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SEMI E87-0705 © SEMI 1999, 2005 39 16.4.20 ReserveAtPort 16.4.20.1 The Reserv eAtPort service is sent by the host to indicate future activity at the load port. This allows for reserving the port but do ing host based ID …

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Table 32 CarrierTagWriteData Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
LocationID C — The ID for the location of the carrier. Either LocationID or CarrierID must
be used.
CarrierID C — The CarrierID of the carrier. Either LocationID or CarrierID must be used.
DataSeg C — Indicates a specific section of data.
DataSize C — Indicates the number of bytes to read.
Data M — Data from the carrier ID tag. May be NULL if no data exists for the given
section.
CMStatus — M Information concerning the result of the service.
16.4.17 ChangeAccess
16.4.17.1 The ChangeAccess message requests a change of access mode for the load ports specified in the PortList.
Table 33 ChangeAccess Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
AccessMode M — The new desired access mode.
PortList M — The list of ports to use the new access mode.
CMStatus — M Information concerning the result of the service.
16.4.18 ChangeServiceStatus
16.4.18.1 The ChangeServiceStatus service is used to request the production equipment change a load port service
state.
Table 34 ChangeServiceStatus Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
ServiceStatus M — The new service state.
CMStatus — M Information concerning the result of the service.
16.4.19 ProceedWithCarrier
16.4.19.1 The ProceedWithCarrier service is sent by the host to indicate that the carrier operations may continue.
When using host based verification it is used by the host to indicate to the production equipment that the verification
of Carrier ID and/or the Carrier Slot Map is correct. For successful production equipment based verification the
production equipment shall not require this message before proceeding with the carrier. For failed production
equipment based verification the production equipment shall require either a CancelCarrier or ProceedWithCarrier
service.
16.4.19.2 Using Table 34, for the Host based CarrierID verification case, the ProceedWithCarrier service sent by
the host after the first carrier ID read is referred to as ProceedWithCarrier #1, the ProceedWithCarrier service sent
after slot map read is referred to as ProceedWithCarrier #2.
Table 35 ProceedWithCarrier Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which processing may proceed.
CarrierID M — The CarrierID for which processing may proceed.
PropertiesList C — A list of name value pairs providing attributes for the carrier object.
CMStatus — M Information concerning the result of the service.
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16.4.20 ReserveAtPort
16.4.20.1 The ReserveAtPort service is sent by the host to indicate future activity at the load port. This allows for
reserving the port but doing host based ID verification. The load port will enter the RESERVED State after
receiving this service. The equipment shall move a carrier to a reserved load port.
Table 36 ReserveAtPort Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The Port ID to reserve
CMStatus — M Information concerning the result of the service.
17 Carrier Tag Read/Write
17.1 Some technologies allow data to be stored on a carrier ID tag where it can be subsequently read and/or
modified. In this case, it is the host that specifies when this data is written and read, because the equipment has no
knowledge of the contents of the data. The read operations shall be performed only when the carrier is at the read
position. The write operations shall be performed only when the carrier is at the write position. NOTE: The read
and write positions may be the same position. The host shall be able to both read and write whenever CarrierHold
switch is set to Host Release and the carrier is at the respective read or write position. Once the host has completed
all of its read and write operations for that carrier, then the host sends the CarrierRelease request to the equipment.
In all cases, the CarrierAccessingStatus state shall be set to either CARRIER COMPLETE or CARRIER STOPPED
before the carrier may be undocked. The CarrierRelease service informs the equipment that carrier read or carrier
write is complete. For internal buffer equipment the CarrierRelease service shall allow the equipment to move the
carrier away from the read or write position.
Figure 7The CarrierRelease service has a different purpose from the CarrierOut service. The intent of the CarrierOut service
request is to move the carrier to a loadport, while the intent of the CarrierRelease service request is to inform equipment that it
may move the carrier away from the read or write position. Therefore, CarrierOut may also be used with the CarrierRelease
command. If CarrierHold is Host Release, then the carrier shall be kept at the write position until an CarrierRelease service
request is received, regardless of when a CarrierOut is sent. If CarrierHold is set to Equipment Release, then the CarrierRelease
request has no effect.
18 Additional Events
18.1 This section identifies data collection events that are not related to State transitions for variable data items. The
intent of this section is to ensure certain data is available for specific events that are not related to state transitions,
not to define all the additional collection events for CMS. Also, all state transitions in CMS state models are
required to have associated event reports.
18.2 Buffer Capacity Changed Event
18.2.1 An event shall be generated whenever Buffer Capacity changes. This applies to all internal buffers and
internal buffer partitions.
18.2.2 Data required to be available for this event report:
BufferPartitionInfo.
18.3 Carrier Approaching Complete Event
18.3.1 In some cases, for carrier transfer efficiency, the host needs to know carrier completion timing a little faster
than actual. For example:
If the equipment is internal buffer type, QTAT carriers need to be moved out directly from internal FIMS to a
load port to shorten moving out time.
If the equipment uses non-product carriers, such as dummy, they need to be changed before it becomes not
reusable to prevent stopping the equipment operation.
If the equipment uses non-product carriers, such as test, reject, they need to be changed before it becomes
empty or full to prevent stopping the equipment operation.
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18.3.2 This event shall be generated when the access by the equipment to the carrier is approaching complete. How
the timing of the event is determined shall be configurable.
18.3.3 Detailed definition of the event timing depends upon the type of usage of the carrier. Some examples of
event timing for different types of usage are shown below.
18.3.3.1 PRODUCT — When remaining time until the carrier starts moving from internal FIMS to internal buffer
reaches the configurable variable time (internal buffer equipment only).
18.3.3.2 DUMMY — When remaining times until substrates of the carrier becomes not reusable reaches the
configurable variable times.
18.3.3.3 TEST — When remaining substrates until the carrier becomes empty reaches the configurable variable
number.
18.3.3.4 REJECT — When remaining slots until the carrier becomes full reaches the configurable variable number.
18.3.4 Suppliers shall document the interpretation and the configurable variable(s) in the equipment specification
document.
18.3.5 Data required to be available for this event report:
CarrierID
18.4 Carrier Clamped Event
18.4.1 An event shall be generated whenever a carrier is clamped. Clamped means the load port has engaged a
device that would inhibit removal or movement of the carrier by any entity external to the load port. Some load
ports may include more than one clamping device. This event should be generated only when the first clamping is
engaged. This applies to all load ports.
18.4.2 There is no standard for when load ports clamp a carrier. Therefore the IC makers host systems and
personnel will need some signal from the equipment to know if a carrier is clamped. This event provides that signal.
This applies to all load ports that provide clamping. If a load ports does not clamp the carrier no event is required.
18.4.3 Data required to be available for this event report:
Port ID,
Carrier ID (if available), and
Location ID.
18.5 Carrier Closed Event
18.5.1 If the carrier is equipped with a door, an event shall be generated when a carrier door has been closed.
18.5.2 Data required to be available for this event report:
CarrierID,
LocationID, and
PortID (if valid).
18.6 Carrier Location Change Event
18.6.1 An event shall be generated whenever a carrier has changed location. This applies to both load ports,
substrate ports, and internal buffer locations.
18.6.2 Data required to be available for this event report:
CarrierID,
LocationID (new destination location), and
CarrierLocationMatrix.