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SEMI C3.22-1000 © SEMI 1983, 2004 5 Buret Diagram A

SEMI C3.22-1000 © SEMI 1983, 2004 4

4.5.6 Standardization

4.5.6.1 The method of analysis stated above can be

used as a primary standard, meaning cylinders analyzed

by this method can be used as standards of

measurement on electronic analyzers used to measure

oxygen.

4.5.6.2 This method is specific to oxygen when carbon

dioxide is not present in the sample gas. When carbon

dioxide is one of the components of the sample gas, the

carbon dioxide must first be scrubbed from the sample.

4.6 Notes

Note 1: The 0–1 range can be used provided that zero

and span gas standards in oxygen with known levels of

hydrocarbons between 0–1 ppm are used in the

calibration of the analyzer.

Note 2: As the flow rate and heat capacity of the matrix

gas affect the instrument output, the zero and span gas

matrices must coincide with that of the sample gas.

Note 3: The effective response of a flame ionization

detector-equipped total hydrocarbon analyzer to

different hydrocarbons can vary and must be

approximated. However, the response of the most

common hydrocarbon impurities in oxygen can be

accurately totaled and compared to methane.

Note 4: The sampling system and hygrometer must be

designed to operate under the sample pressure, or the

sample pressure must be reduced (by a regulator with

diaphragm of stainless steel or other suitable material)

to accommodate the pressure restrictions of the

analytical hygrometer.

Note 5: The National Institute of Standards and

Technology (NIST) provides calibration services for the

thermometers used in dewpoint/frostpoint hygrometers.

Note 6: This method is not applicable if other

constituents in the gas will condense before water

vapor, e.g., carbon dioxide and/or oil contamination.

Note 7: This procedure will be required only

immediately after changing the test solution or

contaminating the apparatus with air.

SEMI C3.22-1000 © SEMI 1983, 2004 5

Buret

Diagram A

Diagram B

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