semi合集-English.pdf - 第2602页

SEMI E91-0600 © SEMI 1999 , 2000 7 5.2.5 T he Process M odel Condition T a b le 5.2.5.1 Un d ermentioned T able 2 is an e xp lanation o f the transition condition of transitio n No. 10 in PSEM Processin g State Model dia…

100%1 / 7923
SEMI E91-0600 © SEMI 1999, 2000 6
No. Current State Trigger New State Action Comment
11 EXECUTING Processing of the last
wafer of a current lot
completed.
The prober has received
START command for
next lot.
SETTING UP None None
12 STOPPING The prober completes
clearing of data and no
alarm remains.
IDLE None None
13 PAUSING The prober stopped the
processing of the current
wafer which was in
EXECUTING state at a
possible stop breakpoint
and attained a safe state.
PAUSED The prober is waiting for
command (RESUME,
STOP or ABORT).
None
14 ALARM
PAUSED
Alarm is cleared. PAUSED The prober is waiting for
command (RESUME,
STOP or ABORT).
None
15 PROCESS
PAUSE
An alarm occurs in the
prober.
ALARM
PAUSED
The prober is waiting for
all alarms to be cleared,
STOP or ABORT
command.
None
16 PAUSED RESUME command was
received.
CHECKING Verification of process
program parameters.
Before continuing
processing, the host or
operator is required to
issue RESUME command.
17 PAUSED The operator instructed a
state transition.
PAUSED
SETTING UP
Probe card replacement
or inker replacement is
carried out by operator’s
instruction.
None
18 PAUSED
SETTING UP
The operator instructed a
state transition.
PAUSED None None
19 PAUSE The prober received
STOP command.
STOPPING The prober starts clearing
data.
Data is saved and valid.
20 PAUSE The prober received
ABORT command.
ABORTING If possible, unsafe
condition is reset.
Wafer data or lot data may
be invalid or not available.
21 STOPPING The prober received
ABORT command.
ABORTING If possible, unsafe
condition is reset.
Wafer data or lot data may
be invalid or not available.
22 ABORTING An abort performance has
completed.
IDLE None Only a state transition to
IDLE is permitted.
23 IDLE An alarm occurs. IDLE with
ALARMS
The prober is waiting for
all alarms to be cleared.
None
24 IDLE with
ALARMS
All alarms were cleared. IDLE None The IDLE state is free of
alarms.
25 IDLE The operator instructed a
state transition.
MAINTEN-
ANCE
None Maintenance and
inspection of the prober
modules and creation,
change and deletion of
process programs are
possible.
26 MAINTEN-
ANCE
The operator instructed a
state transition.
IDLE None None
SEMI E91-0600 © SEMI 1999, 20007
5.2.5 The Process Model Condition Table
5.2.5.1 Undermentioned Table 2 is an explanation of the transition condition of transition No. 10 in PSEM
Processing State Model diagram.
Table 2 The Process Model Condition Table
Conditions Next State
The check approves that the process program is changed. SETTING UP
The check approves that the process program is not changed.
The previous state was SETTING UP. SETTING UP
The previous state was EXECUTING. EXECUTING
5.3 Prober Job State Model
5.3.1 Purpose
5.3.1.1 The Prober Job state model is defined for the purpose of keeping track of its processing state of the material
to be processed by the prober in every material. The host can give instructions on how to process which material by
creating Prober Job to the equipment. Prober Job is created by the JOB CREATE command. Prober Job state exists
in each Prober Job. It occurs upon creation of Prober Job and is deleted upon its completion. The host can control
progress of material processing which is requested to the equipment according to an event report accompanied by
progress of Prober Job.
5.3.2 Prober Job State Model Diagram
JOB CREATED
JOB
STOPPING
JOB SET UP
JOB ACTIVE
JOB PROCESSING
4
Enter Processing
3 JOB Started
JOB
ABORTING
2
JOB
Canceled
8
Start Aborting
End
Aborting
6
Start
Stopping
9
7
End
Stopping
1
JOB Created
5 End Processing
Figure 3
Prober Job State Model Diagram
5.3.3 Description of Prober Job State
5.3.3.1 JOB CREATED — State where Prober Job is created to the equipment Prober Job has not processed yet. It
has nothing to do with whether material reached the equipment or not.
5.3.3.2 JOB ACTIVE — State where normal Prober Job processing operation is performed It consists of two sub-
states.
5.3.3.3 JOB SET UP (JOB ACTIVE Sub-state) — State that waits for condition to be ready for processing such as
Equipment preparation.
5.3.3.4 JOB PROCESSING (JOB ACTIVE Sub-state) — State where this processing is performed.
SEMI E91-0600 © SEMI 1999, 2000 8
5.3.3.5 JOB STOPPING — State where attempts are made to stop Prober Job.
5.3.3.6 JOB ABORTING — State where attempts are made to abort Prober Job.
5.3.4 Prober Job State Transition Table
Table 3 Prober Job State Transition Table
No. Current State Trigger New State Action Comments
1 Undefined JOB_CREATE command
was received from host or
the Job Create operation
was instructed by operator
when Processing State is
neither INIT nor
MAINTENANCE state.
JOB
CREATED
Create Prober Job. None.
2JOB
CREATED
JOB_CANCEL command
from host or operator.
Undefined Cancel Prober Job. None.
3JOB
CREATED
START command from
host or the Start operation
was instructed by operator.
JOB SET UP Prepare for
processing of
Prober Job and
wait for processing
to be possible.
None.
4 JOB SET UP Prober Job processing
conditions were established.
JOB
PROCESSING
Start processing of
the main unit.
None.
5JOB
PROCESSING
Processing of Prober Job
was normally completed.
Undefined Delete Prober Job. None.
6 JOB ACTIVE STOP command was
received from host or the
stop operation was
instructed by operator.
JOB
STOPPING
Start stop
processing.
A trigger may be caused by
error detection of the
equipment itself as well as by
instruction from outside.
7JOB
STOPPING
The stop operation was
completed.
Undefined Delete Prober Job. None.
8 JOB ACTIVE ABORT command was
received from host of the
Abort operation was
instructed by operator.
JOB
ABORTING
Start abort
processing.
A trigger may be caused by
error detection of the
equipment itself as well as by
instruction from outside.
9JOB
ABORTING
Abort processing was
completed.
Undefined Delete Prober Job. None.
6 Collection Event List
6.1 Requirements
6.1.1 All GEM-required Events are required by the PSEM. Since Processing State Model is required by the PSEM,
all state transitions are required Events.
6.1.2 All GEM-required Events asso ciated with the GEM Control, Communications, Alarm, and Spooling State
Models are required. This section of the PSEM lists only those collection events that are not associated with a
change of state or those requiring specific data variables (DVVALs) or Reports defined in the PSEM.
6.2 Collection Event Tables
6.2.1 Table 4 shows events and reports required for the PSEM process state transition. Table 5 shows events and
reports required for the Prober Job state transition. Table 6 shows other collection events.