semi合集-English.pdf - 第2325页

SEMI E82-0705 © SEMI 1999, 2005 21 Variable Name Type Description Class Format Comment TransferComplete- Info CV Carrier information as sociated with a transfer. DVVAL L,n 1.<L,2 1. <TransferInfo 1 > 2. <Carr…

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SEMI E82-0705 © SEMI 1999, 2005 20
Variable Name Type Description Class Format Comment
Priority CV Remote command priority. DVVAL U2 0 is not valid.
1 is the LOWEST priority,
99 is the highest priority.
Priority
i
CV The i
th
Remote command
priority.
SV U2 0 is not valid.
1 is the LOWEST priority,
99 is the highest priority.
Replace CV Flag to denote if a transfer
command involves a carrier
replace at the DestPort.
DVVAL U2 0 = OFF
> 0 = ON
Replace
i
CV The i
th
flag used to denote if a
transfer command involves a
carrier replace at the
DestPort.
SV U2 0 = OFF
> 0 = ON
ResultCode CV Result Code of a transport
system command. Associated
with the command
completion event.
DVVAL U2
Successful = 0
Unsuccessful 0
ResultCodes that must be
implemented are:
Canceled
Aborted
Values of ResultCode will
correspond to meaningful
completion results (0 always
signifies normal successful
completion).
SourcePort CV Source port unique identifier. DVVAL A[1–64] Must be the name of the port
not the corresponding
transport system node name
or number.
SourcePort
i
CV The i
th
Source port unique
identifier.
SV A[1–64] Must be the name of the port
not the corresponding
transport system node name
or number.
SpecVersion CV Version of SEMI E82 to
which the equipment is
compliant.
SV A[0–20] Example values are:
SEMI E82-0999, SEMI E82-
0301. If the equipment is not
compliant, a zero length
value may be specified.
TransferCommand CV Information associated with a
particular TRANSFER
command.
DVVAL L,n
1. <CommandInfo>
2. <TransferInfo
1
>
.
.
.
n. <TransferInfo
m
>
m Number of carriers in
the Transfer Unit
TransferCommand
i
CV Information associated with
the i
th
TRANSFER command.
SV L,2
1. <CommandInfo
i
>
2. L, m
1. <TransferInfo
1
>
.
.
.
m. <TransferInfo
m
>
m = Number of carriers in
the Transfer Unit
SEMI E82-0705 © SEMI 1999, 2005 21
Variable Name Type Description Class Format Comment
TransferComplete-
Info
CV Carrier information associated
with a transfer.
DVVAL L,n
1.<L,2
1. <TransferInfo
1
>
2. <CarrierLoc
1
#1
>
:
:
n.<L,2>
1. <TransferInfo
n
>
2. <CarrierLoc
n
#1
>
N : size of Transfer Unit
TransferInfo CV Carrier information associated
with a particular transfer
command.
DVVAL L,3
1. <CarrierID>
2. <SourcePort>
3. <DestPort>
TransferInfo
i
CV Carrier information associated
with the i
th
transfer command.
SV L,3
1. <CarrierID
i
>
2. <SourcePort
i
>
3. <DestPort
i
>
TransferPort CV Transfer Port unique
identifier.
DVVAL A[1–64] Must be the name of the port
where the transfer is taking
place, not the corresponding
transport system node name
or number. May be the
unique name of an internal
transfer port, and therefore
may not correspond to a
valid SourcePort or DestPort
value.
TransferPortList CV Transfer Port information
associated with a particular
vehicle arrival or departure
event.
DVVAL L,n
1. <TransferPort
1
>
2. <TransferPort
2
>
.
.
.
n. <TransferPort
n
>
n > 1 for simultaneous
transfers
TransferState
i
CV State of Transfer Command. SV U2 1. Queued
2. Transferring
3. Paused
4. Canceling
5. Aborting
6. Waiting
TSCState CV TSC State (SYSTEM). SV U2 1 = TSC Init
2 = Paused
3 = Auto
4 = Pausing
UnitID CV The Id of the ‘transport unit’. DVVAL A[1–64] This is the id of a port,
vehicle, etc.
UnitLocation CV The location of the ‘transport
unit’.
DVVAL A[0-64] This is the id of the location
of the ‘transport unit’. It
could be the id of a port, a
section of track, etc.
SEMI E82-0705 © SEMI 1999, 2005 22
Variable Name Type Description Class Format Comment
UnitStatus
Clearable
CV When a UnitStatusOccured
event is generated this flag
indicates if the equipment is
going to generate a
UnitStatusCleared event
when the status is corrected.
DVVAL A[1] ‘Y’ – A UnitStatusCleared
event will be generated.
‘N’ – A UnitStatusCleared
event will be NOT be
generated.
UnitStatusID CV The identification of the
status.
DVVAL A[1–64] This is generally a vendor
determined id which
identifies the status. For
example it could be
“LostCommunication” or
“SensorMalfunction” or
“1234”.
UnitStatusText CV Vendor specific information
relating to the UnitStatusID
DVVAL A[0-80] Information that may be
helpful to an operator. This
could include more precise
location information or other
related information.
VehicleID CV Unique identification of a
vehicle associated with an
event.
DVVAL A[1–32]
VehicleID
i
CV Unique identification of the
ith vehicle.
SV A[1–32]
VehicleInfo CV Information associated with a
particular vehicle.
DVVAL L,2
1. <VehicleID>
2. <VehicleState>
VehicleInfo
i
CV Information associated with
the ith vehicle.
SV L,2
1. <VehicleID
i
>
2. <VehicleState
i
>
VehicleLocation CV Location of the vehicle. DVVAL A[0–64] The vehicle’s port location.
The data is only valid if the
vehicle is Parked, Acquiring,
or Depositing.
VehicleLocation
i
CV Location of the vehicle. SV A[0–64] The vehicle’s port location.
The data is only valid of the
vehicle is Parked, Acquiring,
or Depositiong.
VehicleState CV The state of the vehicle. DVVAL U2 1 = Removed
2 = Not Assigned
3 = Enroute
4 = Parked
5 = Acquiring
6 = Depositing
VehicleState
i
CV The state of the ith vehicle. SV U2 See VehicleState above.
#1
Current location (port or vehicle id) of the carrier is reported in ‘CarrierLoc’. This may be used as a source port in a following transfer
command.
10 Alarm List
10.1 Since each model of IBSEM equipment differs in configuration, it is not practical to provide an exhaustive list
of all possible alarms. Instead, the IBSEM is requiring the two tables provided as described in SEMI E30
(Document Section). Alarm List Table which is intended to provide for equipment configuration specific alarms
and Alarm ID, Alarm Set/Cleared Event Table. Any alarm that is displayed locally at the equipment, if enabled, is
required to be sent to the host. To be compliant, Tables 9 and 10 must be completed by the supplier, documenting
all alarms.