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SEMI E87-0705 © SEMI 1999, 2005 38 Table 32 CarrierTagWriteData Service Parameter Definitions Parameter Name Req/Ind Rsp/Conf Description LocationID C — The ID for the location of the carrier. Either LocationID or Ca rri…

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SEMI E87-0705 © SEMI 1999, 2005 37
Table 29 CarrierRelease Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The ID for the location of the carrier. Either PortID or CarrierID must be
used. For internal buffer equipment when the service is used at an internal
location, only the carrierID is required.
CarrierID C — The CarrierID of the carrier. Either LocationID or CarrierID must be used.
CMStatus — M Information concerning the result of the service.
16.4.14 CarrierReCreate
16.4.14.1 CarrierReCreate request is used to re-create the carrier object specified by the service. This will allow a
repeated introduction of the same carrier on the loadport. After the service is issued, the equipment shall treat the
carrier occupying the respective loadport identically to one that was physically removed and replaced, deleting the
original carrier and then re-instantiating it. If no PropertiesList is provided with the service, then the host
verification scenarios for re-instantiating the carrier object shall be followed. For example, the carrier ID would be
re-read (at which point Carrier State transition #3, (no state) to Waiting for Host occurs) and subsequently verified
by host, followed by slot map re-read and verification by host. Alternatively, if PropertiesList is provided with this
service, then the equipment shall follow the equipment based verification steps. For example, the carrier object is re-
instantiated with the CarrierID (and possibly content/slot map) information provided within the CarrierReCreate
Service. In this equipment based verification scenario, the equipment is responsible for verifying the contents of the
carrier against the received information. If the equipment supports other SEMI standards (i.e.- SEMI E40/E90/E94),
then from the perspective of those standards, when CarrierReCreate service is received, the scenario would resemble
that of a carrier being removed and a new carrier placed. The service shall be accepted only if the load port is in the
“Ready to Unload” state.
Table 30 CarrierReCreate Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CarrierID M — Carrier ID for the carrier object the service is to be performed upon
PropertiesList C — If sent by the host, then equipment based verification scenario. If not, then
host based verification scenario.
CMStatus — M Information concerning the result of the service
16.4.15 CarrierTagReadData
16.4.15.1 CarrierTagReadData is used to request a block of data from the carrier ID tag. Equipment shall deny the
request if LocationID and CarrierID are mismatched.
Table 31 CarrierTagReadData Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
LocationID C — The ID for the location of the carrier. Either LocationID or CarrierID must
be used.
CarrierID C — The CarrierID of the carrier. Either LocationID or CarrierID must be used.
DataSeg C — Indicates a specific section of data.
DataSize C — Indicates the number of bytes to read.
Data — C Data from the carrier ID tag. May be NULL if no data exists for the given
section.
CMStatus — M Information concerning the result of the service.
16.4.16 CarrierTagWriteData
16.4.16.1 CarrierTagWriteData is used to request that a block of data be written to the carrier ID tag. Equipment
shall deny the request if LocationID and CarrierID are mismatched.
SEMI E87-0705 © SEMI 1999, 2005 38
Table 32 CarrierTagWriteData Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
LocationID C — The ID for the location of the carrier. Either LocationID or CarrierID must
be used.
CarrierID C — The CarrierID of the carrier. Either LocationID or CarrierID must be used.
DataSeg C — Indicates a specific section of data.
DataSize C — Indicates the number of bytes to read.
Data M — Data from the carrier ID tag. May be NULL if no data exists for the given
section.
CMStatus — M Information concerning the result of the service.
16.4.17 ChangeAccess
16.4.17.1 The ChangeAccess message requests a change of access mode for the load ports specified in the PortList.
Table 33 ChangeAccess Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
AccessMode M — The new desired access mode.
PortList M — The list of ports to use the new access mode.
CMStatus — M Information concerning the result of the service.
16.4.18 ChangeServiceStatus
16.4.18.1 The ChangeServiceStatus service is used to request the production equipment change a load port service
state.
Table 34 ChangeServiceStatus Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
ServiceStatus M — The new service state.
CMStatus — M Information concerning the result of the service.
16.4.19 ProceedWithCarrier
16.4.19.1 The ProceedWithCarrier service is sent by the host to indicate that the carrier operations may continue.
When using host based verification it is used by the host to indicate to the production equipment that the verification
of Carrier ID and/or the Carrier Slot Map is correct. For successful production equipment based verification the
production equipment shall not require this message before proceeding with the carrier. For failed production
equipment based verification the production equipment shall require either a CancelCarrier or ProceedWithCarrier
service.
16.4.19.2 Using Table 34, for the Host based CarrierID verification case, the ProceedWithCarrier service sent by
the host after the first carrier ID read is referred to as ProceedWithCarrier #1, the ProceedWithCarrier service sent
after slot map read is referred to as ProceedWithCarrier #2.
Table 35 ProceedWithCarrier Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which processing may proceed.
CarrierID M — The CarrierID for which processing may proceed.
PropertiesList C — A list of name value pairs providing attributes for the carrier object.
CMStatus — M Information concerning the result of the service.
SEMI E87-0705 © SEMI 1999, 2005 39
16.4.20 ReserveAtPort
16.4.20.1 The ReserveAtPort service is sent by the host to indicate future activity at the load port. This allows for
reserving the port but doing host based ID verification. The load port will enter the RESERVED State after
receiving this service. The equipment shall move a carrier to a reserved load port.
Table 36 ReserveAtPort Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The Port ID to reserve
CMStatus — M Information concerning the result of the service.
17 Carrier Tag Read/Write
17.1 Some technologies allow data to be stored on a carrier ID tag where it can be subsequently read and/or
modified. In this case, it is the host that specifies when this data is written and read, because the equipment has no
knowledge of the contents of the data. The read operations shall be performed only when the carrier is at the read
position. The write operations shall be performed only when the carrier is at the write position. NOTE: The read
and write positions may be the same position. The host shall be able to both read and write whenever CarrierHold
switch is set to Host Release and the carrier is at the respective read or write position. Once the host has completed
all of its read and write operations for that carrier, then the host sends the CarrierRelease request to the equipment.
In all cases, the CarrierAccessingStatus state shall be set to either CARRIER COMPLETE or CARRIER STOPPED
before the carrier may be undocked. The CarrierRelease service informs the equipment that carrier read or carrier
write is complete. For internal buffer equipment the CarrierRelease service shall allow the equipment to move the
carrier away from the read or write position.
Figure 7The CarrierRelease service has a different purpose from the CarrierOut service. The intent of the CarrierOut service
request is to move the carrier to a loadport, while the intent of the CarrierRelease service request is to inform equipment that it
may move the carrier away from the read or write position. Therefore, CarrierOut may also be used with the CarrierRelease
command. If CarrierHold is Host Release, then the carrier shall be kept at the write position until an CarrierRelease service
request is received, regardless of when a CarrierOut is sent. If CarrierHold is set to Equipment Release, then the CarrierRelease
request has no effect.
18 Additional Events
18.1 This section identifies data collection events that are not related to State transitions for variable data items. The
intent of this section is to ensure certain data is available for specific events that are not related to state transitions,
not to define all the additional collection events for CMS. Also, all state transitions in CMS state models are
required to have associated event reports.
18.2 Buffer Capacity Changed Event
18.2.1 An event shall be generated whenever Buffer Capacity changes. This applies to all internal buffers and
internal buffer partitions.
18.2.2 Data required to be available for this event report:
BufferPartitionInfo.
18.3 Carrier Approaching Complete Event
18.3.1 In some cases, for carrier transfer efficiency, the host needs to know carrier completion timing a little faster
than actual. For example:
If the equipment is internal buffer type, QTAT carriers need to be moved out directly from internal FIMS to a
load port to shorten moving out time.
If the equipment uses non-product carriers, such as dummy, they need to be changed before it becomes not
reusable to prevent stopping the equipment operation.
If the equipment uses non-product carriers, such as test, reject, they need to be changed before it becomes
empty or full to prevent stopping the equipment operation.