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SEMI M29-1296 © SEMI 1996, 2003 7 Figure 9 Outer Dimens ions of Box B ottom 5.4.2 Supporti ng Rib and Poka-yoke Rib — Positio ns of a supporting r ib for supporting a shipp ing cassette inside a box bottom and a poka-yok…
SEMI M29-1296 © SEMI 1996, 2003 6
Standardized Dimension
Location
13 Wafers 25 Wafers
T1 ø 430 max ø 450 max
T2 116.5 ± 1 176.5 ± 1
T3 5 min ←
T4 30° ←
T5 38.5° ←
T6 22.5° ←
T7 158 ± 1 ←
T8 80 ± 1 140 ± 1
T9 156.5 ± 0.5 ←
T10 171.5 ± 0.5 ←
T11 95.5 ± 0.5 155.5 ± 1
T12 10 max ←
T13 18 max ←
T14 20.5 ± 0.5 ←
T15 10 max ←
T16 3 ± 0.5 ←
T17 3 ± 0.5 ←
T18 70 ± 10 ←
T19 30 ± 5 ←
T20 30 ± 5 ←
T21 30 ± 5 ←
T22 30 ± 10 ←
T23 30 ± 5 ←
T24 40 ± 1 ←
T25 30° ←
T26 45° min ←
T27 45° ←
T28 45° ←
T29 130 ± 1 ←
T30 145 ± 1 ←
5.4 Box Bottom
5.4.1 Outer Dimensions of Box Bottom — Outer dimensions of a box bottom are shown in Figure 9 and Table 3.
SEMI M29-1296 © SEMI 1996, 2003 7
Figure 9
Outer Dimensions of Box Bottom
5.4.2 Supporting Rib and Poka-yoke Rib — Positions of a supporting rib for supporting a shipping cassette inside a
box bottom and a poka-yoke rib provided for avoiding setting the cassette in a wrong orientation are shown in
Figure 10 and Table 3.
Figure 10
Supporting Rib and Poka-yoke Rib
5.4.3 Gasket Area — It is required to provide a gasket in an area shown in Figure 6 and Table 2 if the gasket is
provided.
SEMI M29-1296 © SEMI 1996, 2003 8
Figure 11
Gasket Area
5.4.4 Clamping Indent — Figure 12 and Table 3 show dimensions of a concave part for receiving a clamp.
5.4.4.1 Refer to Figure 13 and Table 3 for horizontal positions.
Figure 12
Clamping Indent
5.4.5 Bottom Rib and Orientation Mark — The position of a bottom rib and the position of an orientation mark are
shown in Figure 13 and Table 3. In addition, since this rib makes a pair with a top rib, this avoids slipping of stacked
shipping boxes, and becomes a datum for positioning the box bottom to equipment.