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SEMI E127-0705 © SEMI 2003, 2005 29 Comments Control Client (CC) Msg Dir STPO Comments 3b  XfrCommand.rsp Note: if command fails, transfer should be aborted. XfrStatus = successful completion, no errors. Substrate Handl…

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SEMI E127-0705 © SEMI 2003, 2005 28
12.11.3.2 Assumptions — The following assumptions about the status of the IMM and the STPO at the start of this
scenario:
The IMM has completed its system initialization and is in the IN SERVICE state,
The Control Client has been established and is in control of the substrate handler,
The STPO is in the READY TO UNLOAD state,
The Substrate Location used for unloading is in the OCCUPIED state, and
The ObjID of the STPO object is “STPO1”.
12.11.3.3 Requirements — The following requirements for loading are illustrated in Table 11.
All services listed in Table 8 except for TransferPathCalibration,
Support for micro command “Confirm absence”, and
Support for state model and events associated with state model transitions.
12.11.3.4 Message Flow — Table 11 shows an example of the typical flow of messages used to unload a substrate
from the IMM. Note that any particular STPO can only unload one substrate at a time.
Table 11 Substrate Transfer Path Unload Scenario
Comments Control Client (CC) Msg Dir STPO Comments
1 The CC must obtain this
list in order to unload a
substrate from the IMM.
Typically it is one of the
first thing following the
establishment of the
control client and status
synchronization.
XfrCmdList-Request.req
Required field. XfrType = “Unload”
XfrCmdList-Request.req
List of micro commands shall
always include, at a minimum, the
command “Confirm Absence”.
Required.
List of micro commands in the
order in which they must be
executed.
Example: Open door,
raise pins, confirm
absence, lower pins,
close door.
2a
UpdateSubstrateObject.req Updated information on
substrate.
Check for other required
fields. The CC needs to
accept attribute names
and values defined in this
standard.
SubstID = “xyz”
OrientationOut = xxx
These are required
fields.
2b UpdateSubstrateObject.rsp
3 Ready to pick up. XfrCommand.req
Indicate which fields are
required.
ObjID = “STPO1”,
XfrLink = 1,
XfrCmdName = “Open
door”
Note: this is an example
only.
4
Event.nfy STPOSM T5: READY
TO UNLOAD ->
Assigned
Opens door.
SEMI E127-0705 © SEMI 2003, 2005 29
Comments Control Client (CC) Msg Dir STPO Comments
3b
XfrCommand.rsp Note: if command fails,
transfer should be
aborted.
XfrStatus = successful completion,
no errors.
Substrate Handler
extends arm into IMM.
5a XfrCommand.req
ObjID = “STPO1”,
XfrLink = 1,
XfrCmdName = “Raise
pins”
STPO raises pins.
5b
XfrCommand.req
XfrStatus = normal completion, no
errors.
Substrate Handler grips
substrate and moves up.
7a XfrCommand.req
ObjID = “STPO1”,
XfrLink = 1,
XfrCmdName = “Lower
pins”
STPO lowers pins.
7b
XfrCommand.rsp
XfrStatus = normal completion, no
errors.
8a XfrCommand.req
This XfrCmdName is
required and shall be sent
prior to XfrVerify.
ObjID = “STPO1”,
XfrLink = 1,
XfrCmdName = “Confirm
absence”
If substrate absence is not
confirmed, then the
transfer shall either be
retried or aborted.
STPO verifies that the
substrate is no longer
detected.
8b
XfrCommand.rsp
XfrStatus = normal completion, no
errors.
9
Event.nfy The Substrate Location
where substrates are
loaded changes from
OCCUPIED to
UNOCCUPIED
(SLOSM T2).
Substrate Handler
retracts arm from IMM.
10a XfrCommand.req
ObjID = “STPO1”,
XfrLink = 1,
XfrCmdName = “Close
door”
Door closed.
SEMI E127-0705 © SEMI 2003, 2005 30
Comments Control Client (CC) Msg Dir STPO Comments
10b
XfrCommand.rsp
XfrStatus = normal completion, no
errors.
11a Confirm transfer is
complete.
XfrVerify.req
XfrLink = 1
11b
XfrVerify.rsp Acknowledge transfer is
complete.
XfrStatus = normal completion, no
errors.
Data Table Object Model
references
Table
Data Table
IMM Data Table
Substrate Data
Set
IMM Converted
Data Table
IMM Raw Data
Table
IMM Calibration
Data Table
Data Row
Data Row
Template
Data Information
stores
site
data in
describes
order of data
within row
stores
attributes for
named data
0...*
0...*
1
1...*
1...*
0...* 0...*
1
Figure 8
Full Data Object Model
13 IMM Data
13.1 Overview
13.1.1 IMM Data consists of substrate context information together with one of the following: (1) measurements
taken on a substrate and stored as raw data, (2) meaningful results based on measurements, or (3) substrate