semi合集-English.pdf - 第5572页
SEMI P10-0705 © SEMI 1990, 2005 67 <xs:sequence minOccurs="0"> <xs:element name="PatternPlotApprReqd" type="xs:boolean"/> </xs:sequence> <xs:sequence minOccurs="0&q…
SEMI P10-0705 © SEMI 1990, 2005 66
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndPlacement"/>
</xs:complexType>
<xs:complexType name="PatternOptionsType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternFunction" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataFileSize" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataChecksum" type="xs:integer"/>
<xs:element name="DataChecksumType"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternAddressSize"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ScaleFactor" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DigitizedDataDark"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="StripeHeight" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="UnscaledPatternSize"
type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MfgBiasPreapplied"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="LithoModeReqd" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="VirtualAddress" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurroundingTone" type="xs:string"/>
<xs:element name="SurroundingWidth"
type="xs:double"/>
<xs:element name="SurroundingHeight"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MirrorPattern" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipPlot" type="ShipPlotType"/>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 67
<xs:sequence minOccurs="0">
<xs:element name="PatternPlotApprReqd"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Films" type="FilmsType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PhaseShift" type="PhaseShiftType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Registration"
type="RegistrationType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdGroup" type="CdGroupType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdSet" type="CdSetType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdXyDefinition"
type="CdXyDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdIsoDenseDefinition"
type="CdIsoDenseDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PercentClear" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="InspectAllSites"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DefectDefinition"
type="DefectDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ButtingError" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="AdditionalPatternInfo"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartPatternOptions"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndPatternOptions"/>
</xs:complexType>
<xs:complexType name="ShippableDataType">
<xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 68
<xs:element name="SendMaskShippedDateTime"
type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SendFinalAuditDateTime"
type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipCdData" type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipCdPrintout" type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipCdUniformityMap"
type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipAimData" type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipDefectData" type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipThruPellicleData"
type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipManualInspectionForm"
type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>