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SEMI E5-1104 © SEMI 1982, 2004 45 Name Format Description Value s Class PPChangeName 10, 20 The PPID which was affected upon the event of the creation, editing, or deletion of a Process Program local to the equipment. If…

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SEMI E5-1104 © SEMI 1982, 2004 44
Name Format Description Values Class
EventLimit 0, 10,
11, 20,
21, 3(),
4(), 5()
Used with the Limits Monitoring
capability, it contains the
LIMITID of the limit reached or
crossed by LimitVariable. Since
multiple zone transitions for a
variable may occur
simultaneously (e.g., due to
identical limit definitions or a
slow data sampling rate),
EventLimit has been defined to
allow for a list of LIMITIDs.
DVVAL
InterruptionCtr 5() The number of transitions to
UNSCHEDULED DOWNTIME
from PRODUCTIVE
ECV
LastPowerdown 20 Timestamp estimate of when the
last powerdown or reset occurred.
Uses format defined for CLOCK.
SV
LimitVariable This variable contains the VID for
the variable whose value changed
monitoring zones
DVVAL
MaxSpoolTransmit 54 The maximum number of
messages which the equipment
will transmit from the spool in
response to an S6,F23 “Transmit
Spooled Messages” request. If
MaxSpoolTransmit is set to zero,
no limit is placed on the messages
sent from the spool. Multi-block
inquire/grant messages are not
counted in this total.
ECV
NSTime 5() Accumulation of time in NON-
SCHEDULED TIME, reported in
minutes
ECV
OperatorCommand 5() This data variable is valid in the
event the operator issues a
command to the equipment. The
codes for this variable are
equipment-dependent.
DVVAL
OverWriteSpool 11 This Equipment Constant is used
to indicate to the equipment either
to overwrite data in the spool area
or to stop spooling whenever the
spool area limits are exceeded
= TRUE to overwrite spooled
data
= FALSE to stop spooling when
limits exceeded
ECV
PowerdownTime 20 This timestamp is periodically
updated based on an interval set
by the user. It is used to
determine the approximate time
that the equipment went down in
the event of a power loss. Uses
format defined for CLOCK.
SV
PowerupState 20 Specifies the powerup ARAMS
state when powerdown occurs
during manufacturing time.
Single text digit.
2 = STANDBY
5 = UNSCHEDULED DOWNTIME
SV
SEMI E5-1104 © SEMI 1982, 2004 45
Name Format Description Values Class
PPChangeName 10, 20 The PPID which was affected
upon the event of the creation,
editing, or deletion of a Process
Program local to the equipment.
If the PPID Data Item is also
defined and implemented for the
equipment, then the values for
PPChangeName are subject to the
same format restrictions defined
for the PPID Data Item.
DVVAL
PPChangeStatus 51 The action taken on the Process
Program named in
PPChangeName. This variable is
valid upon the event of the
creation, editing, or deletion of a
Process Program local to the
equipment.
1 = Credited
2 = Edited
3 = Deleted
4-63 Reserved
DVVAL
PPError 20 Contains information about a
failure to verify a text process
program
SV or
DVVAL
PPExecName 0, 10,
20
The PPID(s) of the currently
selected Process Program(s). The
selection of a new Process
Program updates this variable. If
multiple Process Programs can be
selected, then this variable is a list
of PPIDs. If the PPID Data Item
is also defined and implemented
for the equipment, then the values
for PPExecName are subject to
the same format restrictions
defined for the PPID Data Item.
SV
SEMI E5-1104 © SEMI 1982, 2004 46
Name Format Description Values Class
PPFormat 51 Indicates the type or types of
process programs and recipes that
are supported
1 = Unformatted process
programs
2 = Formatted process programs
3 = Both unformatted and
formatted process programs
4 = Execution Recipes
5 = Large unformatted process
programs
6 = Large formatted process
programs
7 = Both large unformatted and
large formatted process
programs
8 = Large execution recipes
9 = Both execution recipes and
large execution recipes
10 = Both unformatted and large
unformatted process programs
11 = Both formatted and large
formatted process programs
12 = Both unformatted and large
formatted process programs
13 = Both formatted and large
unformatted process programs
14 = Unformatted, large
unformatted and large formatted
process programs
15 = Formatted, large
unformatted and large formatted
process programs
16 = Formatted, unformatted,
large unformatted, large
formatted process programs
>16 Reserved
SV
PrdRecovery 11 A boolean value that enables
(TRUE) or disables (FALSE) the
equipment-initiated return to
PRODUCTIVE from
UNSCHEDULED DOWNTIME.
ECV
PrdState 20 Default ARAMS Substate Code
for automated transitions to
PRODUCTIVE
SV
PrdTime 5() Accumulation of time in
PRODUCTIVE, reported in
minutes
ECV
PrevARAMSState 20 The ARAMS code corresponding
to the previous state/substate.
Four characters.
SV
PreviousProcessState 51 The previous processing state of
the equipment, before the most
recent process state change
0-63 Reserved
SV
ProcessState 51 The current processing state of the
equipment
0-63 Reserved
SV
RcpChangeName 20 The identifier of the recipe
affected upon the event of the
creation, editing, or deletion of a
recipe
DVVAL