semi合集-English.pdf - 第6800页
SEMI S2-0703a E © SEMI 1991, 2004 29 24.3.2 Non-defeatabl e safety interlocks should be provided on barriers prev enting maintenance access to radiation fields in excess of 10 microsieverts ( Sv) or 1 millirem per hour…
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section can be shown by demonstrating ambient air
concentrations to be less than 25% of the OEL, in the
anticipated worst-case personnel breathing zone, during
maintenance activities.
23.5.3 Chemical emissions during equipment failures
should be minimized. Conformance to this section can
be shown by demonstrating ambient air concentrations
to be less than 25% of the OEL, in the anticipated
worst-case personnel breathing zone, during a realistic
worst-case system failure.
NOTE 111: The use of direct reading instrumentation under
simulated operating, maintenance, or failure conditions is the
preferred measurement method. Where used, it is
recommended that the sample location(s) be representative of
the worst-case, realistic exposure locations(s). It is
recommended that the peak concentration be directly
compared to the OEL to demonstrate conformance to Sections
23.5.1–23.5.3.
NOTE 112: It is recommended that integrated sampling
methods be used when direct-reading instrumentation does
not have adequate sensitivity, or when direct-reading
technology is not available for the chemicals of interest.
Where integrated sampling is used, it is recommended that the
sample duration and locations(s) be representative of the
worst-case, realistic, anticipated exposure time and locations.
The resulting average concentration is directly compared to
the OEL to demonstrate conformance to Sections 23.5.1–
23.5.3.
NOTE 113: Tracer gas testing (see SEMI F15 for an
acceptable method) may be used when direct-reading
instrumentation does not have adequate sensitivity, or when
direct-reading technology is not available for the chemicals of
interest. Tracer gas testing should be used where testing
conditions may be hazardous (e.g., system failure simulation
with potential release of hazardous gas to atmosphere). It is
recommended that tracer gas testing be used only when an
accurate rate of chemical emission can be determined. Where
used, it is recommended that the sample location(s) be
representative of the worst-case, realistic exposure location(s).
23.5.4 Chemical emissions outside the enclosure
during a realistic worst-case system failure should be
less than the lower of the following two values: 25% of
the lower explosive limit (LEL), or 25% of the OEL.
23.6 Equipment that uses hazardous gases may require
continuous detection and, if so, should have sample
points mounted in the equipment, or have
recommended sampling points identified in the
equipment installation instructions. Where the gas
supply is part of or controlled by the equipment, the
equipment should be able to accept a signal from an
external monitoring device and shut down the supply of
the gas.
23.7 Appropriate hazard warning labels should be
placed at all chemical enclosure access openings.
24 Ionizing Radiation
24.1 This section covers equipment that produces
ionizing radiation (e.g., X-rays, gamma rays) or uses
radioactive sources.
24.2 Accessible emissions of ionizing radiation should
be designed as low as reasonably achievable. This
criteria can be met by demonstrating conformance to
the provisions in Sections 24.2.1 and 24.2.2 and
Appendix 4.
24.2.1 Accessible levels of ionizing radiation during
normal operations should be less than 2 microsieverts
(0.2 millirem) per hour above background. See also
Table A4-1 of Appendix 4.
24.2.2 Accessible levels of ionizing radiation during
maintenance and service procedures should be less than
10 microsieverts (1 millirem) per hour above
background. See also Table A4-1 of Appendix 4.
24.2.3 Access to radioactive contamination or internal
exposure (e.g., inhalation, ingestion) to radioactive
materials should be minimized. The hazards and
controls for the prevention of personnel contamination
and internal exposures should be detailed in the
operation and maintenance manuals.
NOTE 114: The use of radioactive material is strictly
regulated around the world. Import, export, and transportation
of radioactive materials is also highly regulated. Licenses may
be required to possess, use, and distribute radioactive
materials.
NOTE 115: Many regions require both user and import
licenses, and the timely acquisition of these licenses depends
on the information provided by the equipment supplier.
NOTE 116: Radiation producing machines are also regulated
around the world. Regulations and licensing requirements
may cover activities such as importing, exporting, installing,
servicing and using radiation producing equipment.
24.2.4 The manufacturer should supply, in the user
documentation, a contact phone number and address for
the manufacturer’s radiation safety support personnel.
24.3 Equipment should be designed to minimize access
or exposure to ionizing radiation during normal
operation, maintenance, and service. Potential
exposures should be controlled in the following order of
preference:
24.3.1 Engineering Controls — Engineering controls
(e.g. shielding, interlocks) should be the primary
mechanism to minimize emission of ionizing radiation
or access to ionizing radiation.
24.3.1.1 Radiation shielding for the equipment
facilities connections (e.g., gas and exhaust lines)
should be designed such that removal and replacement
of the shielding during installation is minimized.
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24.3.2 Non-defeatable safety interlocks should be
provided on barriers preventing maintenance access to
radiation fields in excess of 10 microsieverts (Sv) or 1
millirem per hour.
24.3.3 Administrative Controls — When
administrative controls (e.g., distance, time, standard
operating procedures, labeling) are to be used, the
equipment supplier should provide detailed
documentation explaining the use of the administrative
controls.
24.4 Equipment utilizing or producing ionizing
radiation should be labeled appropriately.
NOTE 117: Label contents are typically controlled by
regulation in the country in which the equipment is to be used.
24.5 The manufacturer should conduct an assessment
to document conformance to the criteria specified in
Sections 24.2.1 through 24.2.2 during normal
equipment operation, maintenance, and service.
24.5.1 A radiation survey should be used to confirm
design compliance and serve as a baseline survey (see
also Table A4-1 of Appendix 4).
24.5.2 Measurements should be taken using recognized
methods with documented sensitivities and accuracy. A
report documenting the survey methods, equipment
operating parameters, instrumentation used, calibration
data, source locations, results, and discussion should be
made available.
24.5.3 If supplemental administrative controls are
recommended based on survey results or calculations, a
discussion should be provided in the operations and
maintenance manuals describing the source locations,
radiation levels, and recommended control measures.
NOTE 118: Ionizing radiation sources must be registered or
licensed according to the regulations of the country of
destination. These radiation sources must conform to the
regulations of central or local government agencies,
whichever is stricter.
NOTE 119: It is recommended that equipment containing
radioactive materials should demonstrate conformance to
licensing with local regulatory agencies prior to shipment.
NOTE 120: Equipment that uses particle acceleration in its
process has the potential for generating ionizing radiation as a
result of nuclear interactions between the accelerated particles
and various materials. These materials can include materials
of construction of the equipment, accumulated residual
process materials in the equipment, and the target materials.
25 Non-Ionizing Radiation and Fields
25.1 This section covers equipment that produces non-
ionizing radiation, except laser sources, in the following
categories:
static electric and magnetic (0 Hz),
sub-radio frequency electric and magnetic fields
( < 3 kHz),
radio frequency (3 kHz–300 GHz),
infrared radiation (700 nm–1 mm),
visible Light (400 nm–700 nm), and
ultraviolet Light (180–400 nm).
25.2 Potentially hazardous non-ionizing radiation
emissions that are accessible to any personnel should be
limited to the lowest practical level. This criterion can
be met by demonstrating conformance to the following
provisions:
EXCEPTION: Emissions of non-ionizing radiation
exceeding the cardiac pacemaker limits in Appendix 5
but less than the levels in Sections 25.2.1 and 25.2.2
should be identified with appropriate labeling. See also
Section 25.5.1.
25.2.1 Accessible levels of non-ionizing radiation
during normal operations are less than the Operator-
Accessible Limit (see Appendix 5);
25.2.2 Accessible levels of non-ionizing radiation
during maintenance and service procedures are less
than the Maintenance- and Service-Accessible Limit
(see Appendix 5).
25.3 Sources of potentially hazardous non-ionizing
radiation should be identified in the operation and
maintenance manuals, and appropriate parameters
listed. Parameters include frequency, wavelength,
power levels, continuous wave or pulsed (see also
Appendix 5). If pulsed, parameters also include the
pulse repetition rate, pulse duration, and description of
the pulse waveform.
EXCEPTION: Visible sources which are intended to be
viewed or which provide illumination (e.g., display
panels, visible alarm indicators), and are not lasers, do
not need to be identified.
NOTE 121: It is recommended that UV/IR generators that
are part of fire protection test apparatus, and are provided
with the equipment, be considered as possible sources of
potentially hazardous non-ionizing radiation.
25.4 Equipment should be designed to minimize access
or exposure to non-ionizing radiation during normal
operation, maintenance, and service. Potential
exposures should be controlled in the following order of
preference:
25.4.1 engineering controls (e.g., enclosure, shielding,
guarding, grounding, interlocks);
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25.4.2 administrative controls (e.g., written warnings,
standard operating procedures, labeling); and
25.4.3 personal protective equipment.
25.5 Equipment utilizing or producing potentially
hazardous non-ionizing radiation should be labeled.
25.5.1 Hazard warning labels should be provided by
the manufacturer when emission levels are measured
that may impact cardiac pacemakers or magnetizable
prostheses. These warning labels should be located
where the emissions exceed the pacemaker limit. (See
Appendix 5 for pacemaker labeling levels and
references.)
25.6 The manufacturer should conduct an assessment
to document conformance to the criteria specified in
Sections 25.2.1 and 25.2.2. Engineering calculations
may be used as part of this assessment. All
measurements should be taken using recognized
methods with documented sensitivities and accuracy. A
report documenting the survey methods, equipment
operating parameters, instrumentation used, calibration
data, source location(s), and discussion should be
provided. See Appendix 5.
25.6.1 If supplemental administrative controls are
recommended based on survey results or calculations, a
discussion should be provided in the operations and
maintenance manuals describing the source location(s),
radiation levels, and recommended control measures.
25.6.2 Administrative control procedures
recommended for operation, maintenance, or service
activities should be documented in the operations and
maintenance manuals.
26 Lasers
NOTICE: Section 26 below will be withdrawn upon
July 1, 2006 publication and replaced by the new
Section 26 including: figures and tables as shown in
Delayed Revisions Section 1. The EH&S Committee
has voted that implementation of the information is
OPTIONAL before the effective date.
26.1 Equipment should be identified with a laser
product classification based on the laser energy
accessible during operation, per the applicable standard.
NOTE 122: A Class 1 label may be required in some
jurisdictions, but is not currently required in the United States.
26.1.1 The laser energy (or power), wavelength, and
temporal mode (continuous wave or pulsed) should be
identified in the documentation provided to the user.
NOTE 123: The laser product classification for some
equipment will be Class 1 or 2, even though an embedded
laser is of a higher hazard classification.
26.1.1.1 If pulsed, the pulse repetition rate, pulse
duration and description of the pulse waveform should
be identified in the documentation provided to the user.
26.1.1.2 For Class 3b or 4 embedded laser systems, the
above information and the physical location of the laser
sources within the laser product should be identified in
the documentation provided to the user and in the
maintenance manual.
26.1.2 Equipment should not exceed the laser product
classification of Class 2; however, individual lasers
may exceed this classification prior to integration into
the final equipment assembly.
26.2 Equipment, including beam diagnostic or
alignment tools, should be designed to prevent injury
from all lasers during normal operation, and should
minimize risk of injury during maintenance or service.
Potential exposures should be controlled in the
following order of preference:
26.2.1 Engineering controls (e.g., enclosures,
shielding, filters, use of fiber optics to transmit energy,
interlocks).
26.2.2 Temporary enclosures or control measures for
maintenance, service, and non-routine tasks.
26.2.3 Administrative controls (e.g., written warnings,
standard operating procedures, labeling).
26.2.4 Personal protective equipment.
NOTE 124: Temporary enclosures and personal protective
equipment are considered to be administrative controls,
because they require human action to implement.
NOTE 125: Certain classes of laser products are regulated
around the world. Regulations and licensing requirements
may cover activities such as importing, exporting,
distributing, demonstrating, installing, servicing, and using
these laser products.
26.3 The equipment supplier should provide the
following in the operation and maintenance manuals:
a description of laser-related hazards present
during operation, maintenance, or service, and
methods to minimize the hazard;
justification for any procedures that require a laser
controlled area and the dimensions of this hazard
zone;
administrative controls used in maintenance and
service activities; and
a description of necessary personal protective
equipment.
26.4 The following detailed information should be
available for the evaluator: