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SEMI E134-0305 © SEMI 2004, 2005 1 SEMI E134-0305 SPECIFICATION FOR DATA COLLECTION MANAGEMENT This specification was technically approved by the Globa l Information & Control Committee and is the direct responsibili…

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SEMI E133-0705 © SEMI 2004, 2005 28
11.4.12 Comment — This field contains any additional information that the PCS analysis engine provider may wish
to provide. Note that if the “Supported” field is listed as “Conditional” or “Optional”, the conditionality or
optionality conditions must be delineated in this field.
11.5 PCS Analysis Engine Compliance Verification Procedure
11.5.1 The following procedure should be applied to all PCS Analysis Engines:
11.5.2 Compliance: Functional Group Capabilities Data Sheet Verification Test:
Is a properly formatted SoC data sheet supplied with product?
Pass Criteria:
A properly formatted SoC data sheet, as specified in ¶11.3 is provided with product.
The Product + Version fields uniquely identify product.
At least one functional group is claimed, i.e., the engine declares to belong to at least one functional group as
specified in this standard.
All functional group capabilities for each functional group claimed in the “Functional Group” field are listed as
defined in §9, and the requirement field matches that provided for each capability in §9.
For each capability listed as required, it must also be supported (i.e., if Requirement == ‘Y’, then Supported
==’Y’).
For each capability listed as conditional, the conditions, defined in §9, must be met.
For each capability listed as optional (i.e., not required), a declaration of whether the requirement is supported
must be made (i.e., the “Supported” field for this requirement must be filled in).
11.6 Condition of Compliance
11.6.1 A PCS Analysis Engine can be considered to be compliant with this standard if and only if it passes all of the
compliance tests for the Analysis Engine in ¶11.5.
NOTICE: SEMI makes no warranties or representations as to the suitability of the guidelines set forth herein for
any particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this guideline, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights,
and the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E134-0305 © SEMI 2004, 2005 1
SEMI E134-0305
SPECIFICATION FOR DATA COLLECTION MANAGEMENT
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on July 11, 2004 and August 16, 2004. Initially available at
www.semi.org September 2004; to be published November 2004. Originally published July 2004.
E
This standard was editorially modified in November 2004 to correct editorial errors in Figures 21 and 22.
NOTICE: The designation of SEMI E134 was updated during the 0305 publishing cycle to reflect the creation of
SEMI E134.1.
1 Purpose .......................................................................................................................................................................2
2 Scope ..........................................................................................................................................................................2
2.1 In-scope ...............................................................................................................................................................2
2.2 Out-of-scope ........................................................................................................................................................2
3 Limitations..................................................................................................................................................................2
3.1 Abstract Model ....................................................................................................................................................2
4 Referenced Standards .................................................................................................................................................3
4.1 Non-SEMI Standards...........................................................................................................................................3
4.2 SEMI Standards...................................................................................................................................................3
5 Terminology ...............................................................................................................................................................3
5.1 Abbreviations and Acronyms...............................................................................................................................3
5.2 Definitions ...........................................................................................................................................................3
6 Conventions................................................................................................................................................................4
6.1 Terms...................................................................................................................................................................4
6.2 Notation ...............................................................................................................................................................4
7 Background.................................................................................................................................................................6
7.1 Equipment Data Collection .................................................................................................................................6
8 Overview ....................................................................................................................................................................8
8.1 Data Collection Concepts....................................................................................................................................8
8.2 Trace Data...........................................................................................................................................................8
8.3 Events ..................................................................................................................................................................8
8.4 Exceptions............................................................................................................................................................9
8.5 Data Collection Plans..........................................................................................................................................9
8.6 Equipment Operational Performance Monitoring...............................................................................................9
8.7 Ad-hoc Data Requests..........................................................................................................................................9
9 Data Collection Plan Management ...........................................................................................................................10
9.1 DataCollectionManager Interface.....................................................................................................................10
10 DCP Privilege Model..............................................................................................................................................27
10.1 Privileges.........................................................................................................................................................27
11 Data Collection Plan Definition..............................................................................................................................29
11.1 DataCollectionPlan .........................................................................................................................................29
12 Data Collection Plan State Models .........................................................................................................................35
12.1 DataCollectionPlan State Model.....................................................................................................................35
12.2 DataCollectionPlan-Active State Model..........................................................................................................38
12.3 Trace Request State Model ..............................................................................................................................41
13 Operational Performance Monitoring.....................................................................................................................44
13.1 Operational Performance Conditions State Model .........................................................................................44
14 Data Collection Report Formats .............................................................................................................................45
14.1 Data Collection Reports ..................................................................................................................................45
14.2 Parameter Values ............................................................................................................................................50
14.3 Primitive Parameter Values.............................................................................................................................51
14.4 Structured and Enumerated Parameter Values ...............................................................................................53
14.5 Time Format ....................................................................................................................................................55
15 DCP Consumer Interface........................................................................................................................................56
SEMI E134-0305 © SEMI 2004, 2005 2
15.2 DCPConsumer.................................................................................................................................................56
16 Requirements for Compliance ................................................................................................................................60
1 Purpose
1.1 This specification describes a method for data acquisition consumers to request process and operational data
from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the
consumer. It includes a mechanism for organizing related data into groups to make it more straightforward for
enabling or disabling a large number of data sources, and to allow consumers to organize related data into groups
according to their purpose.
2 Scope
2.1 In-scope
2.1.1 This specification provides a means to acquire event, exception, and trace data from semiconductor equipment
through the use of a named data collection plan. This specification defines what form a data collection plan takes,
the meaning of its contents, and an interface for managing them that is to be supported by the equipment.
2.1.2 This specification defines the behavior associated with the execution of data collection plans in the form of
finite state machines. The formats for data produced as a result of executing a data collection plan are also defined,
as is the interface that must be supported by consumers of data collection plan output.
2.1.3 This specification defines a way for the equipment to notify consumers when the combination of activities on
the equipment, including data acquisition, are causing the equipment to perform below supplier-defined criteria.
2.1.4 This specification defines a way for consumers to make ad-hoc on-demand requests for data from the
equipment, outside of a data collection plan.
2.2 Out-of-scope
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Abstract Model
3.1.1 This specification does not define a convention for naming or identifying sources, parameters, events, or
exceptions. This document assumes that all such entities can be identified separately and represented as text. Such
conventions shall be fully specified by any implementation mapping of this specification.
3.1.2 This specification does not define the mechanism used for identifying or authenticating consumers or
enforcing privileges. It assumes that consumers can be uniquely identified by a text value, and that the equipment is
capable of enforcing the standard privileges defined in this document. Such mechanisms shall be fully specified by
any implementation mapping of this specification.
3.1.3 This specification does not define the mechanism used for determining how to locate consumers that are to
receive the events defined by this specification. It assumes that the equipment has established a communications
context with any consumers that can submit requests and has provided any context necessary to send events to those
consumers. Such mechanisms shall be fully specified by any implementation mapping of this specification.
3.1.4 This specification does not define any algorithms or heuristics to use for detecting degrading equipment
operational performance. Such techniques are specific to the equipment’s internal hardware and software
architecture and will very likely be unique to each class and/or model of equipment. It assumes that it is possible to
detect such conditions and to identify which systems comprising the equipment are affected.
3.1.5 This specification is an abstract model only. Adjunct specifications must be developed to map this
specification to an implementation technology.