semi合集-English.pdf - 第1424页

SEMI E30-1103 © SEMI 1992, 2003 98 S2,F48......................................................................................................................... ......................................... 29, 65 S5,F1...…

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SEMI E30-1103 © SEMI 1992, 2003
97
Remote Command .........................................................................................................................................35, 36, 37
Remote Control ...................................................................................................................................1, 17, 35, 67, 69
REPGSZ ..................................................................................................................................................24, 25, 62, 74
require............................................................................................................................................4, 28, 33, 54, 75, 78
required......................3, 4, 5, 10, 13, 14, 17, 21, 22, 31, 32, 36, 39, 42, 50, 54, 56, 62, 64, 67, 68, 69, 71, 75, 76, 77
Required ....................................................................................................................................................................72
requirement........................................................................................................................................10, 16, 30, 68, 77
requirements ............................................................................................4, 5, 6, 17, 31, 36, 58, 67, 68, 69, 71, 72, 76
Requirements.........................................1, 2, 18, 21, 22, 23, 24, 28, 30, 31, 34, 36, 37, 39, 44, 45, 48, 50, 56, 59, 67
REQUIREMENTS ....................................................................................................................................................69
resume .................................................................................................................................................................14, 36
Resume ......................................................................................................................................................................35
RESUME.............................................................................................................................................................17, 36
RPTID .....................................................................................................................................................22, 23, 24, 62
RTY.......................................................................................................................................................................5, 15
S
S1,F1....................................................................................................................12, 15, 18, 31, 55, 58, 59, 60, 64, 76
S1,F2............................................................................................................................................12, 31, 59, 60, 64, 76
S1,F3........................................................................................................................................................30, 57, 58, 64
S1,F4........................................................................................................................................................30, 57, 58, 64
S10,F1............................................................................................................................................................46, 47, 66
S10,F2............................................................................................................................................................46, 47, 66
S10,F3............................................................................................................................................................46, 47, 66
S10,F4............................................................................................................................................................46, 47, 66
S10,F5..................................................................................................................................................................47, 66
S10,F6..................................................................................................................................................................47, 66
S10,F7..................................................................................................................................................................47, 66
S2,F13..................................................................................................................................................................38, 64
S2,F14..................................................................................................................................................................38, 64
S2,F15............................................................................................................................................................38, 56, 64
S2,F16............................................................................................................................................................38, 56, 64
S2,F17............................................................................................................................................................50, 51, 64
S2,F18..................................................................................................................................................................51, 64
S2,F23......................................................................................................................................................24, 25, 64, 74
S2,F24..................................................................................................................................................................25, 64
S2,F29..................................................................................................................................................................38, 64
S2,F30..................................................................................................................................................................38, 64
S2,F31............................................................................................................................................................50, 51, 64
S2,F32..................................................................................................................................................................51, 64
S2,F33............................................................................................................................................................21, 23, 64
S2,F34..................................................................................................................................................................23, 64
S2,F35..................................................................................................................................................................23, 64
S2,F36..................................................................................................................................................................23, 64
S2,F37..................................................................................................................................................................23, 64
S2,F38..................................................................................................................................................................23, 65
S2,F39............................................................................................................................................................23, 29, 65
S2,F40............................................................................................................................................................23, 29, 65
S2,F41............................................................................................................................................................35, 37, 65
S2,F42............................................................................................................................................................36, 37, 65
S2,F43......................................................................................................................................................52, 55, 56, 65
S2,F44..................................................................................................................................................................56, 65
S2,F45............................................................................................................................................................28, 29, 65
S2,F46..................................................................................................................................................................29, 65
S2,F47............................................................................................................................................................28, 29, 65
SEMI E30-1103 © SEMI 1992, 2003
98
S2,F48..................................................................................................................................................................29, 65
S5,F1........................................................................................................................................................31, 32, 35, 65
S5,F2....................................................................................................................................................................35, 65
S5,F3....................................................................................................................................................................35, 65
S5,F4....................................................................................................................................................................35, 65
S5,F5..............................................................................................................................................................34, 35, 65
S5,F6........................................................................................................................................................31, 32, 35, 65
S6,F1........................................................................................................................................................24, 25, 65, 74
S6,F11....................................................................................21, 22, 27, 35, 37, 38, 41, 44, 46, 47, 57, 58, 60, 61, 65
S6,F12................................................................................................21, 35, 37, 38, 41, 44, 46, 47, 57, 58, 60, 61, 65
S6,F15............................................................................................................................................................21, 22, 65
S6,F16..................................................................................................................................................................22, 65
S6,F19............................................................................................................................................................24, 38, 65
S6,F2....................................................................................................................................................................25, 65
S6,F20............................................................................................................................................................24, 38, 65
S6,F23..............................................................................................................................52, 53, 54, 55, 56, 57, 58, 65
S6,F24............................................................................................................................................................57, 58, 65
S6,F5....................................................................................................................................................................21, 65
S6,F6....................................................................................................................................................................21, 65
S7,F1..............................................................................................................................................................42, 43, 65
S7,F17..................................................................................................................................................................41, 66
S7,F18..................................................................................................................................................................41, 66
S7,F19..................................................................................................................................................................41, 66
S7,F2..............................................................................................................................................................42, 43, 65
S7,F20..................................................................................................................................................................41, 66
S7,F23................................................................................................................................................39, 42, 43, 55, 66
S7,F24............................................................................................................................................................42, 43, 66
S7,F25............................................................................................................................................................41, 44, 66
S7,F26......................................................................................................................................................39, 41, 44, 66
S7,F27............................................................................................................................................................43, 44, 66
S7,F28............................................................................................................................................................43, 44, 66
S7,F29............................................................................................................................................................43, 44, 66
S7,F3........................................................................................................................................................39, 42, 43, 66
S7,F30............................................................................................................................................................43, 44, 66
S7,F4..............................................................................................................................................................42, 43, 66
S7,F5..............................................................................................................................................................41, 44, 66
S7,F6........................................................................................................................................................39, 41, 44, 66
S9,F1....................................................................................................................................................................48, 66
S9,F11..................................................................................................................................................................49, 66
S9,F13..................................................................................................................................................................49, 66
S9,F3....................................................................................................................................................................48, 66
S9,F5....................................................................................................................................................................48, 66
S9,F7....................................................................................................................................................................49, 66
S9,F9..............................................................................................................................................................10, 49, 66
safety ...................................................................................................................................5, 7, 31, 32, 33, 34, 73, 78
SECS-I.............................................................................................................................................3, 5, 6, 8, 9, 15, 47
SECS-II .............................................1, 3, 4, 5, 6, 9, 11, 13, 17, 22, 34, 39, 40, 52, 53, 56, 62, 64, 67, 68, 70, 71, 73
Selected Equipment Status Data................................................................................................................................64
Selected Equipment Status Request...........................................................................................................................64
selector.......................................................................................................................................................................75
Selector......................................................................................................................................................................72
SEQNUM ..................................................................................................................................................................62
SETUP.................................................................................................................................................................16, 17
SEMI E30-1103 © SEMI 1992, 2003
99
shall .................................................................................................................................................................................
.3, 4, 5, 6, 8, 9, 10, 11, 12, 13, 14, 18, 21, 22, 24, 28, 31, 34, 36, 37, 40, 45, 48, 50, 52, 53, 54, 55, 56, 58, 59, 62,
67, 68, 73
shutdown .............................................................................................................................................................56, 77
Shutdown.............................................................................................................................................................71, 77
SMPLN......................................................................................................................................................................62
SMS...............................................................................................................................................................3, 5, 6, 10
SOFTREV ...........................................................................................................................................................30, 31
Spooling.....................................................................................................1, 12, 18, 52, 55, 56, 57, 58, 63, 65, 68, 69
START ..........................................................................................................................................................16, 17, 36
State Model..............................................................................................................1, 6, 7, 8, 9, 10, 12, 13, 18, 27, 52
Status Data Collection .............................................................................................................................17, 30, 67, 69
Status Variable Namelist Reply.................................................................................................................................64
Status Variable Namelist Request .............................................................................................................................64
STOP .......................................................................................................................................................14, 17, 36, 63
supplier ................................................................................................................14, 21, 22, 35, 36, 40, 50, 62, 68, 69
SV....................................................................................................................................22, 23, 24, 25, 26, 30, 55, 62
SVID............................................................................................................................................22, 24, 30, 62, 71, 74
switch...........................................................................................................7, 9, 11, 12, 15, 52, 58, 59, 60, 72, 75, 76
Switch........................................................................................................................................................................76
synchronization..................................................................................................................................18, 20, 23, 50, 71
Synchronization.....................................................................................................................................................2, 71
System Errors ........................................................................................................................................................1, 66
T
terminal services........................................................................................................................................................71
Terminal Services........................................................................................................1, 13, 18, 45, 63, 66, 67, 69, 72
TEXT...................................................................................................................................................................45, 62
TIME ...................................................................................................................................................................50, 51
toggle.........................................................................................................................................................................72
TOTSMP .................................................................................................................................................24, 25, 62, 74
Trace Data Acknowledge ..........................................................................................................................................65
trace data collection...................................................................................................................................................24
Trace data collection..................................................................................................................................................24
Trace Data Collection..........................................................................................................2, 5, 17, 24, 25, 67, 69, 74
Trace Data Send ........................................................................................................................................................65
trace report.................................................................................................................................................................24
Trace Report..............................................................................................................................................................25
Transition Type .........................................................................................................................................................63
TRID..............................................................................................................................................................24, 62, 74
U
units .....................................................................................................................................................6, 22, 23, 26, 30
Units ..........................................................................................................................................................................25
V
Variable Item Dictionary.......................................................................................................................................4, 62
Variable Item List......................................................................................................................................1, 22, 30, 62