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SEMI E127-0705 © SEMI 2003, 2005 38 Table 19 IMM Calibration Data Tabl e Object A tt ribute Definitions Attribute Name Definition Access Reqd Form ObjID Object ID. RO Y Text string assigned by the IMM. ObjType Type of Ob…

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SEMI E127-0705 © SEMI 2003, 2005 37
14.5.2 All subtypes of the IMM Data Table inherit the attributes and state model of the IMM Data Table object.
Additional attributes are also defined for each subtype in the following sections.
14.5.3 IMM Raw Data Table Object
14.5.3.1 The IMM Raw Data Table object holds the sensor-based measurements collected during the physical
measurement process. Table 16 defines the attributes for the IMM Raw Data object.
Table 16 IMM Raw Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y String assigned by IMM.
ObjType Type of Object. RO Y Text = “TableIMM_RawData”.
MeasurementRecipeID Identifies the measurement recipe. RO Y Text.
14.5.4 IMM Converted Data Table Object
14.5.4.1 The IMM Converted Data Table Object holds the data that is converted into information needed for
analysis of the substrate properties for advanced process control and post-mortem problem solving. Its attributes are
defined in Table 17.
Table 17 IMM Converted Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text assigned by the IMM.
ObjType Type of Object. RO Y Text = “TableIMM_ConvertedData”.
ConversionRecipeID Conversion Recipe identifier (may
be the name of the IMM recipe).
RW Y Text.
FeatureType Type of feature extracted. RO Y Enumerated text:
“CD linewidth”
“Thickness”
“Reflectivity”
“GoodnessOfFit”
….
RawDataTable ObjID of IMM Raw Data Table
object.
RO Y Text.
14.5.4.2 Event Variables for Conversion Data Table Objects — Table 18 specifies event variables required for
Conversion Data Table Objects in addition to those defined in Table 15.
Table 18 Event Variables for Conversion Data Table Object
Variable Name Description Type Event Comment
DateTime The date and time that the event
occurred.
Conforms to the clock
format in SEMI E98.
All.
FeatureType Type of feature extracted –
corresponds to the attribute of
the same name.
Enumerated text All events of the
IMMDTSM.
14.5.5 IMM Calibration Data
14.5.5.1 The IMM Calibration Data object is used to hold the results of a formal substrate calibration process
performed on a known good wafer. It includes both expected and actual data. Its attributes are defined in Table 19.
SEMI E127-0705 © SEMI 2003, 2005 38
Table 19 IMM Calibration Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text string assigned by the IMM.
ObjType Type of Object. RO Y Text = “TableIMM_CalibData”.
CalibrationDuration Expected or mean duration of
calibration procedure, in seconds.
RW Y Integer.
CalibrationStatus Indicates whether or not the last
substrate calibration was good.
RO Y Enumerated:
Successful
Failed
CalibrationTimeStamp Date/time when the last calibration
was completed.
RO Y Depends on TimeStampFormat.
RefSubstID Identifier of substrate used for
calibration.
RO Y Text. Null string if no reference substrate
used for calibration.
14.6 IMM Data Table Object Services
14.6.1 Services related to IMM Data Table Objects are provided by the IMM object and are listed in Table 5, ¶11.5.
14.6.2 Scenarios involving IMM Data Table Objects are illustrated in Related Information 1.
15 Data Table Objects
15.1 Data Table Object Model
15.1.1 As shown in Figure 11, a Data Table Object has an associated Data Row Template and a set of Data Rows.
When a table is transferred, it transfers an ordered set of column headers (Data Information ObjIDs) and a set of one
or more rows, where each row consists of one or more individual entries following the order specified by the column
headers. The information in a Data Row Template corresponds to the set of column headers. The ith column
header identifies the type of data in the ith position within a row. The column headers are available both as a list of
headers and as one of the attributes in a DataEntryTemplate.
15.1.2 Individual measurement data themselves have attributes, such as units and data type. These are provided in
the Data Information object. The Data Information provides this additional information about the specified type of
data entry (that is, for a specific column or position within a row). Each Data Row Template uses as many Data
Information objects as there are columns in the table. Any given Data Information may be used by multiple Data
Row Templates, since the specific Data Row Template produced may vary by recipe.
15.1.3 A master Data Row Template provides all available Data Information objects, while a Data Row Template
for a specific measurement table provides only those Data Information objects that are available for a specific table.
For example, one table may provide CD linewidth, while a different table provides film thickness. Specific data
depends on the recipe used.
SEMI E127-0705 © SEMI 2003, 2005 39
1...*
0...*
1...*
Data Row
Row Num: uns igned int eger
TableID: tex t
TableTypeL: text
Data It e m 1: variant
.
Dat aItem n: variant
Data Row Template
DataInfoList: list of text
Data Information
Assurance: list of structures
DataType: text
Description: text
InterdependencyRule: enumer ation
Units: enumeration
Us e: text
ValidityRule: text
1
0...*
describes data
order within
row s
1
Table
DataLength: unsigned integer
NumCols: unsigned integer
NumRow s : unsigned integer
TableRequest
TableSend
Data Table
DataRow TemplateID: text
contains
shows order
within row
Figure 11
Data Table Object Model
15.1.4 Data Table Object Attributes
15.1.5 The attributes of the Data Table Object are defined in Table 20.
Table 20 Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text. Complies with restriction of ObjID in
SEMI E39.
ObjType Type of Object. RO Y Text = “TableData”.
RowTemplateID ObjID of the associated Data Row
Template.
RO Y Text.
15.1.6 The attributes of the Data Row object are defined in Table 21.
Table 21 Data Row Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Numeric text for the row number. Complies
with restrictions of ObjID in SEMI E39.
ObjType Type of Object. RO Y Text = “DataRow”.
DataItem
i
The ith entry within the row. RO Y Any data type except structures (lists of mixed
data types).
RowNum Identifies the row position within its
table.
RO Y Unsigned integer.
RowOwner Identifies the ObjType and ObjID of
the table to which the row belongs.
RO Y Text. Conforms to the format of ObjSpec in
SEMI E39.