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SEMI E54.15-0305 © SEMI 2005 12 7.10 Actuat or-AO Object (Aao) –– The presentat ion of the Actuator Analog Out put (Actuator-AO) object instanc e attributes and services are as indicated in Table 11. Table 11 Actuator-AO…

SEMI E54.15-0305 © SEMI 2005 11
Services
ID Service Name CDM Tag
01 Reset SbiS1
03 Abort SbiS2
05 Recover SbiS3
25 Operate SbiS4
07 GetAttribute SbiS5
09 SetAttribute SbiS6
27 RestoreDefault SbiS7
7.9 Sensor-BI-TH Object (Sbith) –– The presentation of the Sensor Binary Input Threshold (Sensor-BI-TH) object
instance attributes and services are as indicated in Table 10.
Table 10 Sensor-BI-TH Object Instance Attributes and Services
Sensor-BI (Sbith)
Class ID = 40, Instance ID = 01 through m
Attributes
ID Attribute Name CDM Tag
01 Name SbiA1
02 Status SbiA2
03 Alarm Enable SbiA3
04 Warning Enable SbiA4
16 Value SbiA16
17 ReportInhibitTimer SbiA17
18 EnableReportRate SbiA18
19 ReportRate SbiA19
64 DebounceControl SbiA64
65 AlarmState SbiA65
66 WarningState SbiA66
67 Reading Valid SbithA64
68 State SbithA65
69 Status SbithA66
Services
ID Service Name CDM Tag
01 Reset SbiS1
03 Abort SbiS2
05 Recover SbiS3
25 Operate SbiS4
07 GetAttribute SbiS5
09 SetAttribute SbiS6
27 RestoreDefault SbiS7

SEMI E54.15-0305 © SEMI 2005 12
7.10 Actuator-AO Object (Aao) –– The presentation of the Actuator Analog Output (Actuator-AO) object instance
attributes and services are as indicated in Table 11.
Table 11 Actuator-AO Object Instance Attributes and Services
Actuator-AO (Aao)
Class ID = 36, Instance = 01 through n
Attributes
ID Attribute Name CDM Tag
01 Name AaoA1
02 Status AaoA2
03 Alarm Enable AaoA3
04 Warning Enable AaoA4
16 Setting AaoA16
17 SafeState AaoA17
18 WatchRate AaoA18
19 Watchdog AaoA19
64 Offset AaoA64
65 Gain AaoA65
66 DataType AaoA66
67 DataUnits AaoA67
Services
ID Service Name CDM Tag
01 Reset AaoS1
03 Abort AaoS2
05 Recover AaoS3
25 Operate AaoS4
07 GetAttribute AaoS5
09 SetAttribute AaoS6
27 RestoreDefault AaoS7
7.11 Actuator-EO Object (Aeo) –– The presentation of the Actuator Enumerated Output (Actuator-EO) object
instance attributes and services are as indicated in Table 12.
Table 12 Actuator-EO Object Instance Attributes and Services
Actuator-EO (Aeo)
Class ID = 37, Instance ID = 01 through o
Attributes
ID Attribute Name CDM Tag
01 Name AeoA1
02 Status AeoA2
03 Alarm Enable AeoA3
04 Warning Enable AeoA4
16 Setting AeoA16
17 SafeState AeoA17
18 WatchRate AeoA18
19 Watchdog AeoA19

SEMI E54.15-0305 © SEMI 2005 13
Services
ID Service Name CDM Tag
01 Reset AeoS1
03 Abort AeoS2
05 Recover AeoS3
25 Operate AeoS4
07 GetAttribute AeoS5
09 SetAttribute AeoS6
27 RestoreDefault AeoS7
7.12 Actuator-BO Object (Abo) –– The presentation of the Actuator Binary Output (Actuator-BO) object instance
attributes and services are as indicated in Table 13.
Table 13 Actuator-BO Object Instance Attributes and Services
Actuator-BO (Abo)
Class ID = 38, Instance ID = 01 through p
Attributes
ID Attribute Name CDM Tag
01 Name AboA1
02 Status AboA2
03 Alarm Enable AboA3
04 Warning Enable AboA4
16 Setting AboA16
17 SafeState AboA17
18 WatchRate AboA18
19 Watchdog AboA19
Services
ID Service Name CDM Tag
01 Reset AboS1
03 Abort AboS2
05 Recover AboS3
25 Operate AboS4
07 GetAttribute AboS5
09 SetAttribute AboS6
27 RestoreDefault AboS7