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SEMI E127-0705 © SEMI 2003, 2005 37 14.5.2 All subtypes of the IM M Data Table inheri t the attributes and stat e model of the IMM Data Tabl e object. Additional at tributes are also defined f or each subty pe in the fol…

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14.3.5.4 SummaryData — The content of a row represents a set of measurements, and properties of those
measurements, taken at a single site. SummaryData is information that summarizes the row content, typically
statistically. This is often the information examined first by applications such as Advanced Process Control.
14.3.5.4.1 Examples of SummaryData include:
<“MeanThickness”, .002, “float”, “mm”>
<“StdDevThickness”, .0005, “float”, “mm”>
14.4 IMM Data Table Object Event Variables
14.4.1 Table 15 specifies variables in alphabetical order that shall be available for events associated with all
subtypes of IMM Data Table Object. The Event column identifies any specific state model associated with the
variable.
Table 15 Event Variables for IMM Data Table Objects
Variable Name Description Type Event Comment
DataItem
i
Column data for I = 1,n. Dependent on
specific column
format.
IMMDTOSM:T2. Actual data from row, all n
columns, for transition 2 only.
DateTime The date and time that the event
occurred.
Conforms to the
clock format in
SEMI E98.
All.
GroupNum Identifies the group associated with
the event.
Unsigned
integer.
IMMDTOSM:T3. For transition 3 only.
IMM_ID ObjID of this IMM. Text. All transitions of
IMMDTOSM.
LotID Value of LotID for the table
associated with the event.
Text. All.
RecipeID Recipe identifier for the recipe being
used for measurement, conversion,
or substrate calibration.
Text. All transitions of
IMMDTOSM.
RowNum Identifies the row associated with
the event.
Unsigned
integer.
IMMDTOSM:T2. For transition 2 only.
SubstID Value of SubstID for the table
associated with the event.
Text. All. Identifies the associated substrate.
SubstIDRead Value of SubstIDRead for the table
associated with the event.
Text. All. Identifies the substrate ID value as
read. SubstID may be in the form
of a SEMI E90 default ID.
TableID ObjID of the table associated with
the event.
Text. All transitions of
IMMDTOSM.
Identifies the table with the event.
TableType ObjType of the table associated with
the event.
Text. All transitions of
IMMDTOSM.
Subtype of IMM Data Table
object.
14.5 Types of IMM Data Table Objects
14.5.1 All of the data generated by both the physical measuring process and a software data conversion process is
placed into an IMM Data Table subtype. As shown in Figures 8 and 9, the IMM Data Table object has three
concrete subtypes, the IMM Calibration Data Table, IMM Raw Data Table, and IMM Converted Data Table objects.
All IMM Data Table objects shall be one of these three subtypes.
14.5.1.1 A limited set of required information shall be provided in row data:
site location where measurement was made (x,y coordinates, or x,y,z coordinates).
substrate side measured, where this varies from one set of sites to another within one table.
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14.5.2 All subtypes of the IMM Data Table inherit the attributes and state model of the IMM Data Table object.
Additional attributes are also defined for each subtype in the following sections.
14.5.3 IMM Raw Data Table Object
14.5.3.1 The IMM Raw Data Table object holds the sensor-based measurements collected during the physical
measurement process. Table 16 defines the attributes for the IMM Raw Data object.
Table 16 IMM Raw Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y String assigned by IMM.
ObjType Type of Object. RO Y Text = “TableIMM_RawData”.
MeasurementRecipeID Identifies the measurement recipe. RO Y Text.
14.5.4 IMM Converted Data Table Object
14.5.4.1 The IMM Converted Data Table Object holds the data that is converted into information needed for
analysis of the substrate properties for advanced process control and post-mortem problem solving. Its attributes are
defined in Table 17.
Table 17 IMM Converted Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text assigned by the IMM.
ObjType Type of Object. RO Y Text = “TableIMM_ConvertedData”.
ConversionRecipeID Conversion Recipe identifier (may
be the name of the IMM recipe).
RW Y Text.
FeatureType Type of feature extracted. RO Y Enumerated text:
“CD linewidth”
“Thickness”
“Reflectivity”
“GoodnessOfFit”
….
RawDataTable ObjID of IMM Raw Data Table
object.
RO Y Text.
14.5.4.2 Event Variables for Conversion Data Table Objects — Table 18 specifies event variables required for
Conversion Data Table Objects in addition to those defined in Table 15.
Table 18 Event Variables for Conversion Data Table Object
Variable Name Description Type Event Comment
DateTime The date and time that the event
occurred.
Conforms to the clock
format in SEMI E98.
All.
FeatureType Type of feature extracted –
corresponds to the attribute of
the same name.
Enumerated text All events of the
IMMDTSM.
14.5.5 IMM Calibration Data
14.5.5.1 The IMM Calibration Data object is used to hold the results of a formal substrate calibration process
performed on a known good wafer. It includes both expected and actual data. Its attributes are defined in Table 19.
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Table 19 IMM Calibration Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text string assigned by the IMM.
ObjType Type of Object. RO Y Text = “TableIMM_CalibData”.
CalibrationDuration Expected or mean duration of
calibration procedure, in seconds.
RW Y Integer.
CalibrationStatus Indicates whether or not the last
substrate calibration was good.
RO Y Enumerated:
Successful
Failed
CalibrationTimeStamp Date/time when the last calibration
was completed.
RO Y Depends on TimeStampFormat.
RefSubstID Identifier of substrate used for
calibration.
RO Y Text. Null string if no reference substrate
used for calibration.
14.6 IMM Data Table Object Services
14.6.1 Services related to IMM Data Table Objects are provided by the IMM object and are listed in Table 5, ¶11.5.
14.6.2 Scenarios involving IMM Data Table Objects are illustrated in Related Information 1.
15 Data Table Objects
15.1 Data Table Object Model
15.1.1 As shown in Figure 11, a Data Table Object has an associated Data Row Template and a set of Data Rows.
When a table is transferred, it transfers an ordered set of column headers (Data Information ObjIDs) and a set of one
or more rows, where each row consists of one or more individual entries following the order specified by the column
headers. The information in a Data Row Template corresponds to the set of column headers. The ith column
header identifies the type of data in the ith position within a row. The column headers are available both as a list of
headers and as one of the attributes in a DataEntryTemplate.
15.1.2 Individual measurement data themselves have attributes, such as units and data type. These are provided in
the Data Information object. The Data Information provides this additional information about the specified type of
data entry (that is, for a specific column or position within a row). Each Data Row Template uses as many Data
Information objects as there are columns in the table. Any given Data Information may be used by multiple Data
Row Templates, since the specific Data Row Template produced may vary by recipe.
15.1.3 A master Data Row Template provides all available Data Information objects, while a Data Row Template
for a specific measurement table provides only those Data Information objects that are available for a specific table.
For example, one table may provide CD linewidth, while a different table provides film thickness. Specific data
depends on the recipe used.