possible alarm
condition on the equipment to allow the use of event
data collection mechanisms. In the latter case, reports
are sent by the equipment using the Event Report/
Acknowledge transaction (see Section 4.2 on event data
collection).
The alarm
n
detected and cleared events are derived
from the state model for an alarm (see Figure 4.3 and
Table 4.3.1). In this model each of n alarms can be in
one of two possible states, either ALARM CLEAR or
ALARM SET. The transition from the ALARM
CLEAR to the ALARM SET state is defined as the
collection event “Alarm
n
detected” (transition 1).
Conversely, the transition from ALARM SET to
ALARM CLEAR is defined as the collection event
“Alarm
n
cleared” (transition 2).
NOTE 8: The alarm capability is intended as an addition to
standard safety alarms (e.g., lights, horns). There is no intent
to replace direct operator notification of such problems, nor is
there the expectation that the host can prevent or directly
address such alarms.