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SEMI E109-0305 © SEMI 2001, 2005 51 18.5.3 CancelPodOut 18.5.3.1 The CancelPodOut service is sent t o internal buffer pr oduction eq uipment t o cancel a que u ed PodO ut. Table 38 CancelPodOut Serv ice Parameter Definit…

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SEMI E109-0305 © SEMI 2001, 2005 50
18.4.13 ProceedWithReticle
18.4.13.1 The ProceedWithReticle service is sent by the host to indicate that reticle operations may continue. In
particular and in the normal case, this service is used to change a Reticle, in the RETICLE WAITING FOR HOST
state from RETICLE WAITING FOR HOST to PARTICLE INSPECTION when particle inspection is required, and
from RETICLE WAITING FOR HOST to QUALIFIED if particle inspection is not required.
Table 34 ProceedWithReticle Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
ReticleID M — The ID of the reticle for which to change the
UNQUALIFIED RETICLE status.
Reticle Location ID C — The location of the reticle.
RPMStatus — M Information concerning the result of the service.
18.4.14 RejectReticle
18.4.14.1 The RejectReticle service is sent by the host to indicate that the reticle may no longer be used for
processing, unless it is requalified. The equipment shall change the reticle state model RETICLE AT EQUIPMENT
status to REJECTED.
Table 35 RejectReticle Service Parameter Definition
Parameter Name Req/Ind Rsp/Conf Description
ReticleID M — ReticleID to designate the RETICLE AT EQUIPMENT status.
RPMStatus — M Information concerning the result of the service.
18.4.15 SetQualificationIntervalTime
18.4.15.1 The SetQualifiactionIntervalTime service is sent by the host to change the time between inspection for a
specific or a list of specific reticles. This service uses SETATTR as defined in SEMI E39.
18.5 Additional Service Message Definitions
18.5.1 CancelAllPodOut
18.5.1.1 The CancelAllPodOut service is sent to internal buffer production equipment to cancel all PodOut services
in queue.
Table 36 CancelAllPodOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CMStatus — M Information concerning the result of the service.
18.5.2 CancelMoveReticle
18.5.2.1 The CancelMoveReticle service is sent by the host to cancel a MoveReticle service. The equipment shall
refrain from removing the reticle specified. This shall apply on if the move has not been started.
Table 37 CancelMoveReticle
Parameter Name Req/Ind Rsp/Conf Description
ReticleID M — The ReticleID which should not be removed.
RPMStatus — M Information concerning the result of the service.
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18.5.3 CancelPodOut
18.5.3.1 The CancelPodOut service is sent to internal buffer production equipment to cancel a queued PodOut.
Table 38 CancelPodOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — PodID for the PodOut service that is being cancelled.
CMStatus — M Information concerning the result of the service.
18.5.4 CancelReservationAtPort
18.5.4.1 The CancelReservationAtPort service is sent by the host to cancel a reservation at the load port. The load
port will enter the UNRESERVED State after receiving this service. A Port reserved by the physical initiation of a
pod out operation may not be cancelled by this service.
Table 39 CancelReservationAtPort Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The Port ID to reserve.
CMStatus — M Information concerning the result of the service.
18.5.5 CancelReticleTransferJob
18.5.5.1 The CancelReticleTransferJob is sent by the host to cancel a previous ReticleTransferJob service.
Table 40 CancelReticleTransferJob Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the pod for which to cancel the load port to pod
association.
PortID M — The Port ID for which to cancel the load port to pod association.
OutputPortID M — The Port ID where the pod was to have been delivered after having
executed all reticle related actions.
RPMStatus — M Information concerning the result of the service.
18.5.6 Clamp
18.5.6.1 The Clamp service is used by the host if the equipment has separate mechanisms for clamping the carrier
that are independent of opening the carrier. It is used to instruct equipment to engage the independent clamping
mechanism. It is used by the host when “macro” instructions such as provided by Bind, PodNotification,
ProceedWithPod and ReticleTransferJob have not been provided.
Table 41 Clamp Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID C — The PodID of the pod to clamp. Either the PodID or the PortID must be
specified.
PortID C — The PortID for which to clamp a carrier. Either the PodID or the PortID
must be specified.
CMStatus — M Information concerning the result of the service.
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18.5.7 Close Pod
18.5.7.1 The ClosePod service is used by the host to request the equipment close a pod.
Table 42 ClosePod Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID where a pod is to be closed. Either PortID or PodID must be
specified.
PodID C — The PodID for which the door should be closed. Either PortID or PodID
must be specified.
CMStatus — M Information concerning the result of the service.
18.5.8 IndexDown
18.5.8.1 The IndexDown service is sent by the host to indicate that the equipment should index the reticle cassette
to the position where reticle may be removed from the cassette when it is safe for equipment, personnel, and reticles
to do so.
Table 43 IndexDown Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
PodID C — The ID of the pod to index down.
CMStatus — M Information concerning the result of the service.
18.5.9 IndexUp
18.5.9.1 The IndexUp service is sent by the host to indicate that the equipment should index the reticle cassette to
the position where the reticle pod may be removed from the equipment when it is safe for equipment, personnel, and
reticles to do so. This service is optional.
Table 44 IndexUp Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
PodID C — The ID of the pod to index up.
CMStatus — M Information concerning the result of the service.
18.5.10 MoveReticle
18.5.10.1 The MoveReticle service is used to move reticles from one reticle location to another. This can include
moving a reticle from a reticle pod location (external to a tool) to an internal reticle library, ReticleID read location,
process location, or a different reticle pod location or from an internal location to another internal location or to a
reticle pod location.
Table 45 MoveReticle Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
ReticleID C — The ID of the Reticle to move, either the ReticleID or the SourceLocation
must be used.