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SEMI E54.15-0305 © SEMI 2005 22 9.3.9 Assembly-ISPM#3 –– The presentation of the Assembly #3 In-Situ Particle Monitor (Assembly-ISPM#3) object instance attributes and serv ices are as indicated in Table 35. Table 35 A ss…

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9.3.6 Sensor-AI-Counter –– The presentation of the Sensor Analog Input Counter (Sensor-AI-Counter) object
instance attributes and services are as indicated in Table 32.
Table 32 Sensor-AI-Counter Object Instance Attributes and
Services
Sensor-AI-Counter
Class ID = 140, Instance ID = 01 through 1024
Attributes
ID Attribute Name SDM Tag
128 Reading Valid CounterA1
129 Full Scale CounterA2
130 Alarm Settling Time CounterA3
131 Warning Settling Time CounterA4
132 Upper Size CounterA5
133 Lower Size CounterA6
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.7 Assembly-ISPM#1 –– The presentation of the Assembly #1 In-Situ Particle Monitor (Assembly-ISPM#1)
object instance attributes and services are as indicated in Table 33.
Table 33 Assembly-ISPM#1 Object Instance Attributes and
Services
Assembly-ISPM#1
Class ID = 141, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.8 Assembly-ISPM#2 –– The presentation of the Assembly #2 In-Situ Particle Monitor (Assembly-ISPM#2)
object instance attributes and services are as indicated in Table 34.
Table 34 Assembly-ISPM#2 Object Instance Attributes and
Services
Assembly-ISPM#2
Class ID = 142, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
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9.3.9 Assembly-ISPM#3 –– The presentation of the Assembly #3 In-Situ Particle Monitor (Assembly-ISPM#3)
object instance attributes and services are as indicated in Table 35.
Table 35 Assembly-ISPM#3 Object Instance Attributes and
Services
Assembly-ISPM#3
Class ID = 143, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.10 Assembly-ISPM#4 –– The presentation of the Assembly #4 In-Situ Particle Monitor (Assembly-ISPM#4)
object instance attributes and services are as indicated in Table 36.
Table 36 Assembly-ISPM#4 Object Instance Attributes and
Services
Assembly-ISPM#4
Class ID = 144, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.11 Assembly-ISPM#5 –– The presentation of the Assembly #5 In-Situ Particle Monitor (Assembly-ISPM#5)
object instance attributes and services are as indicated in Table 37.
Table 37 Assembly-ISPM#5 Object Instance Attributes and
Services
Assembly-ISPM#5
Class ID = 145, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
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9.3.12 Assembly-ISPM#6 –– The presentation of the Assembly #6 In-Situ Particle Monitor (Assembly-ISPM#6)
object instance attributes and services are as indicated in Table 38.
Table 38 Assembly-ISPM#6 Object Instance Attributes and
Services
Assembly-ISPM#6
Class ID = 146, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.13 Assembly-ISPM#7 –– The presentation of the Assembly #7 In-Situ Particle Monitor (Assembly-ISPM#7)
object instance attributes and services are as indicated in Table 39.
Table 39 Assembly-ISPM#7 Object Instance Attributes and
Services
Assembly-ISPM#7
Class ID = 147, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.14 Assembly-ISPM#8 –– The presentation of the Assembly #8 In-Situ Particle Monitor (Assembly-ISPM#8)
object instance attributes and services are as indicated in Table 40.
Table 40 Assembly-ISPM#8 Object Instance Attributes and
Services
Assembly-ISPM#8
Class ID = 148, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --