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SEMI E58-0703 © SEMI 1997, 2003 20 11.1 Status Infor mation — Status data is information that is maintained by equ ipment and in general cannot be changed by t h e host. This secti on defines specific elements of status …

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SEMI E58-0703 © SEMI 1997, 2003 19
other. The table’s identifier provides a method for differentiating between the three sets of information (generic
definitions, user-defined definitions, and supplier-defined definitions) when necessary to remove ambiguity in
communications. The user at all times shall be able to select an ARAMS state or substate based on the combination
of the three sources of definitions.
1.16.7 An ARAMS Substate Table has a table type of “TableARAMSCode”. The row format is defined in Table 4.
10.3 ARAMS Symptom Table — The user may define an optional table of common human-observable symptoms
called the ARAMS Symptom Table, with a table type of “TableARAMSSymptom”. The row of this table is defined
in Table 5 below.
Table 5 Table 5 ARAMS Symptom Table Row Definition
Column Header Data Element Definition Form
“ID” Identifier of ARAMS symptom. Unsigned integer.
“Indicator” First one to four characters of ARAMS code to which symptom may be
applied.
Formatted text. 1 to 4 characters.
(See Sections 9.2–9.3.)
“Text” Brief description of ARAMS symptom. Text. Maximum length is 80
characters.
1.16.8 Each table row consists of three items: a symptom identifier, an ARAMS substate indicator, and a text string
describing the symptom.
1.16.9 The symptom identifier and text are analogous to the equipment’s alarm or exception identifier and
corresponding text description. The identifier and text should each be unique. A symptom identifier with a value of
zero is reserved to indicate “no symptom”.
1.16.10 The substate indicator consists of the first one to four characters of an ARAMS Substate Code and
indicates the ARAMS state or state/substate where the symptom is to be applied. For example, a symptom that is to
be applied whenever the user requests a change to the UNSCHEDULED DOWNTIME state, including any of its
substates, is assigned an indicator of “5”. A symptom that is to be applied in any case of “UDT/change of
consumable” would use an indicator of “55” as the first two digits of the corresponding ARAMS code.
1.16.11 Whenever the operator requests a change in the ARAMS state or substate, the operator shall be presented
with the text descriptions from the appropriate Symptom Table. The text description of the selection is placed in the
status variable SymptomText, and the corresponding identifier is placed in SymptomID.
11 ARAMS Data
1.17 This section defines the data requirements for ARAMS. This includes requirements for retaining data across a
powerdown or reset. Data retention requirements are classified for each item of ARAMS data in one of the
following ways:
Class 1 — A “soft” value that is reset to a default value as part of system initialization (e.g., DowntimeAlarm)
Class 2 — A “hard” value that never changes (e.g., “EqpSerialNum”)
Class 3 — A “firm” value that changes infrequently and is to be retained in non-volatile memory (e.g.,
“EqpName”)
Class 4 — A “dynamic” value that is retained in non-volatile memory and changes whenever an ARAMS state
transition occurs.
Class 5 — A “very dynamic” value that may change rapidly and is important to retain but does not require absolute
accuracy (e.g., CycleCtr for high throughput equipment). Current values shall be saved in non-volatile memory
periodically at least once per minute.
1.17.1 Except where otherwise specified, data is assumed to be Class 1.
1.17.2 Variables within each section are presented in alphabetical order.
SEMI E58-0703 © SEMI 1997, 2003
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11.1 Status Information — Status data is information
that is maintained by equipment and in general cannot
be changed by the host. This section defines specific
elements of status data that the user is able to read upon
request and that may be included in event report
messages to the host.
1.17.3 A mechanism shall be provided for the user to
read these values.
1.17.4 All date/time values are text strings with a
timestamp format (see Section 4).
NOTE 16: The timestamp format is not a requirement for
clock precision.
NOTE 17: Subsequent references to subsections of 11.2
below are using the original numbers.
11.1.1 ARAMSInfo — Additional information set or
cleared by the equipment at the time an ARAMS state
transition occurs. Optional. Form: text. 0–80 characters.
11.1.2 ARAMSState — The ARAMS Substate Code
corresponding to the ARAMS state/substate that
became active following the most recent ARAMS state
transition. When an ARAMS state transition occurs,
ARAMSState is the specific code representing the new
ARAMS state/substate. It shall be retained as Class 4
data. The value of “0000” is prohibited. Form:
formatted alphanumeric text. 4 characters.
11.1.3 ARAMSText — The descriptive text
corresponding to the code in ARAMSState. Form: text.
5–80 characters.
11.1.4 Clock — Contains the current value of the date
and time at the equipment. When included in an event
report, Clock represents the timestamp for the
occurrence of the event. Clock may represent the
current value of a real-time date/time clock available
upon demand. Form: formatted text.
11.1.5 CycleCtr — The number of cycles (equipment
cycles) during the lifetime of the equipment (not
resettable). It shall be retained as Class 5 data. Form:
unsigned integer.
NOTE 18: See SEMI E10 for a formal definition of cycle.
11.1.6 DowntimeAlarm — Identifier of the most recent
alarm or exception triggering an equipment-initiated
transition to SCHEDULED DOWNTIME or
UNSCHEDULED DOWNTIME from the PRODUC-
TIVE or STANDBY states. This value is reset to zero
for all other ARAMS state transitions to indicate “no
associated alarm/exception”. Form: unsigned integer.
11.1.7 DowntimeAlarmText — Text associated with
DowntimeAlarm. This value is cleared (set to a zero-
length string) for all ARAMS state transitions except
the transition to SCHEDULED DOWNTIME or UN-
SCHEDULED DOWNTIME from the PRODUCTIVE
or STANDBY states. Form: text. 0–80 characters.
11.1.8 DowntimeData — Text associated with tran-
sitions to, or within, the SCHEDULED or UNSCHED-
ULED DOWNTIME states. For transitions following
powerup/reset (see Section 8.5.2), the value in Down-
timeData shall be set to “Power Loss”. This value is
reset to a zero length (empty) string for other ARAMS
state transitions. When associated with equipment initi-
ated transitions, this may be used to carry fault infor-
mation (e.g., the component serial number of a repaired
component, as defined by the equipment supplied).
When associated with operator-initiated transitions, it
may consist of comments entered at the equipment’s
control panel. Form: text. 0–256 characters.
11.1.9 LastPowerdown — Contains a date/time time-
stamp that estimates the time when the last loss of
power or reset occurred (Transition 11), based on the
value in PowerdownTime on powerup. It shall be
retained as Class 3 data. Form: formatted text.
11.1.10 PowerdownTime — Contains a date/time
timestamp used as an estimate for the timestamp for
loss of power or reset and used for reports associated
with ARAMS state Transition 11. It shall be retained as
Class 5 data. Form: formatted text.
11.1.11 PrdState — The ARAMS code corresponding
to the last user-specified ARAMS Substate Code for
PRODUCTIVE. Used as the default substate for
PRODUCTIVE. Initialized to “1000” at Transition 1.
Form: formatted alphanumeric text. 4 characters.
11.1.12 PrevARAMSState — The ARAMS code
corresponding to the ARAMS state/substate that was
active immediately preceding the most recent ARAMS
state transition. This value is useful for
resynchronization after a period of inability to
communicate. It shall be retained as Class 4 data. Form:
formatted alphanumeric text. 4 characters.
11.1.13 SymptomID — A numeric identifier of a
symptom selected by the user when requesting the
equipment to change states. A value of zero is
equivalent to a selection of “no symptom”. Form:
unsigned integer.
11.1.14 SymptomText — The descriptive text for the
symptom selected by the user when requesting the
equipment to change states. A zero-length string
corresponds to a selection of “no symptom”. Form: text.
0–80 characters.
11.2 Constant Data — Equipment shall provide and
maintain the following values as class 2 data. These
values are set by the equipment manufacturer and shall
not be changeable by the user. These data elements are
required for equipment with formally defined
SEMI E58-0703 © SEMI 1997, 2003 21
components that are also ARAMS compliant, such as
clustertools. This data is used for event reports, to
identify the original source of the event.
11.2.1 EqpModel — A text string containing the
equipment model. Form: 1–80 characters.
11.2.2 EqpSerialNum — A text string containing the
product serial number assigned by the supplier. Form:
1–80 characters.
11.3 User-Configurable Data — The data elements in
this section shall be settable by both the operator and
the host. They shall be retained as Class 3 data.
11.3.1 EngInterrupt (optional) — A Boolean value that
enables (TRUE) or disables (FALSE) equipment-
initiated transitions from ENGINEERING to
UNSCHEDULED DOWNTIME (Transition 14 in
Figure 2) when a fault condition is detected. This
variable is required if EngRecovery is supported. Form:
Boolean.
11.3.2 EngRecovery (optional) — A Boolean value
that enables (TRUE) or disables (FALSE) automatic
recovery returning to ENGINEERING from
UNSCHEDULED DOWNTIME (Transition 15 in
Figure 2) following an equipment-detected fault that
has spontaneously cleared. Form: Boolean.
11.3.3 EqpName (required) — A text string
representing the user-assigned logical name of the
equipment. Form: 1–80 characters.
NOTE 19: For OSS-compliant equipment, this corresponds
to the ObjID attribute of the object “Agent”, “PM”, “CM”, or
“TM” in other standards.
11.3.4 PowerupState (optional) — A text character
indicating the powerup (default entry) state when a
powerdown occurs during manufacturing time. May be
either “2” for STANDBY or “5” for UNSCHEDULED
DOWNTIME.
11.3.5 PrdRecovery (optional) — A boolean value that
enables (TRUE) or disables (FALSE) the equipment-
initiated return to PRODUCTIVE (Transition 6 in
Figure 2) following an equipment-detected fault that
has cleared without operator intervention. Form:
boolean.
11.3.6 SbyRecovery (optional) — A boolean value that
enables (TRUE) or disables (FALSE) the equipment-
initiated return to STANDBY (Transition 8 in Figure 2)
following an equipment-detected fault that has cleared.
Form: boolean.
11.3.7 SubstateSelect (optional) — A Boolean value
that enables (TRUE) or disables (FALSE) equipment-
initiated selection of substates of STANDBY and
PRODUCTIVE (including Transitions 12 and 13).
Form: Boolean.
11.4 Accumulators — This section defines a set of
optional accumulators that either count time in one of
the six basic SEMI E10 states or count interruptions
occurring in the PRODUCTIVE state. It shall be
possible for both the operator and host to (1) adjust the
values in the individual accumulators, and (2) reset all
seven values to zero simultaneously. Operator and host
assume responsibility for the edited values and their
accuracy. Equipment shall not impose restrictions on
the modified values.
1.17.5 In addition, two timestamps are required for
support of the accumulators. These timestamps shall not
be changed by the user.
1.17.5.1 Where accumulators are supported, the
variables defined in this section shall be supported as a
set as Class 4 data.
1.17.5.2 The time accumulators are reported in
minutes with an accuracy of ± one minute. Internal
representations of the accumulators in smaller units
may be required for short processes.
11.4.1 ARAMSAccumReset — The timestamp of when
the following seven accumulators were last reset to
zero. Form: formatted numeric text.
11.4.2 ARAMSTimestamp — The timestamp of the
most recent ARAMS state change to the state identified
in ARAMSState. This value is updated whenever a
transition to a new ARAMS state occurs and is used in
conjunction with PowerdownTime to update the
accumulators following a powerup or reset. Form:
formatted numeric text.
11.4.3 EngTime — Time in ENGINEERING.
11.4.4 InterruptionPrd — The number of transitions to
UNSCHEDULED DOWNTIME from PRODUCTIVE.
NOTE 20: This includes the equipment-initiated Transition 5,
a user-initiated transition covered by Transition 10, and the
powerdown Transition 11, when occurring from
PRODUCTIVE.
11.4.5 InterruptionTotal — The total number of
transitions to UNSCHEDULED DOWNTIME from
any state. This includes equipment-initiated transitions
and user-initiated transitions.
11.4.6 NSTime — Time in NON-SCHEDULED TIME.
11.4.7 PrdTime — Time in PRODUCTIVE.
11.4.8 SbyTime — Time in STANDBY.
11.4.9 SDTime — Time in SCHEDULED
DOWNTIME.