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SEMI C54-1103 © SEMI 2003 15 NOTICE: SEMI makes no warranties or represen tations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability of the stand…

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SEMI C54-1103 © SEMI 2003 14
Figure 5
Valve Sampling System for the Analysis of Kr and N
2
in Grade 3.8
Figure 6
Analysis of Nitrogen and Argon in Oxygen Using Oxygen Trap in Grade 5.8
SEMI C54-1103 © SEMI 2003 15
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
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Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
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consent of SEMI.
1 SEMI C55-1104 © SEMI 2004
SEMI C55-1104
SPECIFICATION FOR LIQUID CARBON DIOXIDE (CO
2
) USED IN NEAR
CRITICAL, CRITICAL AND SUPERCRITICAL APPLICATIONS, ≥ 99.99%
QUALITY
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004.
1 Purpose
1.1 The purpose of this document is to provide a
specification for liquid carbon dioxide (CO
2
) that is
used in near critical, critical and supercritical
applications in the semiconductor industry.
2 Scope
2.1 This document provides purity requirements for all
grades of liquid carbon dioxide that are used in near
critical, critical and supercritical applications in the
semiconductor industry.
2.2 If analytical methods are not complete, the
requirements are presented as a guideline.
NOTE 1: Minimum purity requirements. Some applications
may require higher purity.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and to determine
the applicability of regulatory or other limitations prior
to use.
3 Description/Definition
3.1 Carbon dioxide is a non-flammable, colorless,
odorless compound that is stable at ambient conditions
(25
o
C, 1 bar). Supercritical carbon dioxide exists at a
temperature and pressure that exceeds the critical point
of carbon dioxide. Near critical carbon dioxide exists
in the liquid phase at a pressure that meets or exceeds
the critical pressure and a temperature that is below its
critical temperature but above a reduced temperature
(absolute temperature divided by absolute critical
temperature) of approximately 0.75.
4 Terminology
4.1 None.
5 Specifications
Table 1 Quality: ≥99.99%
Impurities Maximum Acceptable Level
Water 20 ppmv
Total Hydrocarbons
expressed as Methane (THC)
50 ppmv
Particles
#1
Soluble and Insoluble
Compounds Containing
Metals (Na, Fe, Ni, Cu, Cr,
Co, Ca, Mn, W, Mo) (each)
0.1 ppmw
#1: To be determined between supplier and user.
6 Referenced Standards
6.1 SEMI Standards
SEMI C10 — Guide for Determination of Method
Detection Limits
SEMI C15 — Test Method for ppm and ppb Humidity
Standards
SEMI F33 — Method for Calibration of Atmospheric
Pressure Ionization Mass Spectrometer (APIMS)
6.2 ASTM Standard
1
E 1747-95(2000) — Guide for Purity of Carbon
Dioxide Used in Supercritical Fluid Applications
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
1 American Society for Testing and Materials International, 100 Barr
Harbor Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555, Website:
www.astm.org.