semi合集-English.pdf - 第2483页
SEMI E87-0705 © SEMI 1999, 2005 52 R1-2.8 Normal Roundtri p 7 R1-2.8.1 Ass umptions: Fixed buffer production equipment , FOUP, Host based verification, Rese rveAtPort service received. R1-2.8.2 Indicated states: LTS = Lo…
SEMI E87-0705 © SEMI 1999, 2005 51
# Comment Dir Message LTS LRS LCAS CIDS CSMS
3 Loading transfer completes.
4 CarrierID is read.
5 CarrierID is verified by production
equipment, and result is OK.
H<-E IDVerificationOK
6 Carrier is docked.
7 Slot map is read.
8 Slot map is verified by production
equipment, and result is OK.
H<-E SlotMapVerificationOK
9 Process starts.
10 Process completes.
11 Carrier is undocked. H<-E ReadyToUnload RTU
12 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
13 Unloading transfer completes. H<-E ReadyToLoad RTL
NA (T) (T)
R1-2.7 Normal Roundtrip 6
R1-2.7.1 Internal buffer production equipment, FOUP, Production equipment based verification, CarrierNotification
service received.
R1-2.7.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-7 Normal Roundtrip 6
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. (T) (T)
1 Load port notified of future carrier
arrival.
H->E CarrierNotification
RTL
2 Loading transfer starts. H<-E TransferBlocked
3 Loading transfer completes.
NA
4 CarrierID is read.
INR
5 CarrierID is verified by equipment,
and result is OK.
H<-E IDVerificationOK
6 Carrier-in starts. H<-E BufferCapacityChange
TB
A
7 Carrier-in completes.
8 Process starts.
9 Slot map is read at FIMS port.
SNR
10 Slot map is verified by equipment,
and result is OK.
H<-E SlotMapVerificationOK
11 Process completes.
12 Carrier completes. H<-E CarrierComplete
13 Host commands to carrier-out. H->E CarrierOut
RTL
NR
NA
14 Carrier-out starts. H<-E TransferBlocked TB R
15 Carrier-out completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
16 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
17 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA (T) (T)
SEMI E87-0705 © SEMI 1999, 2005 52
R1-2.8 Normal Roundtrip 7
R1-2.8.1 Assumptions: Fixed buffer production equipment, FOUP, Host based verification, ReserveAtPort service
received.
R1-2.8.2 Indicated states: LTS = Load Port Transfer State, LRS= Load Port Reserve State, LCAS = Load
Port/Carrier State Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-8 Normal Roundtrip 7
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR
1 Reserve a port for future activity. H->E ReserveAtPort
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
NA (T) (T)
4 CarrierID is read. H<-E WaitingForHost
5 CarrierID is verified by host, and result
is OK.
WFH
6 Host commands to proceed. H->E ProceedWithCarrier
7 Carrier is docked.
SNR
8 Slot map is read. H<-E WaitingForHost
9 Slot map is verified by host, and result is
OK.
WFH
10 Host commands to proceed. H->E ProceedWithCarrier
11 Process starts.
12 Process completes.
TB
13 Carrier is undocked. H<-E ReadyToUnload RTU
14 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
15 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA (T) (T)
R1-2.9 Normal Roundtrip 8
R1-2.9.1 Internal buffer production equipment, FOUP, Host based verification, ReserveAtPort service received.
R1-2.9.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status, CPS = Carrier
Processing Status.
Table R1-9 Normal Roundtrip 8
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR
1 Reserve Port for future activity. H->E ReserveAtPort
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
NA (T) (T)
4 CarrierID is read. H<-E WaitingForHost
5 CarrierID is verified by host, and
result is OK.
WFH
6 Host commands to proceed. H->E ProceedWithCarrier
7 Carrier-in starts. H<-E BufferCapacityChange
TB
A
8 Carrier-in completes.
9 Process starts.
SNR
10 Slot map is read at FIMS port. H<-E WaitingForHost
RTL
NR
NA
IVO
WFH
SEMI E87-0705 © SEMI 1999, 2005 53
# Comment Dir Message LTS LRS LCAS CIDS CSMS
11 Slot map is verified by host, and result
is OK.
12 Host commands to proceed. H->E ProceedWithCarrier
13 Process completes.
14 Carrier completes. H<-E CarrierComplete
15 Host commands to carrier-out. H->E CarrierOut
16 Carrier-out starts. H<-E TransferBlocked TB R
17 Carrier-out completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
18 Unloading transfer starts. H<-E TransferBlocked TB
A
SVO
19 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA (T) (T)
R1-2.10 Abnormal CarrierID Verification 1
R1-2.10.1 Host based verification, CancelCarrier
R1-2.10.2 Indicated states: LTS = Load Port Transfer State, LAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-10 Abnormal CarrierID Verification 1
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Loading transfer starts. H<-E TransferBlocked
2 Loading transfer completes.
NA (T) (T)
3 CarrierID is read. H<-E WaitingForHost
4 CarrierID is verified by host, and result is Failed.
WFH
5 Host commands to return. H->E CancelCarrier
TB
6 Carrier is made ready to unload. H<-E ReadyToUnload RTU
A
IVF
SNR
R1-2.11 Abnormal CarrierID Verification 2
R1-2.11.1 Production equipment based verification, Bind service received, CancelCarrier
R1-2.11.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-11 Abnormal CarrierID Verification 2
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified
carrierID, and reserved for loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR SNR
5 CarrierID is verified by production
equipment, and result is Failed. The carrier
object created by the Bind service is
destroyed. A carrier object with the id
determined by read is created.
H<-E WaitingForHost (T)
/
WFH
5 Host commands to return. H->E CancelCarrier
TB
6 Carrier is made ready to unload. H<-E ReadyToUnload RTU
NR
A
IVF
(T)
/
SNR