semi合集-English.pdf - 第4949页
SEMI M11-0704 © SEMI 1988, 2004 6 Figure 4 Epitaxial Stacking Fault. Atomic Force Microscope (A FM) Image. Ap proximate SSIS sc attering event size 0.12 µm.
SEMI M11-0704 © SEMI 1988, 2004 5
Figure 3
The Epi Stacking Fault (ESF) defect is a grown-in defect with 1 to 4 sides of a square visible. Magnification
1500 times using Nomarski Interference Microscopy. Approximate SSIS event size: 0.165 µm
5
µ
m
SEMI M11-0704 © SEMI 1988, 2004 6
Figure 4
Epitaxial Stacking Fault. Atomic Force Microscope (AFM) Image. Approximate SSIS scattering event size
0.12 µm.
SEMI M11-0704 © SEMI 1988, 2004 7
Figure 5
Epitaxial Stacking Fault showing four sides and a deep depression on on side of about 20 nm. Atomic Force
Microscope Image. Approximate SSIS scattering event size, 0.30 µm.