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SEMI E123-0703 © SEMI 2003 6 # Current State Trigger Ne w State Actions Comments 10 CONTACTOR OPEN The handler has received a MAKE-CONTACT command or continuation of RECONTACT and handler has completed contacting of the …

SEMI E123-0703 © SEMI 2003 5

6.4.20 STOPPING (PROCESSING ACTIVE Sub-State) — The handler has completed a Process Program or has

been instructed to stop processing and shall do so at the next opportunity. All necessary cleanup is completed within

this state with regard to material, data, control system, etc. Data is preserved. Any error condition is cleared before

exiting from this state.

6.4.21 WORKING (EXECUTING Sub-State) — The handler is processing a specific unit.

6.5 HSEM Processing State Transitions Table

6.5.1 Unless specified, if a command is stated as a possible trigger for a state transition, it is implied that the

command or its equivalent can come from the host or operator or any other command interface provided by the

equipment, for example a GPIB command interface.

Table 1 Processing State Transitions Table

# Current State Trigger New State Actions Comments

1 INIT All handler initialization is

complete with no alarms

or error conditions.

IDLE None None

2 IDLE A Process Program is

selected.

SETTING UP Handler-dependent Commit has been made to

setup.

3 SETTING UP All setup activity has

completed, and the

handler is ready to receive

a START command.

READY The handler is waiting for a

START command.

The selected Process

Program is available for

execution, and material is

present at the input port.

4 READY Handler receives a

PRELOAD-UNITS

command.

PRELOADING Handler starts preloading units to

temperature soak chambers or

some process buffers, where some

type of pre-work can be applied

to units before processing. No

units should be transferred to

process sites at this point.

For handlers that do not

support process buffers of

any type, this will just be a

pass-thru state. Transition

#5 is taken immediately.

5 PRELOADING Handler completes

preloading of units to its

process buffers, e.g.

unit(s) is ready to be

transferred to process

site(s) from buffers.

READY PreloadComplete collection event

reported to Host.

6 READY The handler receives a

START command.

LOADING Transfers the next unit to the

process-site.

LOAD is an

EXECUTING sub-state.

7 LOADING A unit(s) is loading to the

process –site(s) or been

removed from process

site(s).

AWAITING

COMMAND

The actuator(s) is extended to the

alignment process site(s) if

applicable. If unit(s) is loaded to

process site(s), UnitsReady event

is sent to Host with loaded status

of each process site.

None

8 WORKING The processing of the

current unit(s) completes

normally and handler

received a BIN-UNITS

command.

LOADING This unit(s) is transferred from

the process sites specified in the

remote command and next unit(s)

is loaded to the now empty

process site(s).

None

9 AWAITING

COMMAND

The processing of the

current unit(s) completed.

The handler has received a

RECONTACT or

BREAK-CONTACT

command.

CONTACTOR

OPEN

The actuator(s) is retracted from

the alignment test site(s). If

RECONTACT command is

received, handler will attempt to

contact unit(s) again.

None

SEMI E123-0703 © SEMI 2003 6

# Current State Trigger New State Actions Comments

10 CONTACTOR

OPEN

The handler has received a

MAKE-CONTACT

command or continuation

of RECONTACT and

handler has completed

contacting of the unit(s).

AWAITING

COMMAND

The actuator(s) is extended to the

alignment process site(s).

UnitsReady event is sent to Host

with loaded status of each site.

None

11 LOADING The handler completes

unload of last unit and

there are no more unit(s)

available for loading.

READY The handler completes sorting the

last unit(s). LastUnitCompleted

collection event reported to Host.

None

12 PROCESS The handler has received a

STOP command.

STOPPING The handler completes the current

unit in the WORKING state and

unloads it.

The handler begins its

cleanup procedure.

13 STOPPING The handler cleanup is

complete, and the handler

is free of alarms.

IDLE None None

14 PROCESS An alarm occurs. ALARM

PAUSED

PROCESS activity is suspended,

and the handler is waiting for all

alarms to be cleared.

ALARM PAUSED is a

PAUSE sub-state.

15 PROCESS The handler has received a

PAUSE command.

PAUSING The PROCESS state shall be

suspended at the completion of

the current unit. Any necessary

actions to put the handler in a safe

state are performed.

PAUSING is a PAUSE

sub-state.

16 PAUSING The handler has

completed Processing the

Current unit in the

WORKING state and

achieved a safe condition.

PAUSED The handler is waiting for a

command (RESUME, STOP, or

ABORT).

None

17 PROCESS

PAUSE

The handler has received a

RESUME command.

STATE based on

conditional table.

Return to previous state or state

per process resume conditions.

None

18 PAUSED A RESUME command

was received.

CHECKING Validation of the Process

Program Parameters.

None

19 CHECKING Error was detected in new

parameter setting being

validated in the

CHECKING state.

PAUSED None None

20 CHECKING Parameter checking

completes successfully.

STATE based on

conditional table.

Return to previous state or state

per process resume conditions.

None

21 PROCESS

PAUSE

An alarm is set by the

handler.

ALARM

PAUSED

The handler waits for all alarms

to be cleared or for a STOP or

ABORT command.

None

22 ALARM

PAUSED

All alarms are cleared. PAUSED The handler is waiting for a

command (RESUME, STOP, or

ABORT).

None

23 PAUSE The handler has received a

STOP command.

STOPPING The handler proceeds with

cleanup.

Data is preserved and is

valid.

24 STOPPING The handler has received

an ABORT command.

ABORTING Any unsafe condition is resolved,

if possible.

Data may be invalid or

unavailable.

25 PAUSE The handler has received

an ABORT command.

ABORTING Any unsafe condition is resolved,

if possible.

Data may be invalid or

unavailable.

26 PROCESS The handler has received

an ABORT command

from operator, host, or

self-generated.

ABORTING The handler is put in a “safe”

state.

Unit or lot data may be

invalid or not available.

# Current State Trigger New State Actions Comments

27 ABORTING Unsafe conditions have

been resolved where

possible.

ABORTED The handler is waiting for alarm

and ABORT conditions to be

cleared.

The only state change

allowed is to IDLE.

28 ABORTED An operator has verified

that all alarms and abort

conditions have been

cleared.

IDLE None None

29 IDLE An alarm is set. IDLE with

ALARMS

The handler waits for all alarms

to be cleared.

None

30 IDLE with

ALARMS

All alarms have been

cleared.

IDLE None The IDLE state is free of

alarms.

6.6 Process Model Conditions Table

Table 2 Process Resume Conditions

Condition Next State

Checking determines that process program conditions were

changed.

SETTING UP

Previous State PRELOADING. PRELOADING

Previous State LOADING. LOADING

Previous State AWAITING COMMAND. AWAITING COMMAND

Previous State CONTACTOR OPEN. CONTACTOR OPEN

Previous State READY. READY

Previous State was SETTING UP. SETTING UP

7 Collection Event List

7.1 Requirements

7.1.1 ALL SEMI E30-required Events are required by the HSEM. Since a Processing State Model is required by the

HSEM, all state transitions are required Events.

7.1.2 This section of the HSEM lists only those collection events that are not associated with a change of state or

those requiring specific data variables or Reports defined in the HSEM.

7.2 Collection Event Tables — The first table contains required events and associated reports. The second table

contains required events and associated data variables.

Table 3 Processing State Transitions Requiring Report Levels

Transition From State To State Required variables or Report

SETUP COMPLETE (3) SETTING UP READY Setup Report

Table 4 Other Required Collection Events

Collection Event Name Description Typical Variable Data Reference / Comments

CarrierEmpty Last item from carrier was removed. MediaID Configuration specific event

(CSE). EXECUTING event.

CarrierFull Output carrier capacity is full. MediaID CSE. Valid in

EXECUTING event.

ReaderFailed Any type of failure related to reading

of units.

ReaderType, ReaderErrorType CSE. PROCESSING event

UnitCntInterval UnitCountInterval, Clock EXECUTING event.