semi合集-English.pdf - 第2083页

SEMI E54.11-0301 © SEMI 2 001 6 8.3.1.1 N umber of Endpoint Object s — A n attribute th at specifi es the number of en dpoint objects in the dev i ce. This val ue represents the number of Sensor-BI-TH-EP ob j ects in the…

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SEMI E54.11-0301 © SEMI 20015
Table 4 Exception Detail Alarm Bit Assignments
Bit Device Specific Alarm[0]
0 Unexpected Conditions Detected
1 Reserved
2 Sensor Not Detected
3 Reserved
4 Reserved
5 Reserved
6 Reserved
7 Endpoint Failure
8.2.1.3 Exception Detail Warning (Optional) — An
attribute that identifies the detailed warning status of
the device. Table 5 defines the bit assignments
associated with the warning exception detail.
Table 5 Exception Detail Warning Bit Assignments
Bit Device Specific Warning[0]
0 Unexpected Conditions Detected
1 Reserved
20
3 Reserved
4 Reserved
5 Reserved
6 Reserved
7 Endpoint Warning
8.2.1.4 Manufacturer Exception Detail Size (Optional)
— An attribute that specifies the number of exception
detail bytes included in the alarm or warning details.
8.2.1.5 Initial and Default Values
Table 6 DM Object Attribute Initial and Default
Values
Attribute Initial
Value
Default
Value
Comment
Device Type EPD EPD EPD =
Endpoint
Device
Exception
Detail Alarm
00
Exception
Detail
Warning
00
8.2.2 Device Manager Object Services — The services
provided by the Device Manager object are defined in
SEMI E54.1. There are no additional services required
for the Device Manager object.
8.2.3 Device Manager Object Behavior — The
behavior exhibited by the Device Manager object is
defined in SEMI E54.1. There is no additional behavior
specified for the Device Manager object.
8.3 Sensor Actuator Controller Object (SAC) — The
Sensor Actuator Controller object is the device
component responsible for coordinating the interaction
of the EPD device with the sensory/actuation/control
environment as specified in SEMI E54.1. The following
sections specify the components of the SAC object that
are not specified in the Common Device Model or
require further definition than specified in the Common
Device Model.
8.3.1 Sensor Actuator Controller Object Attributes —
The attributes provided by the Sensor Actuator
Controller object are defined in SEMI E54.1. Table 7
contains the additional attributes required for the Sensor
Actuator Controller object.
Table 7 SAC Object Attributes
Attribute Name Attribute
Identifier
Access
Network
Required Form
Number of Endpoint Objects SacA65 R No UINT
SEMI E54.11-0301 © SEMI 2001 6
8.3.1.1 Number of Endpoint Objects — An attribute that specifies the number of endpoint objects in the device.
This value represents the number of Sensor-BI-TH-EP objects in the device. If this attribute is not supported then the
default value of 1 Endpoint object is supported.
8.3.1.2 Initial and Default Values
Table 8 SAC Object Attributes Initial and Default Values
Attribute Initial Value Default Value Comment
Number of Endpoint
Objects
Manufacturer
Specified
Manufacturer Specified There must be at least one Endpoint object.
8.3.2 Sensor Actuator Controller Object Services — The services provided by the Sensor Actuator Controller
object are defined in SEMI E54.1. Table 9 contains the additional services required for the Sensor Actuator
Controller object.
Table 9 SAC Object Services
Service Service Identifier Type Description
Reset Endpoint S33 R Used to ‘Reset’ all of the Sensor-BI-TH-EP sensor objects.
Download Recipe S34 R Used to download the Sensor-BI-TH-EP sensor objects with
manufacturer specific recipe data.
Upload Recipe S35 R Used to upload, from the device, manufacturer specific
recipe data.
Calibrate S36 R Used to execute a device manufacture specific calibration
procedure.
Reserved S37–S64 — Reserved for future expansion
Manufacturer Specified > S64 — Manufacturer Specific services
8.3.2.1 Reset Endpoint (Optional) — This service is used to instruct all of the Sensor-BI-TH-EP objects to perform
a ‘Reset’ of their endpoint monitoring and measuring events. A one-time reset of their respective Sensor-BI-TH-EP
attributes is performed. There are no parameters required for this service.
8.3.2.2 Download Recipe (Optional) — This service is used to set the recipe parameters associated with the
endpoint sensor or a specific Sensor-BI-TH-EP object. The format and type of data comprising recipe data and the
mechanism implemented to interrupt recipe data and distribute its contents to the appropriate Sensor-BI-TH-EP
object is manufacturer specific. The parameter ‘Recipe Data’ may be a formatted data structure or a list of individual
data items. The following table describes the parameters specified for this service.
Table 10 Download Recipe Service Parameter Definitions
Parameter Request/
Indication
Response/
Confirmation
Data Type Description
Recipe Data #1 M U Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
Recipe Data #2 M U Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
Recipe Data #3
through
Recipe Data #N-1
M U Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
Recipe Data #N M U Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
SEMI E54.11-0301 © SEMI 20017
8.3.2.3 Upload Recipe (Optional) — This service is used to read the recipe parameters associated with the endpoint
sensor or a specific Sensor-BI-TH-EP object. The format and type of data comprising recipe data and the
mechanism implemented to assemble recipe data to be read is manufacturer specific. The parameter ‘Recipe Data’
may be a formatted data structure or a list of individual data items. The following table describes the parameters
specified for this service.
Table 11 Upload Recipe Service Parameter Definitions
Parameter Request/
Indication
Response/
Confirmation
Data Type Description
Recipe Data #1 M M Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
Recipe Data #2 M M Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
Recipe Data #3
through
Recipe Data #N-1
M M Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
Recipe Data #N M M Manufacturer
Specific
The recipe parameter format is manufacturer specific.
The implementation behavior required to support this
service is also manufacturer specific.
8.3.2.4 Calibrate (Optional) — This service is used to set the calibration parameters associated with the endpoint
sensor or a specific Sensor-BI-TH-EP object. The format and type of data comprising calibration data and the
mechanism implemented to interrupt calibration data and execute a calibration algorithm is manufacturer specific.
The parameter ‘Calibration Data’ may be a formatted data structure or a list of individual data items. The following
table describes the parameters specified for this service.
Table 12 Calibration Service Parameter Definitions
Parameter Request/
Indication
Response/
Confirmation
Data Type Description
Calibration Data #1 C C Manufacturer
Specific
The calibration parameter format is manufacturer
specific. The implementation behavior required to
support this service is also manufacturer specific.
Calibration Data #2 C C Manufacturer
Specific
The calibration parameter format is manufacturer
specific. The implementation behavior required to
support this service is also manufacturer specific.
Calibration Data #3
through
Calibration Data
#N-1
C C Manufacturer
Specific
The Calibration parameter format is manufacturer
specific. The implementation behavior required to
support this service is also manufacturer specific.
Calibration Data #N C C Manufacturer
Specific
The calibration parameter format is manufacturer
specific. The implementation behavior required to
support this service is also manufacturer specific.
8.3.3 Sensor Actuator Controller Object Behavior
8.3.3.1 The behavior exhibited by the Sensor Actuator Controller object is defined in SEMI E54.1. Additional
behavior is detailed below.
8.3.3.2 The “Reset Endpoint” service will issue an “Endpoint Restart” object service to each Sensor-BI-TH-EP
sensor object.
8.4 Sensor-BI-TH Object — The Sensor-BI object is the device component responsible for coordinating the
behavior common to all Boolean input threshold sensor elements in the EPD device as specified in SEMI E54.1.