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SEMI E109-0305 © SEMI 2001, 2005 16 10.4.4 Reticle Pod St ate Transition Table 10.4.4.1 Table 7 indicates the triggers and the expected behavior of the instantiated reticle pod object. Table 7 Reticle Pod Stat e Tran sit…

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10.4.3.1.2.2.2 HOLD — This is a substate of LOCKED and is active when there are physical or logical mechanisms
that prevent removal of the pod engaged and the pod release flag is set to host release and the PodRelease service
has not been received.
10.4.3.1.3 RETICLE POD ID STATUS — This is a substate of RETICLE POD and indicates the current status of
the pod with respect to its identifier. It has four substates, ID NOT READ, WAITING FOR HOST ON ID
STATUS, ID VERIFICATION FAILED, ID VERIFICATION OK. The initial substate is conditional based on
information the equipment has about the reticle pod. When the PodID is provided by the Bind, ReticleTransferJob,
or the PodNotification service, the reticle pod object shall be instantiated in the ID NOT READ substate. When the
PodID is provided by the PodID read, the reticle pod shall be instantiated in the WAITING FOR HOST ON ID
STATUS substate. When the Reticle Pod is instantiated by the ProceedWithPod service, the reticle pod shall be
instantiated in the ID VERIFICATION OK substate. Finally when the reticle pod is instantiated by the CancelPod
service, the pod will be instantiated in the ID VERIFICATION FAILED substate.
10.4.3.1.3.1 ID NOT READ — This is a substate of RETICLE POD ID STATUS. This state is active whenever the
PodID has not been read by the equipment.
10.4.3.1.3.2 ID VERIFICATION FAILED — This is a substate of RETICLE POD ID STATUS and is active when
the PodID has verification by the host with the CancelPod service. This is a final state.
10.4.3.1.3.3 ID VERIFICATION OK — This is a substate of RETICLE POD ID STATUS and is active as soon as
the PodID has been accepted. The ID is determined to be accepted by either successful verification by the
equipment or the host, or by bypassing ID read because a PodID reader is not available and the BypassReadID
variable is set to true. This is a final state.
10.4.3.1.3.4 WAITING FOR HOST ON ID STATUS — This is a substate of RETICLE POD ID STATUS and is
active during the period of time when the PodID has been read by the equipment successfully or unsuccessfully and
has not yet been verified.
10.4.3.1.4 RETICLE POD SLOT MAP STATUS — This is a substate of RETICLE POD and indicates the current
status of the reticle pod with respect to its slot map. It has four substates, SLOT MAP NOT READ, WAITING
FOR HOST ON SLOT MAP STATUS, SLOT MAP VERIFICATION FAILED, SLOT MAP VERIFICATION OK.
The initial default entry sub-state is SLOT MAP NOT READ.
10.4.3.1.4.1 SLOT MAP NOT READ — This is a substate of RETICLE POD SLOT MAP STATUS and is the
default entry state. It is active when the Reticle Pod is first loaded at the equipment until the Slot Map has been read
successfully by the equipment.
10.4.3.1.4.2 SLOT MAP VERIFICATION FAIL — This is a substate of RETICLE POD SLOT MAP STATUS and
is active when the Slot Map has been read by the equipment and has failed verification by the host. This is a final
state.
10.4.3.1.4.3 SLOT MAP VERIFICATION OK — This is a substate of RETICLE POD SLOT MAP STATUS and is
active as soon as the slot map has been verified. This is a final state.
10.4.3.1.4.4 WAITING FOR HOST ON SLOT MAP STATUS — This is a substate of RETICLE POD SLOT MAP
STATUS and is active when the equipment is waiting for input from the host.
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10.4.4 Reticle Pod State Transition Table
10.4.4.1 Table 7 indicates the triggers and the expected behavior of the instantiated reticle pod object.
Table 7 Reticle Pod State Transition Definition
# Previous State Trigger New State Actions Comment
1 (no state) A reticle pod is instantiated. RETICLE POD None. Data required to be available for
this event report:
PodID
2 (no state) Normal: A Bind,
ReticleTransferJob or
PodNotification service is
received.
ID NOT READ None. Data required to be available for
this event report:
PodID
3 (no state) Normal: A PodID not
currently existing at the
equipment is successfully
read.
Abnormal: A PodID is read
successfully but an equipment
based verification failed.
WAITING FOR
HOST ON ID
STATUS
None. Data required to be available for
this event report:
PodID
PortID
Normally, this transition will
happen after a successful ID read
if a bind or ReticleTransferJob
service has not been issued (host
based verification) or abnormally
if a bind or ReticleTransferJob
service is followed by a
successful ID read and an
unsuccessful equipment based
verification.
4 (no state) ID Read fail: A
ProceedWithPod service is
received.
ID
VERIFICATION
OK
A reticle pod is
instantiated having
the PodID provided
by the
ProceedWithPod
service.
Data required to be available for
this event report:
PodID
This transition can happen only if
a bind or ReticleTransferJob,
service has not been received.
5 (no state) ID Read fail: A CancelPod
service is received.
ID
VERIFICATION
FAIL
A reticle pod is
instantiated having
the PodID provided
by the Cancel Pod
service.
Data required to be available for
this event report:
PodID
This transition can happen only if
a bind or ReticleTransferJob
service has not been received.
6 ID NOT READ PodID is read successfully and
the equipment has verified the
PodID successfully.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
PodID
7 ID NOT READ PodID is read unsuccessfully. WAITING FOR
HOST ON ID
STATUS
None. Data required to be available for
this event report:
PortID
PodID
8 WAITING
FOR HOST
ON ID
STATUS
A ProceedWithPod service is
received.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
PodID
SEMI E109-0305 © SEMI 2001, 2005 17
# Previous State Trigger New State Actions Comment
9 WAITING
FOR HOST
ON ID
STATUS
A Cancel Pod Service is
received.
ID
VERIFICATION
FAILED
None. Data required to be available for
this event report:
PortID
PodID
10 ID NOT READ BypassReadID
i
variable is set
to FALSE, and a reticle pod is
received when the id reader is
not in service or not installed.
WAITING FOR
HOST ON ID
STATUS
Wait for
ProceedWithPod.
Data required to be available for
this event report:
PortID
PodID
11 ID NOT READ BypassReadID
i
variable is set
to TRUE, and a reticle pod is
received when the id reader is
not in service or not installed.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
PodID
12 ID NOT READ The equipment successfully
reads, but unsuccessfully
verifies a reticle PodID.
ID
VERIFICATION
FAILED
None.
This transition should be
followed by the equipment
performing a self initiated
CancelBind service (see transition
29)
Data required to be available for
this event report:
PodID (of the pod instantiated in
the Bind service)
Data required to be available for
this event report:
PortID
PodID
13 (no state) A reticle pod is instantiated. SLOT MAP
NOT READ
None. No event is required for this
transition.
14 SLOT MAP
NOT READ
Slot Map is read and verified
successfully by the equipment.
SLOT MAP
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID (if valid)
PodID
LocationID
15 SLOT MAP
NOT READ
Normal host based
verification: Slot Map is read
successfully and the
equipment is waiting for host
verification.
Equipment based verification:
Slot map is read successfully
but equipment based
verification has failed.
Slot map read fail: Slot Map
cannot be read.
WAITING FOR
HOST ON SLOT
MAP STATUS
Save new slot map
in the SlotMap
attribute.
Data required to be available for
this event report:
PortID (if valid)
PodID
LocationID
SlotMap (if valid)
Reason
16 WAITING
FOR HOST
A ProceedWithPod service is
received.
SLOT MAP
VERIFICATION
OK
Proceed with the
Reticle Pod as
instructed.
Data required to be available for
this event report:
PortID (if valid)
PodID
LocationID