semi合集-English.pdf - 第3229页

SEMI E127-0705 © SEMI 2003, 2005 30 Comments Control Client (CC) Msg Dir STPO Comments 10b  XfrCommand.rsp XfrStatus = normal complet i on, no errors. 11a Confirm transfer is complete. XfrVerify.req  XfrLink = 1 11b  …

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SEMI E127-0705 © SEMI 2003, 2005 29
Comments Control Client (CC) Msg Dir STPO Comments
3b
XfrCommand.rsp Note: if command fails,
transfer should be
aborted.
XfrStatus = successful completion,
no errors.
Substrate Handler
extends arm into IMM.
5a XfrCommand.req
ObjID = “STPO1”,
XfrLink = 1,
XfrCmdName = “Raise
pins”
STPO raises pins.
5b
XfrCommand.req
XfrStatus = normal completion, no
errors.
Substrate Handler grips
substrate and moves up.
7a XfrCommand.req
ObjID = “STPO1”,
XfrLink = 1,
XfrCmdName = “Lower
pins”
STPO lowers pins.
7b
XfrCommand.rsp
XfrStatus = normal completion, no
errors.
8a XfrCommand.req
This XfrCmdName is
required and shall be sent
prior to XfrVerify.
ObjID = “STPO1”,
XfrLink = 1,
XfrCmdName = “Confirm
absence”
If substrate absence is not
confirmed, then the
transfer shall either be
retried or aborted.
STPO verifies that the
substrate is no longer
detected.
8b
XfrCommand.rsp
XfrStatus = normal completion, no
errors.
9
Event.nfy The Substrate Location
where substrates are
loaded changes from
OCCUPIED to
UNOCCUPIED
(SLOSM T2).
Substrate Handler
retracts arm from IMM.
10a XfrCommand.req
ObjID = “STPO1”,
XfrLink = 1,
XfrCmdName = “Close
door”
Door closed.
SEMI E127-0705 © SEMI 2003, 2005 30
Comments Control Client (CC) Msg Dir STPO Comments
10b
XfrCommand.rsp
XfrStatus = normal completion, no
errors.
11a Confirm transfer is
complete.
XfrVerify.req
XfrLink = 1
11b
XfrVerify.rsp Acknowledge transfer is
complete.
XfrStatus = normal completion, no
errors.
Data Table Object Model
references
Table
Data Table
IMM Data Table
Substrate Data
Set
IMM Converted
Data Table
IMM Raw Data
Table
IMM Calibration
Data Table
Data Row
Data Row
Template
Data Information
stores
site
data in
describes
order of data
within row
stores
attributes for
named data
0...*
0...*
1
1...*
1...*
0...* 0...*
1
Figure 8
Full Data Object Model
13 IMM Data
13.1 Overview
13.1.1 IMM Data consists of substrate context information together with one of the following: (1) measurements
taken on a substrate and stored as raw data, (2) meaningful results based on measurements, or (3) substrate
SEMI E127-0705 © SEMI 2003, 2005 31
calibration results based on measuring a substrate with expected values. Internal storage of IMM Data is
implementation-specific. Its apparent structure through the communication link is that of a type of table object.
Table attributes contain context information about the substrate, primarily collected from the Substrate Object
measured, while the data provided by the IMM is stored as ordered rows, where each row represents a single site
where measurements were taken.
13.1.2 There are two primary aspects to IMM Data, the data itself that provides the content of a table, and the
structure of the table as it appears using SEMI E39 object services.
13.1.3 Actual data table instances store the raw data collected during measurement, the results based upon that raw
data, or the results of calibrating to a known good substrate. This is reflected in the subtypes of the Data Table
object shown in Figures 9 and 10 below.
13.1.4 The second aspect is the structure of the Data Table Object, which is visible through use of templates. These
templates allow a user to discover the types of data available from the IMM and the format of that data (signed or
unsigned integer, floating point, text, etc.) without having to upload an actual table.
13.1.5 Data Table Objects and IMM Data Table Objects are abstract objects. All implementations of tables in IMM
shall be of a subtype of IMM Data Table Objects.
13.2 Tables
13.2.1 Table objects are defined in SEMI E58, §10 and §13. A Data Table Object is a type of Table object that
provides templates for individual data entries and for rows of entries. This allows a client that needs to use the data
provided in a data table to determine the information available in a table before an actual table is transferred.
13.2.2 All objects shown in Figures 5, 6, and 8 are used for purposes of exchanging data over the communication
link only. Data does not need to be stored internally in any particular manner.
13.2.3 Object Ownership — The IMM is considered to own both the tables that it stores and the set of Data Row
Templates. A specific instance of IMM table is considered to own its Data Rows and the associated Data Row
Template for that table. This allows the client to query a specific table for its template.
13.2.3.1 Ownership, as defined in SEMI E39, is not necessarily exclusive. An owner is expected to know about the
types of objects that it owns, their attributes, and their services.
14 IMM Data Table Object
14.1 Description
14.1.1 The IMM Data Object is a type of Data Table Object and inherits its attributes and relationships with
templates shown in Figures 8 and 11. The Data Table Object and its templates are discussed in §16. This section
specifies the IMM Data Object and its subtypes. Figure 9 shows the model for a Data Object.