semi合集-English.pdf - 第1224页
SEMI E5-1104 © SEMI 1982, 2004 166 Figure 9 Wafer Map Transmi tted by Equipment
SEMI E5-1104 © SEMI 1982, 2004 165
Figure 7
Wafer Rotation on Film Frame
Figure 8
Orientation Reference and Index Determination
SEMI E5-1104 © SEMI 1982, 2004 166
Figure 9
Wafer Map Transmitted by Equipment
SEMI E5-1104 © SEMI 1982, 2004 167
Figure 10
Wafer Map Received by Equipment
10.17 Stream 13 Data Set Transfers — This stream
provides protocols to transfer data sets between sys-
tems. It is not intended to provide a general file access
mechanism.
10.17.1 Data Set Characteristics — The data set may
reside on the host or the equipment.
10.17.1.1 The term data set is used in a very general
sense. A data set may represent a file, a data structure
in memory, a collection of sensor values, or high
density wafer profile data. The protocols define only
the way data is sent from one system to another and do
not define how the data set is stored by either the host
or equipment.
10.17.1.2 The sending system is defined to be the
system that has the data set. The receiving system is
defined to be the system to which the data set is being
transferred. The host or the equipment may assume
either role.
10.17.2 Unformatted Data Set Protocol — The proto-
col for transferring unformatted data sets has the fol-
lowing characteristics:
1. Information about the record structure of the data
set may be available.
2. ASCII records are transferred without the record
terminating “noise” characters used by some
operating systems.
3. Data sets do not need to be transferred in a single
message.
4. No arbitrary limits are imposed on the length of
one message. The maximum amount of data sent
in each message is determined by both the sending
and receiving systems, so there can be no data
overruns.
5. There is a method of restarting a transfer in the
event of an interruption.