semi合集-English.pdf - 第3320页

SEMI E130-1104 © SEMI 2003, 2004 34 R1-1.1.2.7 Load PJ02 Substrate 2 Host Prober Load Substrate() PS: AWAITING COMMAND to HANDLING MATERIAL Unload substrate from chu c k Load substrate on Chuck Move next subst rate to Pr…

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SEMI E130-1104 © SEMI 2003, 2004 33
R1-1.1.2.6 Load 1
st
Substrate of PJ02. PJ01 Terminates
Host Prober
Load Substrate()
PS: AWAITING COMMAND to HANDLING MATERIAL
Unload substrate from chuck()
PJ01: PROCESSING to PROCESS COMPLETE()
PJ01: PROCESSING COMPLETE to TERMINAL()
Load substrate on Chuck()
Move next substrate to Pre-align()
Align and Profile()
PS: HANDLING MATERIAL to AWAITING COMMAND()
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ02.01
SubstPJ02.02
Figure R1-7
Normal Run - Load 1
st
Substrate of PJ02 Scenario
Process Substrate SubstPJ01.01 (See Section R1-1.1.2.3 )
SEMI E130-1104 © SEMI 2003, 2004 34
R1-1.1.2.7 Load PJ02 Substrate 2
Host Prober
Load Substrate()
PS: AWAITING COMMAND to HANDLING MATERIAL
Unload substrate from chuck
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile
PS: HANDLING MATERIAL to AWAITING COMMAND
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ02.02
SubstPJ02.03
Figure R1-8
Normal Run - Load 2
nd
Substrate of PJ02 Scenario
Process Substrate SubstPJ02.02 (See Section R1-1.1.2.3 )
R1-1.1.2.8 Load PJ02 substrate 3
Message sequence identical to Section R1-1.1.2.7
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ02.03
Figure R1-9
Normal Run - Load 3
rd
Substrate of PJ02 Scenario
Process Substrate SubstPJ02.03 (See Section R1-1.1.2.3 )
SEMI E130-1104 © SEMI 2003, 2004 35
R1-1.1.2.9 Unload PJ02 substrate 3
User
If the host issues the LOAD-SUBSTRATE command when
there are no more unprocessed substrates contained in the
Process Job's PRMtlName list, and there is not another
Process Job ready to be processed, the prober will interpret
the command as an UNLOAD-SUBSTRATE command.
Host Prober
UNLOAD-SUBSTRATE()
PS: AWAITING COMMAND to HANDLING MATERIAL
Unload substrate from chuck
PS: HANDLING MATERIAL to IDLE()
PJ02: PROCESSING to PROCESS COMPLETE()
PJ02: PROCESSING COMPLETE to TERMINAL()
CJ1: EXECUTING to COMPLETED()
CA: IN ACCESS to CARRIER COMPLETE()
Undock FOUP()
LP: TRANSFER BLOCKED to READY TO UNLOAD()
Start Remove FOUP()
LP: READY TO UNLOAD to TRANSFER BLOCKED()
LP: TRANSFER BLOCKED to READY TO LOAD()
End Remove FOUP()
CA: to TERMINAL()
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-10
Normal Run – Unload 3
rd
Substrate of PJ02 Scenario