semi合集-English.pdf - 第3796页

SEMI F10-0698 © SEMI 199 3, 1998 4 RELATED INFORM A TI ON 1 SA M PLE TEST DATA SHEET NOT E: T his re lated information is not an off icial part of SEMI F10 and is not intended t o modify or supercede the offic ial standa…

100%1 / 7923
SEMI F10-0698 © SEMI 1993, 19983
10 Test Procedure
10.1 Install three fitting connections, assembled per
manufacturer’s specifications, to the test system. Allow
for a minimum of 30 cm (12 in.) of tube length between
the test fitting connection and the free end closure.
10.2 The plumbing must permit free movement of
each test specimen to allow for distortion.
10.3 Using the low pressure circulation system (see
Section 7.1.2), condition the test specimens to 25°C
(77°F) per 9.4. The system pressure is not to exceed 75
kPa (11 psig) during conditioning.
10.4 Properly position the isolation valves in such a
way that only one specimen will be pressure tested,
while the remaining specimens continue to have heated
fluid circulating through them.
WARNING: Take all necessary precautions when
positioning the isolation valves, due to the potential
harm which might be caused by an accidental
exposure to the high temperature fluid.
10.4.1 Test each specimen within two minutes after
isolating it from the hot oil circulation system.
10.5 Using the high pressure system (see Section
7.1.1), pressurize the specimen until failure occurs.
10.5.1 Increase the pressure at a uniform and constant
rate such that failure occurs between 60 to 70 seconds
from initial exposure to the high pressure fluid.
10.6 Record on test data sheet (see Appendix 1 for
sample test data sheet) the pressure and temperature at
which the failure occurred. To identify mode of failure,
record pressure reading under column:
“T” — for tube failure.
“F” — for fitting connection failure.
10.7 Repeat 10.1 through 10.5, substituting, for the
fluid temperature in Section 10.2, the remaining six
temperatures: 75°C (167°F), 100°C (212°F), 125°C
(257°F), 150°C (302°F), 175°C (347°F), and 200°C
(392°F).
11 Calculations
11.1 Calculate the average pressure for each test
temperature and record in kPa (psig).
11.2 Calculate the standard deviation for each test
temperature and record.
12 Data Accuracy
12.1 Pressure — kPa: ± 2%
12.2 Fluid Temperature — ± 1°C (± 2°F)
13 Test Data Sheet
The test data sheet shall include the following
information:
13.1 Date tested.
13.2 Operator and test facility.
13.3 Description of items tested, including:
Tubing — manufacturer, O.D., wall thickness, part
number, and material type.
Fitting — manufacturer, type, size, part number, and
material type.
13.4 The actual temperature for each test.
13.5 The failure pressure for each sample, in the
appropriate column.
13.6 The average and standard deviation for each
failure mode of each specimen.
NOTE: A sample test data sheet is provided as Related
Information 1.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
SEMI F10-0698 © SEMI 1993, 1998 4
RELATED INFORMATION 1
SAMPLE TEST DATA SHEET
NOTE: This related information is not an official part of SEMI F10 and is not intended to modify or supercede the official
standard. It has been derived from industry specifications. Publication was authorized by full letter ballot procedures.
Determination of the suitability of the material is solely the responsibility of the user.
Test Date: Operator: Test Facility:
Tube Manufacturer: Fitting Manufacturer:
Tube O.D.: Fitting Tube:
Tube Wall Thickness: Fitting Size:
Tube P/N: Fitting P/N:
Tube Material: Fitting Material:
Max. Pressure — kPa T = Tube Failure, F = Fitting Connection Failure
Actual Temperature
Sample 25°C T 25°C F 75°C T 75°C F 100°C T 100°C F 125°C T 125°C F
1
2
3
Average =
Standard Deviation =
Actual Temperature
Sample 150°C T 150°C F 175°C T 175°C F 200°C T 200°C F
1
2
3
Average =
Standard Deviation =
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F11-0998 © SEMI 1993, 1998 1
SEMI F11-0998
TEST METHOD TO OBTAIN AN INDICATION OF THE THERMAL
CHARACTERISTICS OF TUBE FITTING CONNECTIONS MADE OF
FLUOROCARBON MATERIALS
1 Purpose
1.1 This method provides a uniform procedure to
determine the thermal characteristics of tube fitting
connections made of fluorocarbon materials.
2 Scope
2.1 This method can be used to characterize tube fitting
connections on the basis of test data developed under
the conditions described herein, but the results are not
intended to imply a performance rating.
2.2 Tube defined in this method has a circular cross
section and is made of fluorocarbon materials.
2.3 Tube fittings defined in this method are made of
fluorocarbon materials for all parts in contact with the
internal fluid.
2.3.1 Parts such as a nut or gripper are not limited to
being made of a fluorocarbon material.
2.4 Only the seal between the tube and tube fitting
being evaluated is within the scope of this document.
All other, threaded seals are beyond the scope of this
document.
2.5 When using this method for making comparisons
among various tube fittings and/or manufacturers, the
user must be specific in the selection of the tube and
tube fittings to be evaluated.
2.6 The International System of Units (SI) is used as
the standard unit of measure in this document. The U.S.
Customary units are in parentheses for reference
purposes only and have been rounded to the nearest
whole value.
3 Summary of Method
Subject tube fitting connections made of fluorocarbon
materials to extreme internal pressure and temperature
conditions.
3.1 Test specimens are subjected to a constant internal
pressure while controlling the increase of fluid
temperature in uniform increments, with a cool down
period between each elevated temperature condition.
3.2 After completion of the entire temperature range,
test a new set of fittings and tubing with an increased
pressure.
4 Significance and Use
4.1 In the manufacturing of semiconductor products,
many types of hazardous chemicals and solvents are
required. As a result, tubing and various fitting designs
made of fluorocarbon materials (which are chemically
resistant to these fluids) are used to transport those
fluids. It is important to control the testing process
when evaluating various fitting designs, so that accurate
comparisons of the thermal characteristics can be made.
4.2 It is the intent of this method to provide a
procedure in which thermal transition testing of tube
fitting connections made of fluorocarbon materials will
be performed. By using this method, accurate
comparisons of various tube fitting designs can be
achieved.
4.3 The results obtained when using this method are
applicable only to conditions that specifically duplicate
the procedures used within this document.
4.4 When using this test method, it is assumed that the
test specimens are truly representative of the material
and manufacturing process specified for that product.
Departure from this assumption could introduce
discrepancies that are greater than those introduced by
departure from the details of the procedure outlined in
this method.
5 Terminology
5.1 Acronyms
5.1.1 O.D. — Outside Diameter
5.1.2 P/N — Part number
5.2 Definitions
5.2.1 characterize — To describe the quality of.
5.2.2 free end closure — A metal tube fitting
connection which is securely fastened to the tube and
does not contribute to the restraint of the test specimen.
5.2.3 subject — To expose to.
5.2.4 thermal transition — A change from a specific
elevated fluid temperature down to room temperature
and then to an elevated temperature higher than
previously tested, with the entire process repeated for
multiple temperature conditions.