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SEMI E115-0302 E © SEMI 2002 7 RF out R AB Port 2 Port 1 Port 1 Port 2 Perform Calibrations at End of A dditional Test Cables RLOSS L C2 C1 Load Simulator Input Connection Outpu t Connec tion Matching Network Netw ork An…

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10.2 Report the matching network load impedance and efficiency as a function of tuning element positions. The
data shall be presented in both graphical and tabular forms.
11 Related Documents
11.1 IEEE Standards
1
IEEE-STD-572 — IEEE Standard for Qualification of Class 1E Connection Assemblies for Nuclear Power
Generating Stations
11.2 Military Standards
2
MIL-PRF-31031A — General Specification for Connectors, Electrical, Plugs and Receptacles, Coaxial, Radio
Frequency, High Reliability, for Flexible and Semirigid Cables.
MIL-STD-348 — General Specification for Radio Frequency Connector Interfaces.
MIL-STD-220B — Test Method Standard: Method of Insertion Loss Measurement.
RF out R
AB
Port 2Port 1
Port 1
RLOSS
LC2
C1
Input Connection
Output Connection
Matching Network
Port 2
Perform Calibrations
at End of Additional
Test Cables
Network
Analyzer
NOTE 1: Both the Port 1 and Port 2 outputs need to be used for the measurement. Additional test cables are needed for the
transmission calibration between the two ports. The output connection of the matching network to be tested (DUT) attaches to
Port 1 and the input connection of the matching network attaches to Port 2 of the Network Analyzer.
Figure 1
Schematic of the Test Method 1 Network Analyzer Test Setup for the Load Impedance and Efficiency
Measurement for “L” Type Matching Networks
SEMI E115-0302
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© SEMI 2002 7
RF out R
AB
Port 2Port 1
Port 1
Port 2
Perform Calibrations
at End of Additional
Test Cables
RLOSS
LC2
C1
Load Simulator
Input Connection
Output Connection
Matching Network
Network
Analyzer
NOTE 1: Both the Port 1 and Port 2 outputs need to be used for the measurement and additional test cables are needed for the
transmission calibration between the two ports. The input connection of the matching network to be tested (DUT) attaches to
Port 1, the output connection of the matching network attaches to the input of the Load Simulator, and the output of the Load
Simulator attaches to Port 2 of the Network Analyzer.
Figure 2
Schematic of the Test Method 2 Network Analyzer Test Setup for the Load Impedance and Efficiency
Measurement
SEMI E115-0302
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0.0
2.0
4.0
6.0
8.0
10.0
0246810
Real Load Impedance (ohms)
Load Position (volts)
Tune Position Fixed at 5.0 Volts
NOTE 1: For this example, the full-scale voltage for both the Tune and Load Positions is 10 V (i.e., Tune = 5.0 V corresponds to
50% of full scale).
Figure 3
Example Plot of the Real Part of the Load Impedance as a Function of the Load Position Tuning Element in
the Matching Network
-35.0
-30.0
-25.0
-20.0
-15.0
-10.0
0246810
Tune = 3.0 volts
Tune = 5.0 volts
Tune = 7.0 volts
Reactive Load Impedance (ohms)
Load Position (volts)
NOTE 1: The Tune Position is at the indicated fixed value for each set of data. For this example, the full scale voltage for both
the Tune and Load Positions is 10 V (i.e., Tune = 3.0 V corresponds to 30% of full scale).
Figure 4
Example Plot of the Reactive Part of the Load Impedance as a Function of the Load Position Tuning Element
in the Matching Network