semi合集-English.pdf - 第938页

SEMI E119-1104 © SEMI 2002, 2004 10 bilateral dat um plane horizontal datu m plane of box nest or load port x 53  195 (elsew here) x 46 = 71 ± 1 x 44   53 z 49  8 z 48  15 z 47 = 221 ± 1 human handle (optional) z 4…

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SEMI E119-1104 © SEMI 2002, 2004 9
5.9 Human Handles — All handles for use by humans
must either be contained within the maximum outer
dimensions of the FOBIT, be detached when not in use,
or be retractable into the maximum outer dimensions
when not in use. Although such handles may extend
past x53, they must still be contained within the upper
limits of x50, y40, and r67. Handles for use by humans
(if present) must follow SEMI S8, and they must
require the use of both hands (each using a full wrap-
around grip, given the minimum clearance requirement
in SEMI E15.1). Automation handling features shall not
be considered dual purpose unless they are designed to
meet SEMI S8 guidelines.
5.10 Automation Handling Features — On the top of
the FOBIT, there is an optional robotic handling flange
for manipulating the FOBIT as illustrated in Figure
9n the bottom of the FOBIT, there are optional rails
for use with roller conveyors or forklifts as shown in
Figures 6, 7 and 10. Although they are only required to
extend y58 behind the facial datum plane on both the
left and right sides, it is recommended that they be as
long as possible. Beyond y58, only the lower bound on
z43 applies. These optional conveyor rails (defined by
x56, x57, y58, and z43) are located on the left and right
bottom edges of the front-opening box and also have
vertical cylindrical pin holes for forklift centering
(defined by d65).
y51

140
facial
datum plane
horizontal datum of
box nest or load
port plane
y53

190
y50

130
y46
= 71 ± 1
y44
53
z49

8
z48

15
z47
= 221
± 1
y40
116
human
handle
(optional)
front side
of the
FOBIT
where
wafers
are
accessed
y
58 75
z41

0
d65 = 10 ± 0.5
z65

7
z43 = 2±1
y52 = 165.5 ± 0.5
(at seal zones, etc.)

166 (elsewhere)
Figure 6
Side View of FOBIT
SEMI E119-1104 © SEMI 2002, 2004 10
bilateral datum plane
horizontal datum plane of
box nest or load port
x
53

195 (elsewhere)
x
46
= 71 ± 1
x
44
53
z
49
8
z
48
15
z
47
= 221
± 1
human
handle
(optional)
z
41

0
z
43 = 2 ± 1
bottom rail
x
57

180
d65
= 10 ± 0.5
z
65 7
x
65 = 187.5
x
56 = 194.75
0.25
(
at bottom rail
)
x
50

215 (at human handle)
Figure 7
Rear View of FOBIT
Top robotic
flange detail
in Figure 9
human
handle
(optional)
y53
190
y52 = 165.5 ± 0.5
(at seal zones,
etc.)
166
(elsewhere)
bilateral
datum plane
front side of the FOBIT where wafers are accessed
y50

130
x
50
215 (at human handle)
x
53

195 (elsewhere)
r
67

240
facial
datum
plane
y 40

116
y67
= 25
y51

140
Figure 8
Top View of FOBIT
SEMI E119-1104 © SEMI 2002, 2004 11
x
42 = 50 ± 1
x
41 = 30 ± 1
y
45
= 65.3 ± 1
y
47
58
x
44
53
facial
datum
plane
bilateral
datum
plane
front side of
the FOBIT
where wafers
are accessed
y
41 = 30 ± 1
y
46
= 71 ± 1
x
43 = 50 ± 1
x
47

58
(16x)
= 45
± 0.5°
position
notch
orientation
notch
x
46 = 71 ± 1
x
45 =
65.3 ± 1
y
44

53
d63
= 35 ± 0.1
y
68

55
x
69 = 7.6 ± 0.1
= 60°
r63
66
top of
FOBIT
bilateral
datum plane
horizontal
datum plane
z
47
= 221 ± 1
position notch
d63
= 35 ± 0.1
cross-section
above:
x
69 = 7.6 ± 0.1
= 45 ± 1°
= 52 ± 1°
x
45 = 65.3 ± 1
x
46 = 71 ± 1
z
49

8
z48

15
z
50

5
r
59
6
Figure 9
Top Robotic Handling Flange
5.11 Retaining Features — Figures 10 and 11 show
two features on the bottom of the FOBIT that may be
used for retaining the FOBIT onto the kinematic
couplings. This may be needed to prevent the FOBIT
from being knocked off the kinematic couplings by the
action of pushing the FOBIT against the front-opening
interface. The front retaining feature contains a ramp
that a wheel might roll up while the FOBIT is being
pushed toward the front-opening interface. The arm
with the wheel (not specified here) then holds the
FOBIT down on the kinematic couplings. The center-
retaining feature consists of an oblong slot with a
chamber above it. The FOBIT can be clamped onto the
kinematic couplings by inserting an oblong head on a
shaft (not specified here) through the slot and rotating it
90° in either direction. Either retaining feature would
only engage after the FOBIT is fully seated on the
kinematic coupling pins. Either retaining feature must