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SEMI P10-0705 © SEMI 1990, 2005 47 <xs:element name="TransmissionModeReqd" type="xs:string"/> </xs:sequence> </xs:sequence> <xs:sequence minOccurs="0" maxOccurs="un…

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SEMI P10-0705 © SEMI 1990, 2005 46
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FilmScale" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FilmSize" type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FilmColor" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FilmNormalTone" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Price" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartFilms"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndFilms"/>
</xs:complexType>
<xs:complexType name="PhaseShiftType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PhaseShiftQualityId"
type="xs:string"/>
</xs:sequence>
<xs:element name="PsmWavelength" type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionTarget"
type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionTolerance"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionRange"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionError"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="TransmissionEquipReqd"
type="xs:string"/>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 47
<xs:element name="TransmissionModeReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:sequence minOccurs="0">
<xs:element name="TransmissionMarkSiteId"
type="xs:string"/>
</xs:sequence>
<xs:element name="TransmissionMarkLocation"
type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionMarkFeature"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element
name="TransmissionMarkLocationDrawing" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionMarkDrawing"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PhaseAngleTarget"
type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="PhaseAngleReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PhaseAngleTolerance"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PhaseAngleRange"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PhaseAngleError"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="PhaseAngleEquipReqd"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="PhaseAngleModeReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:sequence minOccurs="0">
<xs:element name="PhaseAngleSiteId"
type="xs:string"/>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 48
<xs:element name="PhaseAngleMarkLocation"
type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PhaseAngleMarkFeature"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element
name="PhaseAngleMarkLocationDrawing" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PhaseAngleMarkDrawing"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EtchDepthTarget" type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="EtchDepthReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EtchDepthTolerance"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EtchDepthRange"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EtchDepthError"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EtchDepthEquipReqd"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="EtchDepthModeReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:sequence minOccurs="0">
<xs:element name="EtchDepthSiteId"
type="xs:string"/>
</xs:sequence>
<xs:element name="EtchDepthMarkLocation"
type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EtchDepthMarkFeature"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EtchDepthMarkLocationDrawing"
type="xs:string"/>