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SEMI E1.2-0697 © SEMI 1983, 2002 1 SEMI E1.2-0697 (Reapproved 1102) STANDARD FOR 100 mm PLASTIC AND METAL WAFER CARRIERS, GENERAL USAGE This standard was technicall y approved by the Global Physical In terfaces and Carri…
SEMI E1.1-0697 © SEMI 1983, 2002 2
Figure 2
3 inch Plastic and Metal Wafer Carrier — General Usage
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E1.2-0697 © SEMI 1983, 2002 1
SEMI E1.2-0697 (Reapproved 1102)
STANDARD FOR 100 mm PLASTIC AND METAL WAFER CARRIERS,
GENERAL USAGE
This standard was technically approved by the Global Physical Interfaces and Carriers Committee and is the
direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition
approved by the North American Physical Interfaces and Carriers Committee on July 21, 2002. Initially
available at www.semi.org October 2002; to be published November 2002. Orignally published in 1983;
previously published June 1997.
Figure 3
Reference
M
etal Carrier with
Type I Crossbar
Plastic Carrier with
Type II or III Crossbar
Overall Dimensions
A1 144.02 mm (5.670 inch) max. X X
A2 125.48 mm (4.940 inch) max. X X
A3 114.30 mm (4.500 inch) max. X X
Capacity
B1 25 X X
B2 4.76 mm ± 0.25 mm (0.1875" ± 0.010" ) X X
B3 114.30 mm ± 0.25 mm (4.500" ± 0.010" ) X X
Detail Dimensions
C1 (C3) + 0.51 mm (0.020 inch) min. X X
C2 11.18 mm (0.440) inch max./7.92 mm (0.312 inch) min. X X
C3 2.67 mm (0.105 inch) max./1.40 mm (0.055 inch) min.
or 2.03 mm (0.080 inch) max./1.40 mm (0.055 inch) min.
X N/A
N/A X
C4 104.65 mm (4.120 inch) max./102.62 mm (4.040 inch) min. X X
C5 107.29 mm ± 0.25 mm (4.224 inch ± 0.010 inch) X X
C6 134.52 mm ± 0.25 mm (5.296 inch ± 0.010 inch) X X
C7 2.54 mm + 0.00 mm/– 0.25 mm (0.100 inch + 0.000 inch/– 0.010 inch)
by 3.43 mm ± 0.38 mm (0.135 inch ± 0.015 inch)
X X
C8 3.05 mm + 0.25 mm/– 0.00 mm (0.120 inch + 0.010 inch/– 0.000 inch) X X
C9 10.11 mm ± 0.25 mm (0.398 inch ± 0.010 inch) X X
D1 14.55 mm ± 0.25 mm (0.573 inch ± 0.010 inch) or X X
13.97 mm ± 0.25 mm (0.550 inch ± 0.010 inch)
Parallelism ± 0.25 mm (0.010 inch) inclusive of all pockets.
N/A X
D2 4.78 mm (0.188 inch) X X
D3 1.57 mm (0.062 inch) max. X X
D4 53.98 mm ± 0.25 mm (2.125 inch ± 0.10 inch) X X
D5 Crossbar specifications
D5a 25.40 mm (1.000 inch) max. N/A X
D5b 6.35 mm + 0.00 mm/– 0.38 mm (0.250 inch + 0.000 inch/– 0.015 inch) X X
D6 60.33 mm (2.375 inch) min. X X
D7 1.57 mm (0.062 inch) min. X X
Wafer Tilt 0.51 mm (0.020 inch) max. X X
Usage Note: Because of the range of wafer carrier designs and wafer carrier feature tolerances allowed by this standard, and because of the range
of wafer shapes and tolerances allowed by the wafer dimensional standards, not every possible SEMI Standards wafer carrier is compatible with
every possible SEMI Standard wafer. Please verify the compatibility of your specific wafer and carrier with the respective vendors.
SEMI E1.2-0697 © SEMI 1983, 2002 2
Figure 3
100 mm Plastic and Metal Wafer Carrier General Usage
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.