semi合集-English.pdf - 第3086页

SEMI E123.1-0703 © SEMI 2003 9 R1-1.3 Normal SPC Scena rio R1-1.3.1 This is a normal SPC run with all op tional SEMI E3 0 events turned off by default. COMMENT HOST EQUIPMENT COMMENT Host selects GEM Alarms S5,F3--> t…

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SEMI E123.1-0703 © SEMI 2003 8
RELATED INFORMATION 1
NOTICE: This related information is not an official part of SEMI E123.1 and was derived from the work of the
originating committee. This related information was approved for publication by full letter ballot procedures.
R1-1 Scenarios
R1-1.1 The purpose of this section is to document possible HSEM-specific operational scenarios.
R1-1.2 Normal Run Scenario
R1-1.2.1 This is an error-free run of a single lot with a single test-site. All optional SEMI E30 events are turned off
by default.
COMMENT HOST EQUIPMENT COMMENT
Host selects process program. S2,F41-->
<--S2,F42 Equipment Ack
Setting Up
Setup Complete
<--S6,F11 Event : PPLoadOk
Host Ack S6,F12-->
Process
Process.SettingUp
Process.Ready
Host commands start S2,F41-->
<--S2,F42 Equipment Acks Start.
Handler cycles devices...
...until empty...
<--S6,F11 Event : Empty
Host Acks Event S6,F12-->
Host commands Purge. S2,F41-->
<--S2,F42 Handler acks Rmt.Cmd.
Stopping
<--S6,F11 Event : Lot Completed
Host Acks Event S6,F12-->
Idle
SEMI E123.1-0703 © SEMI 2003 9
R1-1.3 Normal SPC Scenario
R1-1.3.1 This is a normal SPC run with all optional SEMI E30 events turned off by default.
COMMENT HOST EQUIPMENT COMMENT
Host selects GEM Alarms S5,F3-->
to enable (list).
<--S5,F4 Alarms xyz ON
Host selects GEM Events S2,F37-->
to enable (list).
<--S2,F38 Events xyz ON
Host selects process S2,F41-->
program.
<--S2,F42 Equipment Ack
Setting Up
Setup Complete
<--S6,F11 Event : PPLoadOk
Host Ack S6,F12-->
Process
Process.SettingUp
Process.Ready
Host requests S6,F15-->
start-of-lot report.
<--S6,F16 Equipment sends report
items.
Host commands S2,F41-->
start
<--S2,F42 Equipment Acks Start.
<--S5,F1 Alarm : NoDevicesPresent
Host Acks Alarm S5,F2-->
Time Passes.
<--S6,F11 Event : PortLoaded
Host Acks Event S6,F12-->
Handler cycles devices...
... until ...
<--S5,F1 Alarm : LoadDeviceFail
SEMI E123.1-0703 © SEMI 2003 10
Host Acks Alarm S5,F2-->
ProcessPause
Host sends operator
to clear jam.
Host sends resume. S2,F41-->
<--S2,F42 Handler Acks and resumes.
Processing
Handler cycles devices...
... until ...
Host asks for S6,F15-->
Temperature x.
<--S6,F16 Handler sends Temp.x.
...
<--S6,F11 Event : HandlerEmpty
Host Acks Event S6,F12-->
Host commands S2,F41-->
Stop.
<--S2,F42 Handler acks Rmt.Cmd.
Stopping
<--S6,F11 Event : Lot Completed
Host Acks Event S6,F12-->
Idle
Host requests S6,F15-->
end-of-lot-report.
<--S6,F16 Handler sends report.