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SEMI E109-0305 © SEMI 2001, 2005 64 APPENDIX 1 APPLICATION NOTES NOTICE : The material in this appendix is an official part o f SE MI E109 and was approved by full letter b a llot procedures. A1-1 This is a place holder …

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SEMI E109-0305 © SEMI 2001, 2005 63
2. If processing on the first pod with the PodID has not begun, it should not be processed.
3. If processing on the first pod has begun a Duplicate PodID In Process event shall be issued to notify the host.
23 Reticle and Pod Management Equipment Constants
23.1 Reticle ID Verification Constant — Reticle ID verification may or may not be required by IC makers. To
facilitate common implementation across reticle handling tools, an equipment constant (ECV) called
ReticleIDVerification (RIV) is required. The values of this constant are Boolean. If true, ID verification is required.
Verification is provided by the equipment if the reticle is instantiated (by service) prior to reticle ID read.
Verification is provided by the Host or an operator if the reticle not instantiated at the time of reticle ID read. If
false, ID verification is not required.
23.2 Particle inspection may or may not be required by IC makers. To facilitate common implementation across
reticle handling tools, an equipment constant call ReticleParticleInspection (RPI) is required. The values of this
constant are Boolean. If true, particle inspection is required. If false, no particle inspection is required.
24 Requirements for Compliance
24.1 Table 59 provides a checklist for RPMS compliance.
Table 59 RPMS Compliance Statement
Fundamental RPMS Requirements RPMS Section Implemented RPMS Compliant
Load Port Numbering 9.2 Yes No Yes No
Reticle Pod Slot Numbering 9.3 Yes No Yes No
Reticle Pod Load Port Transfer State Model 9.5 Yes No Yes No
Reticle Pod Object Implementation 10 Yes No Yes No
Reticle Object Implemenation 14 Yes No Yes No
Reticle State Model 14.4 Yes No Yes No
Reticle Pod Load Port/Pod Association State Model 13 Yes No Yes No
Reticle Location Object Implementation 17 Yes No Yes No
Reticle Location State Model 17.2 Yes No Yes No
PodID Verification Support 15.2 Yes No Yes No
Slot Map Verification Support 15.3 Yes No Yes No
Reticle Verification Support 15.4 Yes No Yes No
Fundamental Services Implementation 18.4 Yes No Yes No
Additional Events Implementation 20 Yes No Yes No
Variable Data Definitions 21.2 Yes No Yes No
Alarms Implementation 22 Yes No Yes No
Additional RPMS Capabilities RPMS Section Implemented RPMS Compliant
Reservation Visible Signal 12.2 Yes No Yes No
Reticle Pod Load Port Reservation State Model 12 Yes No Yes No
ReticleTransferJob 18.5.11 Yes No Yes No
Access Mode State Model 11 Yes No Yes No
Additional Services Implementation 18.5 Yes No Yes No
SEMI E109-0305 © SEMI 2001, 2005 64
APPENDIX 1
APPLICATION NOTES
NOTICE: The material in this appendix is an official part of SEMI E109 and was approved by full letter ballot procedures.
A1-1 This is a place holder for the description of when the Alarms can be cleared.
NOTICE:. SEMI makes no warranties or representations as to the suitability of the standards set forth herein for
any particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E109.1-0704 © SEMI 2002, 2004 1
SEMI E109.1-0704
PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL FOR
RETICLE AND POD MANAGEMENT (RPMS)
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the North American Information and Control Committee. Current edition approved
by the North American Facilities Committee on March 14, 2004. Initially available at www.semi.org May
2004; to be published July 2004. Originally published March 2002; previously published November 2002.
1 Purpose
1.1 This document maps the services of SEMI E109 to
SECS-II streams and functions. This document also
maps the data of SEMI E109 to E5 data definitions.
2 Scope
2.1 This is a provisional standard that covers host and
equipment communication for equipment that handle
reticles. This includes equipment that handle reticles
both inside and outside of a reticle pod. The provisional
status is required because of the immaturity of
implementations of integrated equipment with
Automated Material Handling Systems (AMHS) or
Automated Reticle Handling Systems (ARHS).
Additional specifications may be defined to add further
functionality. Also, further exception handling and error
recovery scenarios need to be defined.
2.2 This document applies to all implementations of
SEMI E109 that use SECS-II message protocol (SEMI
E5). Compliance to this standard requires compliance
to both SEMI E109 and SEMI E5.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This standard applies to semiconductor equipment
that handles reticles and reticle carriers. This standard is
intended to be used for lithography production, bare
reticle storage, and reticle inspection equipment. It may
or may not be applied to other types of equipment.
4 Referenced Standards
4.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E39.1 — SECS-II Protocol for Object Services
Standard (OSS)
SEMI E109 — Provisional Specification for Reticle
and Pod Management (RPMS)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Services Mapping
5.1 This sections shows the specific SECS-II streams
and functions that shall be used for SECS-II
implementations of the services defined in SEMI E109,
as well as the parameter mapping for data attached to
services.
5.2 Services Message Mapping
5.2.1 Table 1 defines the relationships between SEMI
E109 services and SECS-II messages.