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SEMI E125-0305 © SEMI 2003, 2005 14 Eq u i p m e n t N o d eD escr i p ti o n 1 par am e te r s 0. .* 1. .* ex c ept i ons 0. .* 1. . * ob jT y pes 0. .* Par a m e t e r CE M:: Na m e ab le no de 1 1 SE MI Ob j T y pe E …

SEMI E125-0305 © SEMI 2003, 2005 13

9.2.2.2 RevisionNotice — This class provides the date and time of any metadata revision, and the equipment whose

metadata was changed.

9.2.2.2.1 RevisionNotice Association Definition Table

Table 21 RevisionNotice Association Definition

Association Role Name Definition Comments

equipment The root equipment node that represents the equipment as a

whole.

One and only one element of a type

derived from the SEMI E120 type

EquipmentElement.

newRevision The date and time at which the metadata was revised. Structured data, of type

MetadataRevision

9.2.2.2.2 equipment — Providing the root equipment node with a RevisionNotice should not be interpreted to mean

that the root equipment node’s metadata has changed. It is strictly provided as a means for clients to determine

which equipment has undergone the change.

10 Equipment Metadata

10.1 Management of Equipment Metadata

10.1.1 When equipment configuration changes result in a change to any information described using the classes in

Section 9.1.2.9 of this document or by the SEMI Common Equipment Model, the equipment shall update the

metadata description accordingly at the time of the change. If clients have requested revision notification (see

Sections 9.1.2.9 and 9.1.2.10 ), the equipment shall notify each interested client at the time of the change, or at the

first opportunity when its communication status permits. This includes reconfiguration of the equipment after its

introduction into the factory. Ensuring that all aspects of equipment metadata are kept up-to-date and available to

the factory is a critical aspect of maintaining equipment metadata.

10.2 Equipment Structure

10.2.1 The physical equipment structure shall be described according to the SEMI Common Equipment Model.

Suppliers shall provide a model of those elements of their equipment for which it is necessary and practical to

facilitate (at least) utilization tracking, process control, and technical support objectives.

10.3 Equipment Nodes

10.3.1 Equipment Node Description

10.3.1.1 Figure 8 shows how to describe the parameters, events, objTypes, and exceptions available from an

element (or node) of the equipment hierarchy. Providing this descriptions indicates that the specified node acts as

the source of all Events, Exceptions, ObjTypes, and Parameters that are included in the description. All Parameters,

Exceptions, ObjTypes, and Events associated with a given equipment node are independent of the Events,

Exceptions, ObjTypes, and Parameters associated with other equipment nodes.

SEMI E125-0305 © SEMI 2003, 2005 14

EquipmentNodeDescrip tio n

parameters0..*

1..*

ex cept ions0..*

1..*

objT ypes0..*

Parameter

CEM::Nameable

node 1

SEMIObjType Exception

StateMachin eInstance

s tateMachines 1

0..*

Figure 8

Describing Equipment Nodes

10.3.1.2 EquipmentNodeDescription — This class is used to identify a specific element of the equipment hierarchy,

and to describe the Parameters, Exceptions, ObjTypes, and Events for which this node is the source. This is

achieved through the StateMachineInstance (Section 10.8.6), SEMIObjType (Section 10.8.5 ), Exception (Section

10.7 ), and Parameter (Section 10.4 ) classes. Only one EquipmentNodeDescription shall be provided for a given

equipment node. Equipment elements may be any concrete class derived from Nameable, as defined in the SEMI

E120 specification, Common Equipment Model.

10.3.1.3 EquipmentNodeDescription Association Definition Table

Table 22 EquipmentNodeDescription Association Definition

Association Role Name Definition Comments

stateMachines An unordered list of state machines that are supported by

this equipment node.

List of elements of type

StateMachineInstance, described in

Section 10.8.6. There shall be one map

provided for each event that the node

can generate, including events for which

no Parameters are available.

objTypes An unordered list of the SEMIObjTypes that are

associated with this equipment node.

List of elements of type SEMIObjType,

describe in Section 10.8.5 .

exceptions An unordered list of exceptions that can be reported by

this equipment node.

List of elements of type Exception

described in Section 10.7 .

parameters An unordered list of typed parameters provided by this

equipment node.

List of elements of type Parameter,

described in Section 10.4 . Any

parameters that represent variables from

SEMI standards shall be typed and

named according to Sections 10.5.4 and

10.4.10 . Each parameter name for this

node shall be unique. Parameter names

need not be unique across equipment

nodes.

node The equipment node being described. Element of a type derived from the

SEMI E120 Nameable class.

10.4 Parameters

10.4.1 Parameters can represent any concept that can be described by any of the primitive or composite types

described in Section 10.5 . A parameter can generally be thought of as a named, typed field that has a specific

meaning, utility or other information value. Examples are process control variables, equipment configuration

settings, measurement results, wafer maps, data variables, etc. Parameters can only be defined by an equipment

node (Section 10.3 ), a SEMI ObjType (Section 10.9 ), or an exception (Section 10.7 ).

10.4.2 Figure 9 shows how to describe named, typed parameters with units, constraints, and associations with other

parameters. Type and units information is provided through the ParameterTypeDefinition referred to by the

DefinedType class. ParameterTypeDefinition is described in Section 10.5.1 .

description

AssociatedParameter

name

desc ription

defin itio n

Constraint

name

des cription

Parameter

ass ociatedParamet ers

0..*

cons traints1

0.. *

typeInformation 0..*

ParameterTypeDefini tion

paramet er 0..*

ParameterCl assi fication

classification

Figure 9

Describing Typed Parameters

10.4.3 Suppliers shall provide a model of those Parameters for which it is necessary and practical to facilitate (at

least) utilization tracking, process control, and technical support objectives.

10.4.4 Parameter Attribute Definition Table

Table 23 Parameter Attribute Definition

Attribute Name Definition Required Form

name The name of the parameter. Y Text.

description A human-readable description of the purpose or

usage of the Parameter.

Y Text.