semi合集-English.pdf - 第5095页

SEMI M23.6-0703 © SEMI 2003 4 (111) In Vector Normal to Wafer Surface (100) Vector Normal to (100) Pl ane Til t A ngle _ (101) _ (001) _ (011) (010) _ _ (111) In (110) _ (111) P _ (110) (100) Tilt A ngle waf er (110) Dir…

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SEMI M23.6-0703 © SEMI 2003 3
(111) In
Vector Normal
to Wafer Surface
(100)
Vector Normal
to (100) plane
_
(101)
_
(001)
_
(011)
(010)
_
_
(111)
In
(110)
_
(111)
P
Tolerance
Figure 2
Notched InP Wafer Illustrating Surface Orientation A
SEMI M23.6-0703 © SEMI 2003 4
(111) In
Vector Normal
to Wafer Surface
(100)
Vector Normal
to (100) Plane
Tilt
Angle
_
(101)
_
(001)
_
(011)
(010)
_
_
(111)
In
(110)
_
(111)
P
_
(110)
(100)
Tilt Angle
wafer
(110)
Direction of tilt
toward (110) plane
Figure 3
Notched InP Wafer Illustrating Surface Orientation B, with Tilt
SEMI M23.6-0703 © SEMI 2003 5
(111) In
Vector Normal
to Wafer Surface
(100)
Orthogonal
Misorientation
Vector Normal
to (100) Plane
_
(101)
_
(001)
_
(011)
(010)
_
_
(111)
In
(110)
Vector Normal
to (110) Plane
Projection of Wafer Surface
Normal on (100) Plane
Projection of [110] on (100) Plane
_
(111)
P
Figure 4
Notched InP Wafer Illustrating Surface Orientation B, with Tilt and Orthogonal Misorientation