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SEMI E117-1104 © SEMI 2002, 2004 4 a. Exposure Equipme nt with RSP L oad Ports on Rear b. Exposure Equip ment with R SP Load Ports on One Side, and an Optional Vi ew of a 90  OHV Track Orientation. Figure 1 Easement for…

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SEMI E117-1104 © SEMI 2002, 2004 3
equipment), and it must be open from above to facilitate
automatic carrier delivery from an overhead transport
system.
6.9.3 In Option 3 (with no allowance for automatic
carrier deliver from an overhead transport system), the
top of the carrier must be H2 (2900 for exposure
equipment), clearance above the reticle must be C3.
6.9.4 Additional load ports used for manual
loading/unloading can be located below the primary
load port in each of the three options.
6.9.5 Equipment suppliers and users should note that
SEMI S8 requirements might restrict such
implementations of manual load ports.
Table 1 Dimensional Requirements for Reticle Load Ports
Dimension Application Value, mm (in.) Notes
C1 minimum 75 (3.0) Clearance to left and right of RSP.
C2 minimum 50 (2.0) Radial clearance around RSP.
C3 minimum 150 (5.91)
D maximum 250 (9.8) Load face plane to facial reference plane.
D1 minimum 196 (7.72) Facial reference plane to OHT easement.
H range
minimum 890 (35.0)
maximum 2690 (106)
Port height: lithography exposure equipment.
925 ± 35 (36.4 ± 1.4) Reticle stockers and inspection equipment.
H1 maximum 60 (2.36) Loading obstruction height at load port.
2900 (114.2) OHT easement height: exposure equipment.
H2 maximum
2600 (102.4)
Reticle stockers and inspection equipment
(recommended for exposure equipment).
H6 maximum 3200 (126) Side OHT easement height (see Figure 2b).
R
minimum
10 (0.4) required
15 (0.6) recommended for ergonomic reasons
Load port lead-in capability (correction of RSP
misalignment in any horizontal direction).
S minimum 290 (11.4) [358 (14.1)] Spacing of adjacent load ports.
#1
In Table 1 and in the figures of this document, numbers in [square brackets] are specific to the RSP200 (if different from the RSP150 and
MRSP150).
SEMI E117-1104 © SEMI 2002, 2004 4
a. Exposure Equipment with RSP Load Ports on Rear
b. Exposure Equipment with RSP Load Ports on One Side, and an Optional View of a 90
OHV Track Orientation.
Figure 1
Easement for Overhead Transport
SEMI E117-1104 © SEMI 2002, 2004 5
890

H
2690
(exp. eqpt.)
H = 925 ± 35
(others)
H1
60
D 250
equipment
boundary
facial
reference
plane
RSP
front
load
face
plane
S 290
[358]
equipment
top
(see SEMI
E72
)
overhead
track
clearance
bilateral
reference
planes
RSP
horizontal
reference
plane
floor
H2
2600
(reticle stockers
and inspection
equipment)
H2 2900
(exposure
equipment)
C2
50
C1
75
Front
View
Side
View
D1
196
a. Reticle Stockers, Inspection Equipment, and Exposure Equipment with Load Ports on the Rear
H6
3200
890
H
2690
(exp. eqpt.)
H = 925 ± 35
(others)
H2
2900
H1
60
D
250
C2
50
C1
75
equipment
boundary
facial
reference
plane
RSP
front
load
face
plane
equipment
top
(see SEMI
E72)
overhead
track
clearance
bilateral
reference
planes
RSP
horizontal
reference
plane
floor
S 290
[358]
Front
View
Side
View
D1
196
b. Exposure Equipment with Load Ports on One Side
Figure 2
Reticle Load Port Requirements