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SEMI E125.1-0305 © SEMI 2005 3 Table 40 SEMI E125 Enum eratedInteger  EnumeratedIntegerTy p e Translation Ta ble .......................................... 24 Table 41 GetStateMachin es Operation Binding ...............…

SEMI E125.1-0305 © SEMI 2005 2

Figure 20 StateMachineInstanceType Global complexType.......................................................................................29

Figure 21 GetExceptionsRequest Global Element ......................................................................................................31

Figure 22 GetExceptionsResponse Global Element....................................................................................................32

Figure 23 GetEquipmentStructureRequest Global Element........................................................................................33

Figure 24 GetEquipmentStructureResponse Global Element......................................................................................33

Figure 25 GetEquipmentNodeDescriptionsRequest Global Element ..........................................................................35

Figure 26 GetEquipmentNodeDescriptionsResponse Global Element........................................................................35

Figure 27 EquipmentNodeDescriptionType Global complexType .............................................................................36

Figure 28 ParameterType Global complexType..........................................................................................................37

Figure 29 GetLatestRevisionRequest ..........................................................................................................................40

Figure 30 GetLatestRevisionResponse Global Element..............................................................................................40

Figure 31 NotifyOnRevisionsRequest Global Element...............................................................................................41

Figure 32 NotifyOnRevisionsResponse Global Element.............................................................................................42

Figure 33 MetadataRevisedNotification Global Element............................................................................................44

List of Tables

Table 1 Example Translation Table...............................................................................................................................6

Table 2 Example Translation Table for Operation Input/Output Arguments ................................................................6

Table 3 Example Schema/WSDL Document Description Table...................................................................................6

Table 4 Altova XMLSPY Schema Diagram Symbols...................................................................................................7

Table 5 Example Interface WSDL Port Type Table......................................................................................................9

Table 6 Example Interface WSDL Binding Table.........................................................................................................9

Table 7 Example Operation Binding Table ...................................................................................................................9

Table 8 Example PortType Operation Table .................................................................................................................9

Table 9 XML Schema..................................................................................................................................................11

Table 10 EquipmentMetadataManager PortType Definitions.....................................................................................11

Table 11 EquipmentMetadataManager Binding Definitions.......................................................................................11

Table 12 EquipmentMetadataManager Port Type.......................................................................................................12

Table 13 EquipmentMetadataManager Binding..........................................................................................................12

Table 14 GetUnits Operation Binding.........................................................................................................................13

Table 15 GetUnits PortType Operation.......................................................................................................................13

Table 16 EquipmentMetadataManager Binding..........................................................................................................13

Table 17 Translation Table for Output Arguments for the GetUnits Operation..........................................................14

Table 18 E125 Unit  UnitType Translation Table ...................................................................................................14

Table 19 GetTypeDefinitions Operation Binding........................................................................................................14

Table 20 GetUnits PortType Operation.......................................................................................................................14

Table 21 EquipmentMetadataManager Binding..........................................................................................................15

Table 22 Translation Table for Output Arguments for the GetUnits Operation..........................................................15

Table 23 SEMI E125 ParameterTypeDefinition  ParameterTypeDefinitionType Translation Table......................16

Table 24 SEMI E125 Type Description Mapping Table .............................................................................................17

Table 25 SECS-II Type Description Mapping Table...................................................................................................17

Table 26 E125 StringType  StringTypeType Translation Table..............................................................................18

Table 27 SEMI E125 BinaryType  Base64BinaryTypeType Translation Table .....................................................18

Table 28 SEMI E125 IntegerType 

ByteTypeType Translation Table....................................................................18

Table 29 SEMI E125 UnitConfig  UnitConfigArrayType Translation Table..........................................................18

Table 30 SEMI E125 IntegerType  ShortTypeType Translation Table...................................................................19

Table 31 SEMI E125 IntegerType  IntTypeType Translation Table .......................................................................19

Table 32 E125 IntegerType  LongTypeType Translation Table..............................................................................19

Table 33 SEMI E125 RealType  FloatTypeType Translation Table .......................................................................20

Table 34 E125 RealType  DoubleTypeType Translation Table ..............................................................................20

Table 35 SEMI E125 ArrayType  ArrayTypeType Translation Table ....................................................................21

Table 36 SEMI E125 StructureType  StructureTypeType Translation Table..........................................................23

Table 37 SEMI E125 Field  FieldType Translation Table.......................................................................................23

Table 38 SEMI E125 EnumerationType  EnumerationTypeType Translation Table..............................................23

Table 39 SEMI E125 EnumeratedString  EnumeratedStringType Translation Table .............................................24

SEMI E125.1-0305 © SEMI 2005 3

Table 40 SEMI E125 EnumeratedInteger  EnumeratedIntegerType Translation Table ..........................................24

Table 41 GetStateMachines Operation Binding ..........................................................................................................24

Table 42 GetStateMachines PortType Operation ........................................................................................................24

Table 43 EquipmentMetadataManager Binding..........................................................................................................24

Table 44 Translation Table for Output Arguments for the GetStateMachines Operation ...........................................26

Table 45 SEMI E125 StateMachine  StateMachineType Translation Table ...........................................................26

Table 46 SEMI E125 State  StateType Translation Table .......................................................................................26

Table 47 SEMI E125 Transition  TransitionType Translation Table ......................................................................26

Table 48 SEMI E125 Event  EventType Translation Table ....................................................................................27

Table 49 GetSEMIObjTypes Operation Binding ........................................................................................................27

Table 50 GetSEMIObjTypes PortType Operation ......................................................................................................27

Table 51 EquipmentMetadataManager Binding..........................................................................................................27

Table 52 Translation Table for Output Arguments for the GetSEMIObjTypes Operation .........................................28

Table 53 SEMI E125 SEMIObjType  SEMIObjTypeType Translation Table........................................................28

Table 54 SEMI E125 StateMachineInstance  StateMachineInstanceType Translation Table.................................29

Table 55 Example Parameter References ....................................................................................................................30

Table 56 SEMI E125 EventToParameterMap  EventToParameterMapType Translation Table.............................30

Table 57 GetExceptions Operation Binding................................................................................................................31

Table 58 GetExceptions PortType Operation..............................................................................................................31

Table 59 EquipmentMetadataManager Binding..........................................................................................................31

Table 60 Translation Table for Output Arguments for the GetExceptions Operation.................................................32

Table 61 SEMI E125 EventToParameterMap  EventToParameterMapType Translation Table.............................32

Table 62 GetEquipmentStructure Operation Binding..................................................................................................33

Table 63 GetEquipmentStructure PortType Operation................................................................................................33

Table 64 EquipmentMetadataManager Binding..........................................................................................................33

Table 65 Translation Table for Output Arguments for the GetEquipmentStructure Operation...................................34

Table 66 GetEquipmentNodeDescriptions Operation Binding....................................................................................34

Table 67 GetEquipmentNodeDescriptions PortType Operation.......................................................................

...........34

Table 68 EquipmentMetadataManager Binding..........................................................................................................34

Table 69 Translation Table for Input Arguments for the GetEquipmentNodeDescriptions Operation .......................35

Table 70 Translation Table for Output Arguments for the GetEquipmentNodeDescriptions Operation ....................36

Table 71 SEMI E125 EquipmentNodeDescription  EquipmentNodeDescriptionType Translation Table..............37

Table 72 SEMI E125 Parameter  ParameterType Translation Table.......................................................................38

Table 73 SEMI E125 Constraint  ConstraintType Translation Table......................................................................38

Table 74 SEMI E125 AssociatedParameter  ParameterAssociationType Translation Table...................................38

Table 75 SEMI E125 ParameterClassification  ParameterClassificationType Translation Table ...........................39

Table 76 SEMI E125 ReadWrite  ReadWriteType Translation Table.....................................................................39

Table 77 GetLatestRevision Operation Binding..........................................................................................................39

Table 78 GetLatestRevision PortType Operation........................................................................................................39

Table 79 EquipmentMetadataManager Binding..........................................................................................................40

Table 80 Translation Table for Output Arguments for the GetLatestRevision Operation...........................................40

Table 81 NotifyOnRevisions Operation Binding ........................................................................................................41

Table 82 NotifyOnRevisions PortType Operation ......................................................................................................41

Table 83 EquipmentMetadataManager Binding..........................................................................................................41

Table 84 Translation Table for Input Arguments for the NotifyOnRevisions Operation............................................42

Table 85 Translation Table for Output Arguments for the GetUnits Operation..........................................................42

Table 86 XML Schema................................................................................................................................................42

Table 87 MetadataClient PortType Definitions...........................................................................................................43

Table 88 EquipmentMetadataManager Binding Definitions.......................................................................................43

Table 89 EquipmentMetadataManager Port Type.......................................................................................................43

Table 90 EquipmentMetadataManager Binding..........................................................................................................43

Table 91 MetadataRevised Operation Binding............................................................................................................44

Table 92 MetadataRevised PortType Operation..........................................................................................................44

Table 93 EquipmentMetadataManager Binding..........................................................................................................44

Table 94 Translation Table for Input Arguments for the NotifyOnRevisions Operation............................................44

Table 95 SEMI E125 RevisionNotice 

Revision Translation Table ........................................................................45

1 Purpose

1.1 SOAP Implementation Mapping

1.1.1 The purpose of this specification is to provide an implementation mapping of the SEMI E125 specification to

the SOAP 1.1 protocol. This document provides a description of the XML Schema data types used to support the

UML classes defined in SEMI E125, and also describes the WSDL port type and binding definitions used to support

the operations defined by the interfaces specified in SEMI E125.

2 Scope

2.1 Specification Scope

2.1.1 The scope of this specification is the representation of the EqSD model in an XML Schema and corresponding

WSDL port types and bindings. It will not add new domain information or concepts to the SEMI E125 model. The

only additions made are those needed to render useful WSDL or XML Schema.

2.1.2 This specification requires SEMI E132 authentication, and defines requirements for the application of SEMI

E132 concepts to the SEMI E125 specification.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 Provisional Specification

3.1.1 This specification is provisional pending the approval of the SEMI E138, SEMI E120.1 and SEMI E132.1.

This specification relies on XML Schema types defined by each of these specifications, and cannot be fully

implemented without these types. Finalization of these specifications is a condition for the removal of the

provisional status of this document.

3.1.2 This specification is provisional pending approval of the SEMI specification for Units for the Semiconductor

Industry. This specification relies on the unit of measure symbols defined in that specification. Finalization of this

specification is a condition for the removal of the provisional status of this document.

4 Referenced Standards

4.1 SEMI Standards

SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

SEMI E120.1 — XML Schema for the Common Equipment Model

SEMI E132.1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization

SEMI E125 — Specification for Equipment Self Description (EqSD)

4.2 OMG Standards

Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67,

(http://www.omg.org/technology/documents/modeling_spec_catalog.htm)

4.3 W3C Standards

Extensible Markup Language (XML) 1.0 (Second Edition) — W3C, 6 October 2000

(http://www.w3.org/TR/2000/REC-xml-20001006/)

1 Object Management Group, Inc., 250 First Ave. Suite 100, Needham, MA 02494, USA, Telephone:1.781.444.0404, Fax: 1.781.444.0320,

website: www.omg.org.

2 World Wide Consortium, Massachusetts Institute of Technology (MIT) Computer Science and Artificial Intelligence Laboratory (CSAIL), 32

Vassar Street Room 32-G515, Cambridge, MA 02139, USA Telephone: 1.617.253.2613 Fax: 1.617.258.5999, website: www.w3c.org.