semi合集-English.pdf - 第1910页
SEMI E54.1-1000 © SEMI 1996, 2000 16 7.3.1.7 Ser ial Number (opt ional) — A n attrib ute whi ch designat es the number define d and assigned by the manufacturer that un iq uely identifies each indiv idual device produced…

SEMI E54.1-1000 © SEMI 1996, 200015
Attribute Name Attribute
Identifier
Access
Network
Required Form
Exception Status DmA12 RO Y Formatted byte, see text
Exception Detail Alarm (optional) DmA13 — N Structure of
Common Exception Detail — — — Structure of
Size — RO — unsigned integer, < 256
Detail — RO — Ordered list of bytes, see text
Device Exception Detail — — — Structure of
Size — RO — unsigned integer, < 256
Detail — RO — Ordered list of bytes, see text
Manufacturer Exception Detail — — — Structure of
Size — RO — unsigned integer, < 256
Detail — RO — Ordered list of bytes, see text
Exception Detail Warning (Optional) DmA14 *** N Structure of***
Visual Indicator DmA15 RW N Byte, enumerated
Alarm Enable DmA16 RW N Boolean
Warning Enable DmA17 RW N Boolean
Exception Detail Type DmA18 RW N Byte, enumerated
Exception Detail Alarm Queue DmA19 R N Ordered list of type Exception Detail Alarm.
Exception Detail Warning Queue DmA20 R N Ordered list of type Exception Detail Warning.
Date and Time DmA21 RW N See Section 7.3.1.23
Date and Time Type DmA22 RW N Enumerated USINT
Reserved for CDM < DmA32 — — Reserved for future CDM DM attribute definitions.
* A “Definition” column is not included. For attribute definitions, see text.
** A value of 00 indicates that this timer is disabled.
*** Same as Exception Detail Alarm.
7.3.1.1 Device Type — An attribute which identifies the type of the device on the sensor/actuator network. It is
formatted as a text string with a maximum length of 8 characters. The exact content may be defined in an
appropriate sensor/actuator network specific device model specification. For example, “MFC” = mass flow
controller, “CDG” = capacitance diaphragm gauge.
7.3.1.2 Standard Revision Level — An attribute which identifies the most recent version of the sensor/actuator
network specific device model to which the device adheres. It is formatted as a text string with a maximum length of
9 characters as “ENNNNNNYY,” where “E” is a constant defined by SEMI, “NNNNNN” is the number of the
standard, and “YY” is the last two digits of the year in which the standard/revision was published. If there is no
relevant standard or the device is not compliant to the standard, then “NNNNNN” is zero length and “YY” is set to
“00” (thus, the attribute is set to “E00”).
7.3.1.3 Device Manufacturer Identifier — An attribute which designates the manufacturer of the device. Each
manufacturer is responsible for defining this variable for their products in a way which will be unique to that
manufacturer and which must be the same for all devices they provide. Formatted as a text string with a maximum
length of 20 characters, it will usually be the company name, as in “Acme Instrument Co.”
7.3.1.4 Manufacturer Model Number — An attribute which designates the basic model identification number,
defined by the manufacturer. It is formatted as a text string with a maximum length of 20 characters.
7.3.1.5 Device Software or Firmware Revision Level — An attribute which designates the version of
microprocessor code which is contained in the device, defined by the manufacturer. It is formatted as a text string
with a maximum length of 5 characters.
7.3.1.6 Hardware Revision Level — An attribute which designates the version of the device, excluding the
microprocessor code, defined by the manufacturer. It is formatted as a text string with a maximum length of 5
characters.

SEMI E54.1-1000 © SEMI 1996, 2000 16
7.3.1.7 Serial Number (optional) — An attribute which designates the number defined and assigned by the
manufacturer that uniquely identifies each individual device produced. It is formatted as a text string with a
maximum length of 30 characters.
7.3.1.8 Device Configuration (optional) — An attribute which designates a manufacturer-defined device
configuration (beyond model number). It is formatted as a text string with a maximum length of 50 characters.
7.3.1.9 Device Status — An attribute which designates the state of the DM object. The attribute (unsigned integer)
values and corresponding object states specified by this attribute are enumerated in Table 18.
Table 18 Device Status Attribute Values
Attribute Value DM Object State
0 Unknown
1 INITIALIZED/SELF TESTING
2IDLE
3 SELF TEST EXCEPTION
4EXECUTING
5 ABORT FROM IDLE OR EXECUTING
6 ABORT FROM INITIALIZED/SELF TESTING OR SELF TEST EXCEPTION
7 – 255 Reserved
This attribute is set and updated internally by the DM object as part of the object behavior associated with transition
between the various states (see Section 7.3.3 and Figure 6).
7.3.1.10 Reporting Mode — A network-settable attribute defined as a single byte containing two nibbles: A low
nibble (bits 0 – 3) and a high nibble (bits 4 – 7). The high nibble contains the value for alarm conditions. The low
nibble contains the value for warning conditions. The value assigned to each nibble indicates how the alarm/warning
status variable is to be reported. The possible attribute values and corresponding reporting modes specified by this
attribute are enumerated in Table 19.
Table 19 Reporting Mode Attribute Values for Alarms and Warnings
Reporting Mode Attribute High Nibble
Value (Alarm)
Attribute Low Nibble
Value (Warning)
Request 00
RequestLatched (optional) 1 1
EventTriggeredOn (optional) 2 2
EventTriggeredOn/Off (optional) 3 3
TimeTriggered (optional) 4 4
EventOnOrTimeTriggered (optional) 5 5
EventOn/OffOrTimeTriggered (optional) 6 6
The behavior of the DM object associated with this attribute and each of these reporting modes is described in
Section 7.3.3.
7.3.1.11 Exception Status Report Interval (optional) — A network-settable attribute which specifies the time
interval for periodic exception status reporting (when a time-triggered reporting mode is indicated, see definition of
Reporting Mode attribute and Section 7.3.3). It is formatted as an unsigned integer whose least significant bit
corresponds to a value of 1/100 second. The requirement to store this attribute in non-volatile memory (so that the
value upon “power-up” is the last value active) is device-specific. Note that a value of 0.00 indicates that this timer,
and thus time-triggered exception reporting, is not enabled (see also Section 7.3.3).
7.3.1.12 Exception Status — A single-byte attribute whose value indicates the status of the alarms and warnings for
the device (see Table 19). This indication may be provided in one of two methods: Basic or Expanded. In the Basic
method, bit seven of the Exception Status attribute is set to zero; all exceptions are reported exclusively through

SEMI E54.1-1000 © SEMI 1996, 200017
communication of this Exception Status attribute. The format of bits zero through six in this mode is device-specific;
the format may be further specified in an appropriate sensor/actuator network specific device model specification; if
it is not specified, then the format of bits zero through six is equivalent to that specified in the expanded mode. In
the Expanded method, bit seven of Exception Status attribute is set to one; exceptions are reported through the
communication of this Exception Status attribute, formatted as specified in Table 20, and exception detail attributes
as indicated by the Exception Status attribute.
Table 20 Exception Status Attribute Value*
Exception Status Bit Map, Bit 7 set to 0 Exception Status Bit Map, Bit 7 set to 1
bit Function Function
0 ALARM/device-common**
1 ALARM/device-specific
2 ALARM/manufacturer-specific
3 reserved
4 WARNING/device-common**
5 WARNING/device-specific
6 WARNING/manufacturer-specific
7
Device-Specific
See sensor/actuator network specific device model for
further specification
0 == Basic Method
1 == Expanded Method
* Behavior associated with the reporting of exception status attribute values is described in Section 7.3.3.
** The alarm or warning is not specific to the device type or device type manufacturer.
7.3.1.13 Exception Detail Alarm and Exception Detail Warning (optional) — Attributes that relate the detailed
status of the alarms or warnings associated with the device. Each attribute is a structure containing three members;
these three members respectively relate the detailed status of exceptions that are device-common (i.e., not device-
specific), device-specific but not manufacturer-specific, and manufacturer-specific. Each of the three structure
members is defined as a structure containing an ordered list (i.e., array) of bytes of length SIZE, and an unsigned
integer whose value is SIZE. Each of the bytes in each array has a specific mapping. This mapping is formatted as 8
bits representing 8 independent conditions, whereas a value of 1 indicates that the condition is set (or present), and a
value of 0 indicates that the condition is cleared (or not present). Note that if a device does not support an exception
detail, the corresponding bit is never set. The bitmaps for alarms and warnings in the corresponding attributes are
structured in parallel so that a condition may have either alarm or warning set, depending on severity. If a condition
inherently cannot be both alarm and warning, then the parallel bit position corresponding to the other state will
remain “0.”
The existence of an exception detail variable structure is dependent on the value of the Exception Status Attribute;
the existence of an exception detail variable structure is only required if bit seven of the Exception Status attribute is
set to 1 (indicating Expanded mode reporting) and the bit (among bits zero through six) of the Exception Status
attribute corresponding to the particular exception type is also set to 1 (see Table 20).
7.3.1.14 Common Exception Detail (optional) — This structure relates exception conditions (i.e., alarms or
warnings) which are common to all devices on the network. The Detail element of the structure is an ordered list
(i.e., array) of bytes of length [SIZE] which is the value of the structure element Size. For each byte in the Detail
field, all bits which are not identified are reserved for future standardization. The first byte in this attribute is
CommonExceptionDetail[0]. Additional exception details, if provided, are named CommonExceptionDetail[1],
CommonException Detail[SIZE]. The specific exception associated with each of the bitmaps is given in Table 21.
The criteria details for each exception condition are outside the scope of this document.