semi合集-English.pdf - 第1287页

SEMI E5-1104 © SEMI 1982, 2004 229 Stream,Function Name (Mnemonic) Direction S16,F9 Process Job Event Notify (PRJE) S,H<-E,[reply ] Description Send Processing Job related event to the con trolling entity . Structure …

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SEMI E5-1104 © SEMI 1982, 2004 228
Stream,Function Name (Mnemonic) Direction
S16,F7 Process Job Alert Notify (PRJA) S,H<-E,[reply]
Description
The processing service may notify the controlling entity of important events. The Process Job Milestones only assume small
number of different values. However, the conditions under which a process job meets one of these milestones may vary. For
instance, a Job may reach Job Complete because the Process was Aborted. By using item 4, the status of the Alert
(PRJOBMILESTONE) can be indicated. See the list of Error Codes for Processing in Data Item Dictionary.
Structure
L,4
1. <TIMESTAMP>
2. <PRJOBID>
3. <PRJOBMILESTONE>
4. L,2
1. <ACKA>
2. L,n (n = {0,n})
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
The list n may be zero length.
Stream,Function Name (Mnemonic) Direction
S16,F8 Process Job Alert Confirm (PRJAC) S,H->E
Description
Host confirms receipt of Process Job Alert message from the equipment.
Structure
Header only
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 229
Stream,Function Name (Mnemonic) Direction
S16,F9 Process Job Event Notify (PRJE) S,H<-E,[reply]
Description
Send Processing Job related event to the controlling entity.
Structure
L,4
1. <PREVENTID>
2. <TIMESTAMP>
3. <PRJOBID>
4. L,n
1. L,2
1. <VID
1
>
2. <V
1
>
.
.
n. L,2
1. <VID
n
>
2. <V
n
>
Exception
The VID, V pairs are variable data identifiers and values; exceptions n = 0 is valid for some events (PREVENTID).
Stream,Function Name (Mnemonic) Direction
S16,F10 Process Job Event Confirm (PRJEC) S,H->E
Description
Host confirms receipt of S16,F9 message to equipment.
Structure
Header only
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 230
Stream,Function Name (Mnemonic) Direction
S16,F11 PRJobCreateEnh M,H->E,reply
Description
Request equipment to create a Process Job with the given PRJOBID. If multi-block, this message must be preceded by the
S16,F1/F2 transaction.
Structure
L,7
1. <DATAID>
2. <PRJOBID>
3. <MF>
4a. L,n [MF = carrier, n = # of carriers]
1. L,2
1. <CARRIERID
1
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
.
.
n. L,2
1. <CARRIERID
n
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
4b. L,n [MF = substrate]
1. <MID
1
>
.
.
n. <MID
n
>
5. L,3
1. <PRRECIPEMETHOD>
2. <RCPSPEC>
3. L,m [m = # recipe parameters]
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
6. <PRPROCESSSTART>
7. <PRPAUSEEVENT>
Exception
The list for specifying material (item 4a and 4b) is empty (L,0 instead of L,n), when no material is specified for the process job.
The form of data item 4(a or b) depends on the value in MF.