semi合集-English.pdf - 第5476页

SEMI P1-1101 © SE MI 1981, 2001 8 a: Green Soda Lime (HTE) W hite Crown Soda Lime (HTE) b: Borosilicate (MTE) c: Aluminosilicate (LTE) d: Quartz ( ULTE) e: Qu artz (DFS) f: Qua rtz (MF S) Figure 7 Glass S ubstrate Identi…

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SEMI P1-1101 © SEMI 1981, 20017
DEFECTS OUTSIDE THE QUALITY AREA
Edge Chips Defect Limit Total Number
Radial Depth
≥ 0.76 mm
None Note
Peripheral Cord
≥ 0.76 mm
None
Other Shall be negotiated between vendor and supplier Shall be negotiated between vendor and supplier
NOTE l: The size of internal defects shall be determined by 1/2 (long axis + short axis).
NOTE 2: This table is based on the assumption that defects < 3 µm will fail outside the focal depth of the lens systems and should not print.
NOTE 3: None of any size permitted that break the surface.
D = L – 25.4/2 D = L – 25.4/2
Figure 5
Circular Quality Area
Figure 6
Square Quality Area
SEMI P1-1101 © SEMI 1981, 2001 8
a: Green Soda Lime (HTE)
White Crown Soda Lime (HTE)
b: Borosilicate (MTE)
c: Aluminosilicate (LTE)
d: Quartz (ULTE)
e: Quartz (DFS) f: Quartz (MFS)
Figure 7
Glass Substrate Identification by Notches
SEMI P1-1101 © SEMI 1981, 20019
Square Corner Round Corner
Figure 8a
Dimensions of Notches for HTE, MTE, LTE, ULTE, DFS
5.0 ± 0.5 mm
2.0 ±
0.5 mm
Back side
> 1.0 mm
Edge
Figure 8b
Dimension of Notches for MFS