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SEMI M13-1103 © SEMI 1988, 2003 2 identification code (see SEMI AUX001 1 ) (See Figure 2 and Table 3.) NOTE 1: In the absence of a character at any assigned location, a dash (-) must be used. 6.2 Code Field Loc ation and…

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SEMI M13-1103 © SEMI 1988, 2003 1
SEMI M13-1103
SPECIFICATION FOR ALPHANUMERIC MARKING OF SILICON
WAFERS
This specification was technically approved by the Global Traceability Committee and is the direct
responsibility of the North American Traceability Committee. Current edition approved by the North
American Silicon Wafer Committee on July 27, 2003. Initially available at www.semi.org October 2003; to
be published November 2003. Originally published in 1988; previously published in September 1998.
1 Purpose
1.1 This specification describes an alphanumeric
marking system for silicon wafers. The marking code
includes information on the origin, approximate
resistivity, dopant species, and crystal growth
orientation in addition to a wafer identification number.
Use of this specification ensures the consistency of all
wafer marking performed by silicon manufacturers.
This consistency allows simplification of the
performance requirements of Automatic Optical
Character Reading (OCR) equipment.
1.2 By defining the basic code used to characterize the
individual wafer, this specification provides the
information needed for practical operator interpretation.
2 Scope
2.1 This specification defines the character set,
location, and associated dimensions and tolerances of
an alphanumeric code, specifically for identification of
flatted and notched silicon wafers.
2.2 This specification does not address the marking
techniques that may be employed when complying with
this standard.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 None.
4 Terminology
4.1 Definitions
4.1.1 adjacent character misalignment, R
adj
— the
vertical distance between the character baselines of two
adjacent characters on the same line.
4.1.2 character separation — the horizontal distance
between the adjacent boundaries of any characters.
4.1.3 character spacing — the horizontal distance
between the character spacing reference lines of the
adjacent characters.
4.1.4 line character misalignment, R
line
— the vertical
distance between the character baselines of the highest
and lowest characters on the same line.
Figure 1
Character Outline
5 Shape and Size of Marking
5.1 Solid line or dot matrix method may be used to
write characters. The minimum matrix shall be 5 dots
horizontal and 9 dots vertical as shown in Figure 1.
More dots may be used, up to and including a solid line.
Higher density is recommended, especially for use with
the larger code size applicable to notched wafers, to
achieve improved read reliability (see Related
Information 1).
5.2 Character Dimensions and Spacing — See Table 1
and Figure 1.
5.3 SEMI OCR Standard Character Set — See Table 2
and Appendix 1.
6 Alphanumeric Code
6.1 Message Content — The code consists of one line
of 18 characters. The first eight characters are an
identification number that is unique to the wafer for a
given supplier. These characters may be alphanumeric
except character 8, which must be numeric (see
Table 3). Characters 9 and 10 are the supplier
SEMI M13-1103 © SEMI 1988, 2003 2
identification code (see SEMI AUX001
1
) (See Figure 2
and Table 3.)
NOTE 1: In the absence of a character at any assigned
location, a dash (-) must be used.
6.2 Code Field Location and Dimensions — The
alphanumeric code field shall be located on the front
surface of the wafers (see Figures 3 and 4 for location
and dimensions of the alphanumeric code field for
flatted and notched wafers, respectively).
6.3 Character Alignment
6.3.1 Character Skew — the maximum allowable angle
between the character baseline and a line parallel with
the bottom of the character window shall be 3 degrees
(see Figure 5).
6.3.2 Maximum Character Misalignment — the
maximum adjacent character misalignment, R
adj
, shall
be 0.23 mm (see Figure 6), and the maximum line
character misalignment, R
line
,
,
shall be 0.46 mm (see
Figure 7).
Table 1 Character Dimensions
Character 100 mm, 125 mm,
and 150 mm
Flatted Wafers,
mm
150 mm and 200
mm Notched
Wafers, mm
Height 0.812 ± 0.025 1.624 ± 0.025
Width 0.406 ± 0.025 0.812 ± 0.025
Thickness 0.100 ± 0.050 0.200 + 0.025 or
– 0.150
Spacing 0.710 ± 0.025 1.420 ± 0.025
Minimum Separation 0.104 0.308
NOTE 1: The diagonal thickness of the letter “N” is 0.138 ± 0.05
mm.
Table 2 Standard Character Set
1
SEMI AUX001, List of Wafer Supplier Identification Codes,
available from SEMI web site: www.semi.org.
Identification Number 12345678
Wafer Supplier Identification See SEMI AUX001
2
Resistivity Identification 11.8
Ω·cm
Dopant Species Boron
Crystal Growth Orientation [111]
Check Characters (F5) Machine input for code acceptance
Identification Number
Wafer Supplier Identification
Resistivity Identification
Figure 2
Example of Code
SEMI M13-1103 © SEMI 1988, 2003 3
Table 3 Code
Character
Location
CharacterStyle Parameter Code Definition
1 Alpha/Numeric
2 Alpha/Numeric
3 Alpha/Numeric
4 Alpha/Numeric
5 Alpha/Numeric
6 Alpha/Numeric
7 Alpha/Numeric
A through Z
and
0 through 9
8 Numeric Only
IDENTIFICATION NUMBER
0 through 9
Supplier-Assigned (See NOTE 1.)
9 Alpha Only
10 Alpha Only
SUPPLIER IDENTIFICATION A through Z (see SEMI AUX001 and NOTE 1.)
11 Numeric Only
12 Numeric Only
13 Numeric Only
14 Numeric Only
RESISTIVITY IDENTIFICATION
0 through 9
and .(period)
Resistivity (Ω·cm) identification is
assigned by supplier, expressed as a
whole number or as a mixed number
with a decimal fraction. No accuracy is
implied. (See NOTE 1.)
B Boron
F Phosphorous
A Arsenic
S Antimony
15 Alpha Only DOPANT SPECIES
– not identified
0 [100]
1 [111]
2 [110]
3 [011]
5 [511]
16
Numeric Only
CRYSTAL GROWTH
ORIENTATION
– not identified
17 Alpha Only CHECK CHARACTER A
17
A through H
18 Numeric Only CHECK CHARACTER A
18
0 through 7
Error-Detecting Method
(see Section 7)
NOTE 1: In the absence of information at any assigned location, a dash (–) must be used.