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SEMI E98-1102 © SEMI 2000, 2002 2 SEMI E40 — Standa rd for Processing Ma nagement SEMI E41 — Exception Manageme nt (EM) Standa rd SEMI E42 — Recipe Management Standard: Concepts, Be havior, an d Message Ser vices SEMI E5…
SEMI E98-1102 © SEMI 2000, 2002 1
SEMI E98-1102
PROVISIONAL STANDARD FOR THE OBJECT- BASED EQUIPMENT
MODEL (OBEM)
This provisional standard was technically approved by the Global Information and Control Committee and is
the direct responsibility of the North American Information and Control Committee. Current edition
approved by the North American Regional Standards Committee on November 27, 2001. Initially available
at www.semi.org December 2001; to be published March 2002. Originally published February 2000;
previously published March 2002.
NOTICE: The designation of SEMI E98 was updated during the 1102 publishing cycle to reflect revisions to
SEMI E98.1.
1 Purpose
1.1 Purposes of the Object-Based Equipment Model
include the following:
• Define a standard model for interfacing to multi-
process equipment and other complex equipment.
• Define standard equipment components so that
communications can “discuss” component-related
issues.
• Provide an equipment model that can be easily
integrated with SEMI E81 CIM Framework
systems by connecting an OBEM-compliant
equipment to a Machine object.
1.2 The purpose of the Object-Based Equipment Model
(OBEM) standard is to provide definitions, services,
and behavior, as seen through communications with the
factory, for the common types of physical and logical
objects of which equipment is typically composed,
including the equipment itself. The definition of
standardized objects allows the equipment to describe
its makeup to the factory and provides the factory
visibility into the equipment.
2 Scope
2.1 This is a provisional standard that defines con-
cepts, behavior, and services to support the integration
of production equipment within a semiconductor fac-
tory. The scope of this standard includes all semicon-
ductor manufacturing equipment that provides an inter-
face to the factory host systems. Some services may
not be applicable to some material handling systems.
2.2 Sections that must be completed in order for the
provisional status of OBEM to be removed include the
following:
1. Section 11.2 — Access Management
2. Section 14 — OBEM Compliance
2.3 Detail standards will also be added in the future to
specify OBEM mappings to different protocols such as
SECS-II, CORBA IDL, and DCOM.
2.4 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This standard is not intended to define the
attributes, behavior, or services of systems that are
aggregates of equipment, such as cells.
3.2 The decomposition of equipment into different
objects is chosen by the equipment supplier to map the
physical equipment to the characteristics of the objects
defined by this standard.
3.3 Object-oriented technology is not required for
implementations of OBEM. However, object-oriented
implementations should be compatible with OBEM.
4 Referenced Standards
4.1 This section lists documents referenced by this
standard.
4.2 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement
of Equipment Reliability, Availability, and
Maintainability (RAM)
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Provisional Specification for 300 mm
Tool Load Port
SEMI E30 — Generic Model for Communications and
Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E98-1102 © SEMI 2000, 2002 2
SEMI E40 — Standard for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard:
Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E54 — Sensor/Actuator Network Standard
SEMI E58 — Automated Reliability, Availability, and
Maintainability Standard (ARAMS): Concepts,
Behavior, and Services
SEMI E81 — Provisional Specification for CIM
Framework Domain Architecture
SEMI E87 — Provisional Specification for Carrier
Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Provisional Specification for Control Job
Management
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AGV — Automated Guided Vehicle
5.1.2 AMHS — Automated Material Handling System
5.1.3 APC — Advanced Process Control
5.1.4 ARAMS — Automated Reliability, Availability,
and Maintainability Standard (SEMI E58)
5.1.5 CIM — Computer Integrated Manufacturing
5.1.6 CJM — Control Job Management
5.1.7 CMS — Carrier Management Standard
5.1.8 FDC — Fault Detection Control
5.1.9 FIMS — Front-Opening Interface Mechanical
Standard (reference SEMI E62)
5.1.10 FOUP — Front-Opening Unified Pod
5.1.11 FPD — Flat Panel Display
5.1.12 OBEM — Object-Based Equipment Model
5.1.13 OSS — Object Services Standard (SEMI E39)
5.1.14 PGV — Personal Guided Vehicle
5.1.15 R2R — Run-to-Run Control
5.1.16 RMS — Recipe Management Standard (SEMI
E42)
5.1.17 SMIF — Standard Mechanical Interface (SEMI
E19)
5.1.18 STS — Specification for Substrate Tracking
SEMI E98-1102 © SEMI 2000, 2002 3
5.2 Definitions
5.2.1 abstract object type — an object supertype that is
not instantiated directly but only through one of its
subtypes.
5.2.2 actuator — an analog or digital output device
that is used to affect changes in the physical
environment. Examples of actuators include mass flow
controllers (MFCs) and open/closed valves.
5.2.3 advanced process control (APC) — techniques
covering both feedforward and feedback control and
automated fault detection, applied both by the
equipment (in situ) and by the factory (ex situ).
5.2.4 Automated Material Handling System (AMHS) —
a factory system used to transport and store carriers.
AMHS has two major types of components: an
automated transport system and one or more storage
systems (stockers).
5.2.5 automated transport system — the component of
AMHS used to transport carriers between stockers
and/or production equipment.
5.2.6 carrier — a container with one or more fixed
positions at which material may be held.
NOTE 2: Positions within a carrier may be considered as
material locations owned by the carrier.
5.2.7 clock — a device that is used to provide real-time
date and time information.
5.2.8 container — a durable that is used to hold other
material, including other containers, for transport,
storage, or shipping. Types of containers include
carriers and boxes.
5.2.9 dry run (mechanical dry run) — a complete
equipment cycle that allows the material handling and
software capabilities of the equipment to be exercised
without requiring full facilities hookups and without
changing the physical state of the wafer. Environ-
mental control subsystem (e.g., vacuum, nitrogen
purge, particle detection) should not be affected by a
dry run, and process consumables are not used.
5.2.10 durable — a type of material used to facilitate
manufacturing but not normally consumed in the
process that is removable, reusable, and trackable.
Examples include containers, reticles, and pellicles.
5.2.11 environmental subsystem — a subsystem of
equipment with the purpose of monitoring or
maintaining one or more specific environmental
conditions or used to handle product or durables.
Environmental subsystems include vacuum systems,
particle detection systems, and nitrogen purge systems.
5.2.12 equipment — equipment (manufacturing equip-
ment) performs one or more of the following manufac-
turing functions in the factory: material process,
material transport, or material storage. Equipment is
made up of various parts: modules, subsystems and
sensors/actuators. Equipment has at least one carrier
port. Equipment communicates with the factory.
5.2.13 equipment element — a component of the
equipment that behaves as a unit, performs work, and
may or may not contain lower-level components.
5.2.14 equipment module (module) — a major
component of equipment that contains at least one
material location and performs some task on material.
Equipment modules may be aggregates of equipment
subsystems, i/o devices, and other modules.
5.2.15 fault detection — analysis of data for early
detection of process faults before yield loss becomes
significant.
5.2.16 Front-Opening Unified Pod (FOUP) — a front-
opening pod with an integrated (non-removable)
cassette.
5.2.17 implementation — the internal view of a type,
class, or instance, including any non-public properties
and behavior. The specific code and functionality that
implements an interface. (See SEMI E81.)
5.2.18 interface — the external view of an object type,
class, or object that defines its public properties and
services without regard to the internal structure and
internal behavior. (See also SEMI E81.)
5.2.19 interface inheritance — the construction of an
interface by incremental modification of other interfa-
ces (see implementation inheritance). (See SEMI E81.)
OBEM specifies interface inheritance but not
implementation inheritance.
5.2.20 I/O device — a general term for any type of
sensor or actuator or aggregation of sensor and/or
actuator.
5.2.21 linked equipment — two or more equipment that
are physically and logically connected and function as a
single installation of equipment. In this case, the
individual component equipment are modeled as high-
level modules of the linked equipment.
5.2.22 load port — The physical interface provided for
the exchange of carriers with an agent of the factory
(operator or automated material handling system).
(Reference SEMI E15.)
5.2.23 Manufacturing Execution System (MES) — the
factory system responsible for managing the manufac-
turing process, including logistics and process flow.