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SEMI S13-0305 © SEMI 1998, 2005 1 SEMI S13-0305 ENVIRONMENTAL, HEALTH A ND SAFETY GUIDELINE FOR DOCUMENTS PROVIDED TO THE EQ UIPMENT USER FOR USE WI TH SEMICONDUCTOR MANUFACTURING EQUIPMENT This safety guideline was tech…
SEMI S12-0298 © SEMI 199811
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI S13-0305 © SEMI 1998, 2005 1
SEMI S13-0305
ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR
DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH
SEMICONDUCTOR MANUFACTURING EQUIPMENT
This safety guideline was technically approved by the Global Environmental Health & Safety Committee and
is the direct responsibility of the Japanese Environmental Health & Safety Committee. Current edition
approved by the Japanese Regional Standards Committee on November 24, 2004. Initially available at
www.semi.org in January 2005; to be published in March 2005. Originally published in February 1998.
NOTICE: This document was rewritten in its entirety in 2005.
1 Purpose
1.1 This guideline presents considerations for environmental, health and safety information in documents (such as
operation, maintenance, installation and safety manuals) provided for use with semiconductor or Flat Panel Display
(FPD) manufacturing equipment in order to help risk reduction in operation, maintenance, and installation of
equipment used in semiconductor or FPD manufacturing.
1.2 It is intended that personnel who operate, maintain, service, install, decontaminate or decommission equipment
should read the documents provided to the equipment user that describe the tasks they are to perform.
2 Scope
2.1 This guideline applies to the documents provided to the equipment user to be used with equipment for
production, measurement, assembling, and testing of semiconductor or FPD products.
2.2 This guideline contains the following items:
Purpose
Scope
Limitations
Referenced Standards
Terminology
General Criteria of Documents Provided to the Equipment User
Hazards Inherent in Equipment
Hazardous Energy Control Procedures
Hazard Alerts
Hazards Inherent in Tasks
Material Safety Data Sheet (MSDS)
Personal Protective Equipment (PPE)
Equipment Inspection, Consumables, and Maintenance
Training Requirements
Emergency Contact and Response
Related Documents
Appendix 1: Document Criteria to be added to SEMI S2
SEMI S13-0305 © SEMI 1998, 2005 2
NOTE 1: This document contains several Related Information sections that restate documentation criteria that appear in other
SEMI documents. These restatements were current as of the dates that the Related Information sections were written and are
included for the convenience of the users of this document. As the other SEMI documents may be changed at any time, the users
of this document must refer to the other SEMI documents for the official versions of these criteria.
NOTE 2: This document contains several Related Information sections that include proposed subject-specific documentation
criteria developed by the SEMI S13 Revision TF. It was the intent of the Task Force responsible for SEMI S13 that the criteria
in these Related Information sections be incorporated in future revisions of the documents to which they pertain and that these
Related Information sections be removed from SEMI S13 by revising SEMI S13 with the same effective date as the effective date
of the addition of these criteria to the documents to which they pertain.
NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the
responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Evaluation reports are not within the scope of SEMI S13.
3.2 SEMI S13 does not address physical characteristics of documents.
4 Referenced Standards
4.1 SEMI Standards
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S6 — Safety Guideline for Ventilation
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Guideline for Equipment Decontamination
SEMI S14 — Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing
Equipment
SEMI S16 — Environmental, Health and Safety Guidelines for Semiconductor Manufacturing Equipment Disposal
4.2 ANSI Standard
1
ANSI Z400.1 — American National Standard for Hazardous Industrial Chemicals - Material Safety Data Sheets -
Preparation
4.3 Other Standards
International Labor Convention No. 170
2
— Convention Concerning Safety in the Use of Chemicals at Work
EN1050
3
Safety of Machinery — Principles for risk assessment
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
1 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:
202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023,
www.ansi.org
2 International Labour Organization, 4, route des Morillons CH-1211 Geneva 22 Switzerland, Tel: +41.22.799.6111 , Fax: +41.22.798.8685,
http://www.ilo.org/
3 European Committee for Standardization(CEN) 36 rue de Stassart, B - 1050 Brussels, Tel: + 32 2 550 08 11, Fax: + 32 2 550 08 19,
http://www.cenorm.be/cenorm/index.htm; European Committee for Electrical Standardization(CENELEC), 35, Rue de Stassartstraat, B-1050
Brussels, Belgium, Phone: +32 2 519 68 71, Fax: +32 2 519 69 19, http://www.cenelec.org/Cenelec/Homepage.htm