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SEMI E36-0704  1995, 2004 10 NOTICE: These standards do not pu rport to address safety issues, if any, associated with their use. It is the responsibility of the user of these stan dards to establish appropriate safety …

SEMI E36-0704  1995, 2004

• Attribute Title, consisting of the short form of the

attribute which appears in the documents, and the

attribute Name;

• Attribute usage, describing how that attribute is

used;

• For each possible value of an attribute with a

specified set of values, the meaning or implications

of each value; and

• The default value of the attribute.

6.3 Creation of More Specific Authoring or Rendering

Models - The DTDs and models described in

Semiconductor Equipment Manufacturing Information

Tagging will not be designed for optimal use in

document creation. To create and display documents,

data creators may wish to create more enforcing

authoring models based on this markup. Such authoring

models may:

• Require the presence of specific elements;

• Specify the sequence of elements; and/or

• Include additional elements for internal use (which

would need to be removed before interchange). For

example, such information might include elements

for tracking the internal authoring and validation

processes or for company-confidential information.

Similarly, it is likely that viewing, print rendition,

search and retrieval, or other display applications will

create display-only models based on Semiconductor

Equipment Manufacturing Information Tagging. To

load display tools, it is quite likely that the specified

models will be transformed into a form that is

optimized for the particular search and retrieval or

display system. Such display models might:

• Resequence the data;

• Add additional markup such as “container” tags

around structures to be considered one element for

formatting purposes;

• Transform the form of some elements; or

• Remove parts of the information that are not

relevant to a particular application.

7 Related Documents - SEMI Content

Standards and Specifications

As described in section 2.4, the following list contains

examples of SEMI content-related or content guideline-

related standards and specifications.

SEMI C16 — Guide for Precision Reporting/Data

Traceability

SEMI D9 — Definitions for Flat Panel Display

Substrates

SEMI D13 — Terms and Definitions for FPD Color

Filter Assemblies

SEMI E6 — Facilities Interface Specifications

Guideline and Format

SEMI E10 — Standard for Definition and Measurement

of Equipment Reliability, Availability, and

Maintainability (RAM)

SEMI E29 — Standard Terminology for the Calibration

of Mass Flow Controllers and Mass Flow Meters

SEMI E30 — Generic Model for Communications and

Control of SEMI Equipment (GEM)

SEMI E35 — Cost of Ownership for Semiconductor

Manufacturing Equipment Metrics

SEMI E58 — Automated Reliability, Availability, and

Maintainability Standard (ARAMS): Concepts,

Behavior, and Services

SEMI G57 — Guideline for Standardization of

Leadframe Terminology

SEMI M10 — Standard Nomenclature for Identification

of Structures and Features Seen on Gallium Arsenide

Wafers

SEMI P22 — Guidelines for Photomask Defect

Classification and Size Definition

SEMI P29 — Guideline for Description of

Characteristics Specific to Halftone/Attenuated Phase

Shift Masks and Mask Blanks

SEMI P30 — Practice for Catalog Publication of

Critical Dimension Measurement Scanning Electron

Microscopes (CD-SEM)

SEMI S1 — Safety Guideline for Visual Hazard Alerts

SEMI S7 — Safety Guidelines for Environmental,

Safety, and Health (ESH) Evaluation of Semiconductor

Manufacturing Equipment

SEMI S13 — Safety Guidelines for Operation and

Maintenance Manuals Used with Semiconductor

Manufacturing Equipment

SEMI T6 — Procedure and Format for Reporting of

Test Results by Electronic Data Interchange (EDI)

SEMI E36-0704  1995, 2004

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E36.1-0704

SPECIFICATION FOR THE SEMICONDUCTOR EQUIPMENT

MANUFACTURING INFORMATION TAGGING STANDARD E36

This specification was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North American Regional Standards Committee on March 14, 2004. Initially available at www.semi.org

May 2004; to be published July 2004.

NOTICE: The Document Type Definitions, schemas, and Tag Library defined in this standard may be used freely

without permission or payment of royalties or other licensing charge, provided this source and/or its associated

specifications are cited.

1 Purpose

1.1 The purpose of this specification provides the consolidated Tag Library required in implementing the

SEMI E36-0699 standard.

2 Scope

2.1 The specification contains two levels of compliance necessary in implementing the electronic documentation

standard. The following two components make up the compliance levels.

2.1.1 Level One Identity — Allows for content to be uniquely identified, most notably the Item ID and Edition ID

attributes.

2.1.2 Level Two Type and Metadata — Association of semantic detail with items. Important information about the

item that allows us to interpret the item correctly. Compliance is established for this level by ensuring that the item

uses a standard tag name and is equipped with a small standard set of metadata properties as defined by the

specification.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards

3.1 See

http://www.w3.org/TR/2000/CR-RDF-schema-20000327/

- RDF specification.

3.2 See

http://www.w3.org/TR/2000/CR-rdf-schema-20000327/#s2.3.1 for the related RDF schema.

3.3 See

http://dublincore.org/schemas/xmls/simpledc20020312.xsd for the related XML schema.

3.4 See

http://dublincore.org/ - Dublin Core Metadata Initiative (DCMI).

3.5 For a list of Dublin Core metadata elements, see

http://dublincore.org/documents/dces/.

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

4.1 None.

5 Consolidated Tag Library

5.1 The consolidated tag library is required to implement SEMI E36-0699. The first layer, identity, is supported by

the element “E36Item”, which identifies the tagged information as complying with SEMI E36-0699. The second

layer, metadata, provides the tags most important for managing and retrieving the documentation.

5.2 Level two compliance is achieved by the inclusion of one or more of the metadata elements described below.

For elements inserted for Level 2 compliance, all attributes are considered optional, unless otherwise indicated.