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SEMI S2-0703a E © SEMI 1991, 2004 2 Appendix 6 — Fire Protection: Flowc hart for Selecting Materials of Construction NOTICE: A new Appendix will be added (in numerical order) upon July 1, 2006 publication as shown in Del…

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SEMI S2-0703a
E
© SEMI 1991, 2004 1
SEMI S2-0703a
E
ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR
SEMICONDUCTOR MANUFACTURING EQUIPMENT
This safety guideline was technically approved by the Global Environmental, Health, and Safety Committee
and is the direct responsibility of the North American Environmental, Health, and Safety Committee. Current
edition approved by the North American Regional Standards Committee on April 11, 2003. Initially available
on www.semi.org June 2003; to be published July 2003. Originally published in 1991; previously published
in March 2003.
E
This standard was modified in September 2004 to correct editorial errors. Changes were made to Notices
preceding Sections 1 and 11.6.
NOTICE: This document contains material that has
been balloted and approved by the SEMI
Environmental Health and Safety Committee, but is
not immediately effective. This material and the
date on which it becomes effective are included in
Delayed Revisions Sections 1 and 2. The provisions
of this information are not an authoritative part of
the document until their effective dates. The main
body of SEMI S2-0703 remains the authoritative
version. Some or all of the provisions of revisions
not yet in effect may optionally be applied prior to
the effective date, providing they do not conflict with
portions of the authoritative version other than
those that are to be revised or replaced as part of the
deferred change, and are labeled accordingly.
Material that is to be replaced by revisions that are
not yet in effect is preceded by a NOTICE indicating
its status.
1 Purpose
1.1 This safety guideline is intended as a set of
performance-based environmental, health, and safety
(EHS) considerations for semiconductor manufacturing
equipment.
2 Scope
2.1 Applicability — This guideline applies to
equipment used to manufacture, measure, assemble,
and test semiconductor products.
2.2 Contents — This document contains the following
sections:
1. Purpose
2. Scope
3. Limitations
4. Referenced Standards
5. Terminology
6. Safety Philosophy
7. General Provisions
8. Evaluation Process
9. Documents Provided to User
10. Hazard Warning Labels
11. Safety Interlock Systems
12. Emergency Shutdown
13. Electrical Design
14. Fire Protection
15. Heated Chemical Baths
16. Ergonomics and Human Factors
17. Hazardous Energy Isolation
18. Mechanical Design
19. Seismic Protection
20. Automated Material Handlers
21. Environmental Considerations
22. Exhaust Ventilation
23. Chemicals
24. Ionizing Radiation
25. Non-Ionizing Radiation and Fields
26. Lasers
27. Sound Pressure Level
28. Related Documents
Appendix 1 — Enclosure Openings
Appendix 2 — Design Principles and Test Methods for
Evaluating Equipment Exhaust Ventilation
Appendix 3 — Design Guidelines for Equipment Using
Liquid Chemicals
Appendix 4 — Ionizing Radiation Test Validation
Appendix 5 — Non-Ionizing Radiation (Other than
Laser) and Fields Test Validation
SEMI S2-0703a
E
© SEMI 1991, 2004 2
Appendix 6 — Fire Protection: Flowchart for Selecting
Materials of Construction
NOTICE: A new Appendix will be added (in
numerical order) upon July 1, 2006 publication as
shown in Delayed Revisions Section 1. The EH&S
Committee has voted that addition of this Appendix
section is OPTIONAL before the Effective Date.
2.3 Precedence of Sectional Requirements — In the
case of conflict between provisions in different sections
of this guideline, the section or subsection specifically
addressing the technical issue takes precedence over the
more general section or subsection.
NOTICE: This safety guideline does not purport to
address all of the safety issues associated with its use.
It is the responsibility of the users of this safety
guideline to establish appropriate safety and health
practices and determine the applicability of regulatory
or other limitations prior to use.
3 Limitations
3.1 This guideline is intended for use by supplier and
user as a reference for EHS considerations. It is not
intended to be used to verify compliance with local
regulatory requirements.
3.2 It is not the philosophy of this guideline to provide
all of the detailed EHS design criteria that may be
applied to semiconductor manufacturing equipment.
This guideline provides industry-specific criteria, and
refers to some of the many international codes,
regulations, standards, and specifications that should be
considered when designing semiconductor
manufacturing equipment.
3.3 Existing models and subsystems should continue to
meet the provisions of SEMI S2-93A. Models with
redesigns that significantly affect the EHS aspects of
the equipment should conform to the latest version of
SEMI S2. This guideline is not intended to be applied
retroactively.
3.4 In many cases, references to standards have been
incorporated into this guideline. These references do
not imply applicability of the entire standards, but only
of the sections referenced.
4 Referenced Standards
NOTICE: New Referenced Standards will be added
(in alphabetical or numerical order as appropriate)
upon July 1, 2006 publication as shown in Delayed
Revisions Section 1. The EH&S Committee has
voted that implementation of the information is
OPTIONAL before the effective date.
4.1 SEMI Standards
SEMI E6 — Facilities Interface Specifications
Guideline and Format
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F14 — Guide for the Design of Gas Source
Equipment Enclosures
SEMI F15 — Test Method for Enclosures Using Sulfur
Hexafluoride Tracer Gas and Gas Chromatography
SEMI S1 — Safety Guideline for Equipment Safety
Labels
SEMI S3 — Safety Guideline for Heated Chemical
Baths
SEMI S6 — Safety Guideline for Ventilation
SEMI S7 — Safety Guidelines for Environmental,
Safety, and Health (ESH) Evaluation of Semiconductor
Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing
Equipment
SEMI S9 — Safety Guideline for Electrical Design
Verification Tests for Semiconductor Manufacturing
Equipment
SEMI S10 — Safety Guideline for Risk Assessment
SEMI S12 — Guidelines for Equipment
Decontamination
SEMI S13 — Safety Guidelines for Operation and
Maintenance Manuals Used with Semiconductor
Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk
Assessment and Mitigation for Semiconductor
Manufacturing Equipment
4.2 ANSI Standards
1
ANSI/IEEE C95.1 — Standard for Safety Levels with
Respect to Human Exposure to Radio Frequency
Electromagnetic Fields, 3 kHz to 300 GHz
ANSI/RIA R15.06 — Industrial Robots and Robot
Systems -- Safety Requirements
ANSI/ISA S84.01 — Application of Safety
Instrumented Systems for the Process Industry
4.3 CEN/CENELEC Standards
2
1 American National Standards Institute, New York Office: 11 West
42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;
Fax: 212.398.0023 Website: www.ansi.org
2 European Committee for Standardization (CEN)/European
Committee for Electrotechnical Standardization (CENELEC), Central
Secretariat: rue de Stassart 35, B-1050 Brussels, Belgium
SEMI S2-0703a
E
© SEMI 1991, 2004 3
EN 775 — Manipulating industrial robots--Safety
EN 1050 — Safety of Machinery--Risk Assessment
EN 1127-1 — Explosive atmospheres -- Explosion
prevention and protection -- Part 1: Basic concepts and
methodology
4.4 DIN Standards
3
DIN V VDE 0801 — Principle for Computers in
Safety-Related Systems
4.5 IEC Standards
4
IEC 61010-1 — Safety Requirements for Electrical
Equipment for Measurement, Control, and Laboratory
Equipment, Part 1: General Requirements
IEC 61508 — Functional Safety of
Electrical/Electronic/Programmable Electronic Safety-
Related Systems
4.6 ISO Standards
5
ISO 10218 — Manipulating industrial robots—Safety
ISO 13849-1 (EN 954-10) — Safety of Machinery -
Safety-Related Parts of Control Systems
4.7 NFPA
6
Standards
NFPA 12 — Standard on Carbon Dioxide
Extinguishing Systems
NFPA 13 — Standard for Installation of Sprinkler
Systems
NFPA 72 — National Fire Alarm Code
NFPA 497 — Recommended Practice for the
Classification of Flammable Liquids, Gases, or Vapors
and of Hazardous (Classified) Locations for Electrical
Installations in Chemical Process Areas
NFPA 704 — Identification of the Fire Hazards of
Materials
NFPA 2001 — Standard on Clean Agent Fire
Extinguishing Systems
4.8 Other Standards and Documents
ACGIH, Industrial Ventilation Manual
7
3 Available from Deutches Institut für Normung e.V., Beuth Verlag
GmbH, Burggrafenstrasse 4-10, D-10787 Berlin, Germany, website:
www.din.de
4 International Electrotechnical Commission, 3, rue de Varembé,
Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:
41.22.919.02.11; Fax: 41.22.919.03.00 Website: www.iec.ch
5 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30
Website: www.iso.ch
6 National Fire Protection Association, 1 Batterymarch Park, Quincy,
MA 02269, Website: www.nfpa.org
ASHRAE Standard 110 — Method of Testing
Performance of Laboratory Fume Hoods
8
Burton, D.J., Semiconductor Exhaust Ventilation
Guidebook
9
Uniform Building Code
™
(UBC)
10
Uniform Fire Code
™11
NOTICE: As listed or revised, all documents cited
shall be the latest publications of adopted standards.
5 Terminology
NOTICE: New Acronyms and Definitions will be
added in alphabetical order to the Terminology
Section upon July 1, 2006 publication as shown in
Delayed Revisions Sections 1 and 2. The EH&S
Committee has voted that implementation of the
information is OPTIONAL before the effective date.
5.1 Abbreviations and Acronyms
5.1.1 ACGIH
®
— American Conference of
Governmental Industrial Hygienists (ACGIH is a
registered trademark of the American Conference of
Governmental Industrial Hygienists.)
5.1.2 ASHRAE — American Society of Heating,
Refrigeration, and Air Conditioning Engineers
5.2 Definitions
5.2.1 abort switch — a switch that, when activated,
interrupts the activation sequence of a fire detection or
fire suppression system.
5.2.2 accredited testing laboratory — an independent
organization dedicated to the testing of components,
devices, or systems; competent to perform evaluations
based on established safety standards; and recognized
by a governmental or regulatory body.
5.2.3 baseline — for the purposes of this document,
“baseline” refers to operating conditions, including
process chemistry, for which the equipment was
designed and manufactured.
5.2.4 breathing zone — imaginary globe, of 600 mm
(two foot) radius, surrounding the head.
7 ACGIH, 1330 Kemper Meadow Road, Cincinnati, Ohio 45240,
USA, www.acgih.org
8 ASHRAE, 1791 Tullie Circle, NE, Atlanta, Georgia 30329, USA,
www.ashrae.org
9 IVE, Inc., 2974 South Oakwood, Bountiful, Utah 84010, USA,
www.eburton.com
10 International Conference of Building Officials, 5360 Workman
Mill Road, Whittier, California 90601-2298, USA, www.icbo.org
11 International Fire Code Institute, 5360 Workman Mill Road,
Whittier, California 90601-2298, USA, www.ifci.org