semi合集-English.pdf - 第2073页
SEMI E54.10-0600 © SEMI 2 000 18 8.8.3.1.4 Th e value attribu tes for all Sen s o r-AI -Counter objects, sh all be held at zero un less the device laser is on and s table (i.e., Laser Status attribute of De vice Manager …
SEMI E54.10-0600 © SEMI 200017
8.8.1.2 Data Type — The attribute that defines the format of the data associated with the “Value” attribute.
8.8.1.3 Data Units — The attribute which specifies the units for the “Value” attribute. This attribute is an
enumerated UINT that can take on one of the following values: raw counts, count per second, counts per milliliter,
and counts per gallon. (See Appendix 1 of SEMI E54.1.)
8.8.1.4 Reading Valid — An attribute which specifies whether the “Value” attribute contains a valid value. This
attribute is an enumerated byte that can take on one of the following values:
0 = Invalid, or
1 = Valid.
8.8.1.5 Full Scale — An attribute which specifies the maximum value allowed for the “Value” attribute.
8.8.1.6 Alarm Settling Time — An attribute which specifies the maximum time in milliseconds that the “Value”
attribute may take to stabilize before an alarm is generated.
8.8.1.7 Warning Settling Time — An attribute which specifies the maximum time in milliseconds that the “Value”
attribute may take to stabilize before a warning is generated.
8.8.1.8 Upper Size — An attribute which specifies the upper bound of the particle size, in microns, included in the
bin counts.
8.8.1.9 Lower Size — An attribute which specifies the lower bound of particle size, in microns, included in the bin
counts.
8.8.1.10 Initial and Default Values
Table 20 Sensor-AI and Sensor-AI-Counter Object Attributes Initial and Default Values
Attribute Initial Value Default Value Comment
Value 0 0
Data Type LVV UDINT
Data Units LVV 0 Raw counts
Reading Valid 0 0 Invalid
Full Scale LVV 0XFFFFFFFF
Alarm Settling Time LVV 1000 Milliseconds
Warning Settling Time LVV 1000 Milliseconds
Upper Size LVV Manufacturer Specified Manufacturer Specific
Lower Size LVV Manufacturer Specified Manufacturer Specific
8.8.2 Sensor-AI-Counter Object Services — The services provided by the Sensor-AI-Counter object are defined in
SEMI E54.1 [1]. There are no additional services required for the Sensor AI-Counter object.
8.8.3 Sensor-AI-Counter Object Behavior — The behavior exhibited by the Sensor-AI-Counter object is inherited
from the Sensor-AI object defined in SEMI E54.1. Additional specific behavior associated with the Sensor-AI-
Counter object is defined below.
8.8.3.1 Sensor-AI-Counter OPERATING Application Process
8.8.3.1.1 A reading is retrieved from the physical median noise sensor. This reading is filtered through an analysis
of a manufacturer specified number of samples. The value attribute is set to this processed reading. This process is
called “counting” and is executed only when the Device Manager Object is in the EXECUTING state as defined in
the Common Device Model.
8.8.3.1.2 Whenever an Interlock alarm, Sensor Not Detected alarm, Leak Detected alarm, and Sensor Type Change
alarm is active the ISPM device shall stop “counting” until the alarm clears (see Section 8.2).
8.8.3.1.3 The ISPM is a device that measures and counts particles. As part of counting, particles are classified by
size and count and accumulated in bins over time intervals then reported. The number of bins varies by vendor and
device model.
SEMI E54.10-0600 © SEMI 2000 18
8.8.3.1.4 The value attributes for all Sensor-AI-Counter objects, shall be held at zero unless the device laser is on
and stable (i.e., Laser Status attribute of Device Manager Object has a value indicating “LASER ON AND
STABLE”). The value attribute of any Sensor-AI-Counter object may be cleared (to zero) in a counter sensor after
being read; the conditions under which this clearing behavior occurs may be further specified in the associated
Network Communication Standard or by the manufacturer. The value shall also be cleared (to zero) by a valid
“Clear Counts” service from the SAC object or the “Reset” service issued to the Sensor AI Class Object.
8.8.3.1.5 When attempting to set the “Upper Size” attribute to a value above the capability of the sensor, or to a
value equal to or below the current “Lower Size” attribute value, an error response shall be generated indicating an
invalid operation has been attempted. Similarly, an attempt to set the “Lower Size” attribute to a value below the
capability of the sensor, or to a value equal to or above the current “Upper Size” attribute value, an error response
shall be generated indicating an invalid operation has been attempted.
8.9 Assembly-ISPM Objects — Assembly-ISPM objects inherit attributes, services, and behavior from the
Assembly object. The Assembly object is the device component which provides a mechanism of grouping more than
one attribute from one or more objects into a single data structure for communication over the network.
8.9.1 Table 21 identifies the Assembly-ISPM objects defined for the ISPM device.
Table 21 Assembly List
Object Access
Network
Required Form
Assembly-ISPM#1 R Yes
Status and Counters (Counters ≤ 1024); Default Assembly
Assembly-ISPM#2 R No
Status, Count and Counters (Counters ≤ 1024)
Assembly-ISPM#3 R No
Status Diagnostics, and Counters (Counters ≤ 1024)
Assembly-ISPM#4 R No
Status, Tool State, Time Stamp, Duration, and Counters (Counters ≤ 1024)
Assembly-ISPM#5 R No Status, Tool State, Time Stamp, Duration, Diagnostics, and Counters
(Counters ≤ 1024)
Assembly-ISPM#6 R Yes Status
Assembly-ISPM#7 R No Exception Detail Alarm
Assembly-ISPM#8 R No Exception Detail Warning
Assembly-ISPM#9 R No Exception Detail Alarm and Exception Detail Warning
Assembly-ISPM#40 RW No Device Configuration
8.9.2 Assembly-ISPM Objects Attributes — Table 22 provides a list of attributes common to all Assembly-ISPM
object types.
Table 22 Assembly-ISPM Object Attributes
Attribute Name Attribute Identifier Access Network Required Form
Data (See NOTE 1.) A1 RW Yes Structure as defined below
NOTE 1: Inherited from the Assembly object as shown in Figure 1.
8.9.2.1 Data Attribute Format for Assembly-ISPM Objects — The Data attribute of all Assembly-ISPM objects is a
structured attribute containing an ordered list of attributes within its structure. In the following tables (23 through
31), the structure of the Data attribute for each of the Assembly-ISPM object types is defined.
SEMI E54.10-0600 © SEMI 200019
Table 23 Assembly-ISPM #1 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
3 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter #3 to Sensor-AI-Counter-ISPM #N-1
Value
N≤1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 24 Assembly-ISPM #2 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 ISPMD2 SacA65 SAC
Number of Bins
3 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
4 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
N≤1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 25 Assembly-ISPM #3 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 ISPMD3 SaiA16 Sensor-AI-LCS
Value (Laser Current Diagnostic)
3 ISPMD4 SaiA16 Sensor-AI-SLS
Value (Stray Light Diagnostic)
4 ISPMD5 SaiA16 Sensor-AI-MNS
Value (Median Noise Diagnostic)
5 – – Reserved (2 bytes)
6 ISPMD2 SacA65 SAC
Number of Bins
7 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
8 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value